JP6508156B2 - 積層型電子部品の製造方法 - Google Patents
積層型電子部品の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 239000004020 conductor Substances 0.000 claims description 154
- 239000012212 insulator Substances 0.000 claims description 84
- 238000010438 heat treatment Methods 0.000 claims description 34
- 239000002243 precursor Substances 0.000 claims description 28
- 238000010030 laminating Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 10
- 238000005520 cutting process Methods 0.000 claims description 8
- 230000008030 elimination Effects 0.000 claims description 7
- 238000003379 elimination reaction Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 description 22
- 239000000696 magnetic material Substances 0.000 description 19
- 229910000859 α-Fe Inorganic materials 0.000 description 9
- 239000003989 dielectric material Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000002241 glass-ceramic Substances 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 description 1
- 229910017082 Fe-Si Inorganic materials 0.000 description 1
- 229910017114 Fe—Ni—Al Inorganic materials 0.000 description 1
- 229910017133 Fe—Si Inorganic materials 0.000 description 1
- 229910002796 Si–Al Inorganic materials 0.000 description 1
- 229910008458 Si—Cr Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/043—Printed circuit coils by thick film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/33—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials mixtures of metallic and non-metallic particles; metallic particles having oxide skin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/29—Terminals; Tapping arrangements for signal inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/32—Insulating of coils, windings, or parts thereof
- H01F27/323—Insulation between winding turns, between winding layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/40—Structural combinations of fixed capacitors with other electric elements, the structure mainly consisting of a capacitor, e.g. RC combinations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0066—Printed inductances with a magnetic layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
- H01F2027/2809—Printed windings on stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/248—Terminals the terminals embracing or surrounding the capacitive element, e.g. caps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Coils Or Transformers For Communication (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Description
また、これらの機器の実装基板においては、電子部品を高密度で実装するために、実装用のランドパターンの極小化や隣接する電子部品間の距離の極小化が行われており、これらの機器の実装基板に実装される電子部品は高密度実装できることが求められている。
この様な状況の中、従来の積層型電子部品は、素体の長手方向の側面とこの側面に隣接する4つの面に外部端子が形成されているため、高密度実装される実装基板に実装してはんだ付けする際のはんだフィレットや、実装時の位置ずれ等により隣接する電子部品の外部端子間ではんだブリッジが発生し、電子部品間でショートが発生する場合があるという問題があった。そのため、この様な従来の積層型電子部品においては、隣接する電子部品間の距離をある程度保つ必要があり、高密度実装がされる実装基板に用いることが困難であった。
しかしながら、この様な従来の積層型電子部品は、絶縁体膜の厚み分が素子寸法に付加されるため、絶縁体膜の厚み分素子の形状を小さくする必要があり、所望のインダクタンスや直流重畳特性が確保し難いという問題があった。また、この様な従来の積層型電子部品は、外部端子が形成された後に絶縁体膜を形成するため、絶縁体膜を精度良く形成することは困難であり、底面に絶縁体膜が回りこんだ場合、実装時に実装基板のランドパターンからずれやすくなるという問題があった。
また、この様な従来の積層型電子部品は、素体内に導体を設けてコイルの両端を外部電極に接続しているために、図5、図6に示す従来の積層型電子部品に比べて、素体内の磁束通過面積を充分確保することが困難であり、所望のインダクタンスが得られなかったり、所望のインダクタンスが得られたとしてもコイルの抵抗値を上昇させることなく直流重畳特性を確保することが困難になったりするという問題があった。
