JP6496992B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP6496992B2 JP6496992B2 JP2014148848A JP2014148848A JP6496992B2 JP 6496992 B2 JP6496992 B2 JP 6496992B2 JP 2014148848 A JP2014148848 A JP 2014148848A JP 2014148848 A JP2014148848 A JP 2014148848A JP 6496992 B2 JP6496992 B2 JP 6496992B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- cathode
- conductivity type
- diode
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 58
- 230000005684 electric field Effects 0.000 claims description 66
- 239000010410 layer Substances 0.000 claims description 64
- 230000015556 catabolic process Effects 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 47
- 230000002093 peripheral effect Effects 0.000 claims description 42
- 238000002955 isolation Methods 0.000 claims description 14
- 239000012535 impurity Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000002344 surface layer Substances 0.000 claims description 4
- 238000011084 recovery Methods 0.000 description 32
- 238000009792 diffusion process Methods 0.000 description 15
- 230000000903 blocking effect Effects 0.000 description 9
- 238000000926 separation method Methods 0.000 description 7
- 230000006872 improvement Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000969 carrier Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 1
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
- H01L29/0623—Buried supplementary region, e.g. buried guard ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/404—Multiple field plate structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/8611—Planar PN junction diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
Description
前記第1導電型緩衝領域が複数形成されていることが好ましい。
2 n型カソード領域
3 p型アノード層
4 カソード電極
5 アノード電極
6 p型分離領域
7 FLR
8 絶縁膜
9 FP
10 活性領域
11 耐圧構造領域
12 開口部
13 p型領域
14 n型領域
15 トレンチ
16 LTE
17a、17b 低濃度n型領域
20a〜20i ダイオード
Claims (11)
- 第1導電型の半導体基板の一方の主面に設けられるアノード構造と、他方の主面に選択的に設けられる第1導電型カソード領域と、該カソード領域表面に導電接触するカソード電極と、前記カソード領域を取り巻く外周に設けられる耐圧構造領域と、一端が前記一方の主面で前記アノード構造の最外周に接続し、他端が前記他方の主面に到達して前記耐圧構造領域の外周を取り巻く第2導電型分離領域と、
前記耐圧構造領域は基板表面に設けられる複数の第2導電型フィールドリミッティングリングと該フィールドリミッティングリング表面に導電接続する金属フィールドプレートとを含む電界緩和構造を有し、
前記電界緩和構造は前記第1導電型カソード領域を取り巻く外周にリング状であって、該カソード領域より低濃度の第1導電型緩衝領域を有し、
前記第1導電型緩衝領域が前記カソード領域の外周辺に間隔をおいて設けられていることを特徴とする半導体装置。 - 前記カソード電極が前記カソード領域内の外周部表面では絶縁膜を介して覆うと共に、カソード領域外の外周表面に前記絶縁膜を介して覆う状態で延長されていることを特徴とする請求項1記載の半導体装置。
- 前記アノード構造が、前記一方の主面に設けられる第2導電型アノード領域および該アノード領域表面にオーミック接触するアノード電極を備えることを特徴とする請求項1記載の半導体装置。
- 前記アノード構造が、前記第1導電型の半導体基板の一方の主面にショットキー接触するアノード電極を備えることを特徴とする請求項1記載の半導体装置。
- 前記複数の第2導電型フィールドリミッティングリングの基板表面における間隔が、前記分離領域から前記カソード領域に向かって、順に広くなるように配置されていることを特徴とする請求項1記載の半導体装置。
- 前記第1導電型緩衝領域が、浮遊電位に設定される電極に導電接続されていることを特徴とする請求項1記載の半導体装置。
- 前記第1導電型緩衝領域が複数形成されていることを特徴とする請求項1記載の半導体装置。
- 前記カソード領域内の表面層には、第2導電型カソード層が選択的に設けられていることを特徴とする請求項1に記載の半導体装置。
- 前記カソード領域の表面から前記半導体基板に達するトレンチを選択的に設け、
前記トレンチ内には前記カソード電極を備え、
前記トレンチ底部には前記半導体基板より不純物濃度が高い第1導電型高濃度層を備えていることを特徴とする請求項1に記載の半導体装置。 - 前記アノード構造は、前記一方の主面に選択的に第2導電型アノード層が設けられていることを特徴とする請求項1記載の半導体装置。
- 前記カソード電極の外周端は、前記カソード領域の外周端より0.3μm以上10μm以下外周側に離して設けることを特徴とする請求項2に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014148848A JP6496992B2 (ja) | 2014-07-22 | 2014-07-22 | 半導体装置 |
US14/792,788 US20160027866A1 (en) | 2014-07-22 | 2015-07-07 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014148848A JP6496992B2 (ja) | 2014-07-22 | 2014-07-22 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016025236A JP2016025236A (ja) | 2016-02-08 |
JP6496992B2 true JP6496992B2 (ja) | 2019-04-10 |
Family
ID=55167362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014148848A Expired - Fee Related JP6496992B2 (ja) | 2014-07-22 | 2014-07-22 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20160027866A1 (ja) |
JP (1) | JP6496992B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015212464B4 (de) * | 2015-07-03 | 2019-05-23 | Infineon Technologies Ag | Leistungshalbleiterrandstruktur und Verfahren zu deren Herstellung |
JP6217700B2 (ja) * | 2015-07-21 | 2017-10-25 | トヨタ自動車株式会社 | ダイオード |
