JP6511440B2 - プラズマ照射方法、およびプラズマ照射装置 - Google Patents
プラズマ照射方法、およびプラズマ照射装置 Download PDFInfo
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- 230000001590 oxidative effect Effects 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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Description
図1に、本発明の実施例のプラズマ照射装置10を示す。プラズマ照射装置10は、水にプラズマを照射し、プラズマ処理水を生成するための装置である。プラズマ照射装置10は、本体部12と、1対の電極14,16と、ガラス管18と、流通管20と、気泡発生装置(図3参照)22とを備えている。
プラズマ照射装置10は、上述した構成により、本体部12内部に流れる水にプラズマを照射することで、プラズマ処理水を生成することが可能である。詳しくは、ポンプの作動により、本体部12の内部に、流通管20を介して、水が流される。この際、気泡発生装置22により、流通管20内の水に気泡が発生するため、本体部12の内部を流れる水50には、気泡が含まれている。
上述したプラズマ照射装置10に限られず、種々の構造のプラズマ照射装置を採用することが可能である。具体的には、例えば、図4に示すプラズマ照射装置60を採用することが可能である。プラズマ照射装置60は、電極62,64を除いて、実施例のプラズマ照射装置10の構成要素と同じ構成要素を備えている。このため、プラズマ照射装置10の構成要素と同じ構成要素については、プラズマ照射装置10の構成要素と同じ符号を用い、それらの説明は省略する。
また、例えば、図6に示すプラズマ照射装置70を採用することが可能である。プラズマ照射装置70は、電極72,74を除いて、実施例のプラズマ照射装置10の構成要素と同じ構成要素を備えている。このため、プラズマ照射装置10の構成要素と同じ構成要素については、プラズマ照射装置10の構成要素と同じ符号を用い、それらの説明は省略する。なお、プラズマ照射装置70は、図示しないが、ガラス等の絶縁体により封止されている。
また、上記実施例および変形例のプラズマ照射装置10,60,70では、円筒状の本体部12が採用されているが、角筒状の本体部を採用することが可能である。具体的には、図8に示すように、プラズマ照射装置100は、角筒状の本体部102と、1対の電極104,106とを備えている。本体部102は、サファイアガラスにより成形されており、断面形状が矩形の角筒状をしている。また、電極104,106は、平板状をしており、本体部102の向かい合う1対の外壁面に配設されている。
Claims (7)
- 液体にプラズマを照射するプラズマ照射方法であって、
当該プラズマ照射方法が、
絶縁体材料により成形された筒状の部材の一端から挿入された流通管であって、当該流通管の一端が前記筒状の部材の内部に位置した状態で配設された流通管から前記筒状の部材の内部に、所定の空間を残した状態で液体を流す液体流通工程と、
前記筒状の部材の外壁面に沿って配設された1対の電極への電圧の印加により、前記所定の空間に存在する気体をプラズマ化させるプラズマ化工程と、
前記所定の空間に気体を流す気体流通工程と、
を含み、
当該プラズマ照射方法が、
前記プラズマ化工程と前記気体流通工程の前であって、かつ、前記液体流通工程により前記筒状の部材の内部に液体が流される前に液体の内部に気泡を発生させる気泡発生工程を含むことを特徴とするプラズマ照射方法。 - 前記気体流通工程により気体は前記筒状の部材の内部の上側を流れ、前記液体流通工程により液体は前記筒状の部材の内部の下側を流れることを特徴とする請求項1に記載のプラズマ照射方法。
- 絶縁体材料により成形された筒状の部材と、
前記筒状の部材の外壁面に沿って配設された1対の電極と、
前記筒状の部材の内部に所定の空間を残した状態で液体を流す流通管と、
前記所定の空間に気体を流す気体流通装置と
を備え、前記1対の電極への電圧の印加により、前記所定の空間に存在する気体をプラズマ化させて、前記筒状の部材の内部を流れる液体にプラズマを照射するプラズマ照射装置であって、
前記流通管が、
前記筒状の部材の一端から挿入され、当該流通管の一端が前記筒状の部材の内部に位置する状態で配設され、
当該プラズマ照射装置が、
気体のプラズマ化および前記気体流通装置による気体の流通前であって、かつ、前記流通管により前記筒状の部材の内部に流される前の液体の内部に気泡を発生させる気泡発生装置を備えることを特徴とするプラズマ照射装置。 - 前記流通管の一端が、
前記筒状の部材の内部において、前記1対の電極が配設されている外壁面での径方向の位置と、前記筒状の部材の前記流通管が挿入されている側の一端との間に位置することを特徴とする請求項3に記載のプラズマ照射装置。 - 前記気体流通装置により気体は前記筒状の部材の内部の上側を流れ、前記流通管により液体は前記筒状の部材の内部の下側を流れることを特徴とする請求項3または請求項4に記載のプラズマ照射装置。
- 前記1対の電極の各々が、
前記筒状の部材の外壁面の周方向に延びるように配設される複数の放電部を有し、
前記1対の電極の一方の前記放電部と他方の前記放電部とが、前記筒状の部材の軸方向に延びるように、離間した状態で交互に配設されることを特徴とする請求項3ないし請求項5のいずれか1項に記載のプラズマ照射装置。 - 当該プラズマ照射装置が、
絶縁体材料により成形され、前記筒状の部材の外壁面に沿って配設された1対の電極を覆う被覆部材を備えることを特徴とする請求項3ないし請求項6のいずれか1つに記載のプラズマ照射装置。
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