さらに、この積層型電子部品は、側面に外部端子が形成されていないため、図5、図6に示す従来の積層型電子部品よりも、外部端子と絶縁体膜の体積分、積層体の体積を大きくでき、単位体積当たりの磁束密度が低下して、特性を向上させることができる。
図1は本発明の製造方法で製造される積層型電子部品に関する分解斜視図である。
図1において、10は素体、11Aから11Gは磁性体層、12Aから12Eは導体パターンである。
この導体パターン12Eが形成された磁性体層11Fの上には導体パターンを保護するための磁性体層11Gが形成される。
また、この素体10内において、第二端部に接続された導体と、コイルパターンの間に、磁性体層の積層方向に延在する絶縁体部が形成される。
11Aから11G 磁性体層
12Aから12E 導体パターン
Claims (3)
- 複数の絶縁体層と導体パターンとが交互に積層されてなる素体内に、絶縁体層間の導体パターンによって回路素子が形成された積層型電子部品の製造方法であって、
複数の絶縁体層と導体パターンを交互に積層して、内部に回路素子が形成された複数の素体を含む集合積層体を形成する工程、
該集合積層体の積層方向に直交する一方の面上に、複数の外部端子を形成する工程、
該集合積層体の該複数の外部端子が形成された面上に、該外部端子を被覆し、熱処理により消失する消失層を形成する工程、
該消失層が形成された集合積層体を、積層方向に沿って切断してそれぞれの素体に分割する工程、
該素体の表面に絶縁体前駆体を付与する工程、及び
該絶縁体前駆体が付与された該素体に熱処理を施して積層型電子部品を形成する工程を含み、
該積層型電子部品の該回路素子は、外部端子が配置される素体の底面から距離が近い導体パターンの引き出し端である第一端部と、素体の底面から距離が遠い導体パターンの引き出し端である第二端部とを有し、
該第一端部が該素体の底面上に配置される第一外部端子に接続され、該第二端部がその表面の少なくとも一部を露出して、該素体の側面に配置される導体を介して該素体の底面に配置される第二外部端子に接続され、
該素体の側面に露出した導体の表面が、該絶縁体前駆体の熱処理物である絶縁体膜で被覆されていることを特徴とする積層型電子部品の製造方法。 - 複数の磁性体層と導体パターンとが交互に積層されてなる素体内に、磁性体層間の導体パターンによって回路素子が形成された積層型電子部品の製造方法であって、
複数の磁性体層と導体パターンを交互に積層して、内部に回路素子が形成された複数の素体を含む集合積層体を形成する工程、
該集合積層体の積層方向に直交する一方の面上に、複数の外部端子を形成する工程、
該集合積層体の該複数の外部端子が形成された面上に、該外部端子を被覆し、熱処理により消失する消失層を形成する工程、
該消失層が形成された集合積層体を、積層方向に切断してそれぞれの素体に分割する工程、
該素体の表面に絶縁体前駆体を付与する工程、及び
該絶縁体前駆体が付与された該素体に熱処理を施して積層型電子部品を形成する工程を含み、
該積層型電子部品の該回路素子は、外部端子が配置される素体の底面から距離が近い導体パターンの引き出し端である第一端部と、素体の底面から距離が遠い導体パターンの引き出し端である第二端部とを有し、
該第一端部が該素体の底面上に配置される第一外部端子に接続され、該第二端部がその表面の少なくとも一部を露出して、該素体の側面に配置される導体を介して該素体の底面に配置される第二外部端子に接続され、
該素体の側面に露出した導体の表面が、該絶縁体前駆体の熱処理物である絶縁体膜で被覆されていることを特徴とする積層型電子部品の製造方法。 - 前記消失層を形成する工程は、前記集合積層体の外部端子が形成される面と対向する面上に、消失層をさらに形成することを含む請求項1又は請求項2に記載の製造方法。
Priority Applications (4)
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JP2016187162A JP6508156B2 (ja) | 2016-09-26 | 2016-09-26 | 積層型電子部品の製造方法 |
KR1020170121328A KR101982931B1 (ko) | 2016-09-26 | 2017-09-20 | 적층형 전자 부품의 제조 방법 |
US15/711,341 US10707016B2 (en) | 2016-09-26 | 2017-09-21 | Method of manufacturing laminated electronic component |
CN201710866109.7A CN107871586B (zh) | 2016-09-26 | 2017-09-22 | 层叠型电子部件的制造方法 |
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JPS5884412A (ja) * | 1981-11-13 | 1983-05-20 | Tdk Corp | 積層インダクタ |
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JP2005129772A (ja) * | 2003-10-24 | 2005-05-19 | Kyocera Corp | コンデンサ内蔵ガラスセラミック多層配線基板 |
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JP4998800B2 (ja) * | 2008-07-17 | 2012-08-15 | Tdk株式会社 | 積層チップバリスタおよびその製造方法 |
KR101174327B1 (ko) * | 2008-09-30 | 2012-08-16 | 티디케이가부시기가이샤 | 복합 전자 디바이스, 그 제조 방법, 및 복합 전자 디바이스의 접속 구조 |
JP5190331B2 (ja) | 2008-11-14 | 2013-04-24 | 東光株式会社 | 電子部品及びその製造方法 |
JP5770539B2 (ja) | 2011-06-09 | 2015-08-26 | Tdk株式会社 | 電子部品及び電子部品の製造方法 |
JP5082002B1 (ja) | 2011-08-26 | 2012-11-28 | 太陽誘電株式会社 | 磁性材料およびコイル部品 |
JP2013145869A (ja) * | 2011-12-15 | 2013-07-25 | Taiyo Yuden Co Ltd | 積層電子部品及びその製造方法 |
JP6291789B2 (ja) * | 2013-10-28 | 2018-03-14 | 株式会社村田製作所 | 積層コイル部品 |
JP6380192B2 (ja) | 2015-03-27 | 2018-08-29 | 株式会社村田製作所 | 積層型電子部品 |
JPWO2017014065A1 (ja) * | 2015-07-17 | 2018-04-26 | Fdk株式会社 | 積層インダクタ及び積層インダクタ製造方法 |
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