CN106847891B (zh) * | 2017-02-23 | 2019-09-03 | 重庆邮电大学 | 一种通过mosfet控制结终端集成体二极管的rc-igbt器件 |
US10074685B1 (en) * | 2017-05-17 | 2018-09-11 | Prismatic Sensors Ab | X-ray sensor, x-ray detector system and x-ray imaging system |
US10193000B1 (en) * | 2017-07-31 | 2019-01-29 | Ixys, Llc | Fast recovery inverse diode |
US10424677B2 (en) * | 2017-08-31 | 2019-09-24 | Littelfuse, Inc. | Charge carrier extraction inverse diode |
US10319669B2 (en) | 2017-08-31 | 2019-06-11 | Ixys, Llc | Packaged fast inverse diode component for PFC applications |
DE102018102279A1 (de) * | 2018-02-01 | 2019-08-01 | Infineon Technologies Ag | Halbleiterbauelement mit randabschlussbereich |
WO2019159471A1 (ja) * | 2018-02-16 | 2019-08-22 | 富士電機株式会社 | 半導体装置 |
US20230170383A1 (en) * | 2021-11-30 | 2023-06-01 | Wolfspeed, Inc. | Edge termination for power semiconductor devices and related fabrication methods |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427717B2 (ja) * | 1971-11-30 | 1979-09-11 | ||
JP3632344B2 (ja) * | 1997-01-06 | 2005-03-23 | 日産自動車株式会社 | 半導体装置 |
JP3287269B2 (ja) * | 1997-06-02 | 2002-06-04 | 富士電機株式会社 | ダイオードとその製造方法 |
JPH1174492A (ja) * | 1998-07-13 | 1999-03-16 | Toshiba Corp | 半導体基板の製造方法 |
JP4655350B2 (ja) * | 2000-10-31 | 2011-03-23 | 富士電機システムズ株式会社 | 半導体装置 |
US8093652B2 (en) * | 2002-08-28 | 2012-01-10 | Ixys Corporation | Breakdown voltage for power devices |
JP2005340528A (ja) * | 2004-05-27 | 2005-12-08 | Fuji Electric Device Technology Co Ltd | 半導体装置およびその製造方法 |
JP5748188B2 (ja) * | 2009-09-29 | 2015-07-15 | 富士電機株式会社 | 半導体装置 |
EP2339613B1 (en) * | 2009-12-22 | 2015-08-19 | ABB Technology AG | Power semiconductor device and method for producing same |
DE102010063728B4 (de) * | 2009-12-28 | 2016-04-14 | Fuji Electric Co., Ltd. | Halbleitervorrichtung mit verbesserter Sperrspannungsfestigkeit |
JP6101440B2 (ja) * | 2012-06-28 | 2017-03-22 | 株式会社 日立パワーデバイス | ダイオードおよびそれを用いた電力変換装置 |
US10211325B2 (en) * | 2014-01-28 | 2019-02-19 | Infineon Technologies Ag | Semiconductor device including undulated profile of net doping in a drift zone |
-
2014
- 2014-07-22 JP JP2014148848A patent/JP6496992B2/ja not_active Expired - Fee Related
-
2015
- 2015-07-07 US US14/792,788 patent/US20160027866A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2016025236A (ja) | 2016-02-08 |
US20160027866A1 (en) | 2016-01-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6496992B2 (ja) | 半導体装置 | |
JP5787853B2 (ja) | 電力用半導体装置 | |
JP5754543B2 (ja) | 半導体装置 | |
JP6780777B2 (ja) | 半導体装置 | |
JP6505625B2 (ja) | 半導体装置 | |
US9666704B2 (en) | Semiconductor device | |
JP5922886B2 (ja) | ダイオードおよび半導体装置 | |
JP2016225345A (ja) | 逆導通igbt | |
JP2007214541A (ja) | 半導体装置 | |
JP2016082097A (ja) | 半導体装置 | |
JP2016092177A (ja) | 半導体装置 | |
US8476673B2 (en) | Diode | |
US9236460B2 (en) | Semiconductor device having a diffusion region | |
US20170077217A1 (en) | Semiconductor device | |
JP5867484B2 (ja) | 半導体装置の製造方法 | |
JP6673439B2 (ja) | 半導体装置 | |
JP2007324539A (ja) | トレンチ型絶縁ゲート半導体装置 | |
JP5365019B2 (ja) | 半導体装置 | |
KR101779230B1 (ko) | 전력 반도체 디바이스 | |
EP3154091A1 (en) | Reverse-conducting semiconductor device | |
JP6077309B2 (ja) | ダイオード及びダイオードを内蔵した半導体装置 | |
JP2012182391A (ja) | 半導体装置 | |
JP2019096732A (ja) | 半導体装置 | |
JP2010093080A (ja) | 半導体装置 | |
US9748230B2 (en) | Semiconductor apparatus having a trench Schottky barrier Schottky diode |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170614 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180322 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180327 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180522 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181204 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190124 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190212 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190225 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6496992 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |