JP6492994B2 - 光配向用偏光光照射装置 - Google Patents
光配向用偏光光照射装置 Download PDFInfo
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- JP6492994B2 JP6492994B2 JP2015119608A JP2015119608A JP6492994B2 JP 6492994 B2 JP6492994 B2 JP 6492994B2 JP 2015119608 A JP2015119608 A JP 2015119608A JP 2015119608 A JP2015119608 A JP 2015119608A JP 6492994 B2 JP6492994 B2 JP 6492994B2
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Images
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- Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015119608A JP6492994B2 (ja) | 2015-06-12 | 2015-06-12 | 光配向用偏光光照射装置 |
| KR1020160010805A KR20160146502A (ko) | 2015-06-12 | 2016-01-28 | 광 배향용 편광광 조사장치 |
| TW105108646A TW201643529A (zh) | 2015-06-12 | 2016-03-21 | 光配向用偏振光照射裝置 |
| CN201620216526.8U CN205507314U (zh) | 2015-06-12 | 2016-03-21 | 光取向用偏振光照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015119608A JP6492994B2 (ja) | 2015-06-12 | 2015-06-12 | 光配向用偏光光照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017003876A JP2017003876A (ja) | 2017-01-05 |
| JP6492994B2 true JP6492994B2 (ja) | 2019-04-03 |
Family
ID=56731902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015119608A Expired - Fee Related JP6492994B2 (ja) | 2015-06-12 | 2015-06-12 | 光配向用偏光光照射装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6492994B2 (zh) |
| KR (1) | KR20160146502A (zh) |
| CN (1) | CN205507314U (zh) |
| TW (1) | TW201643529A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107272267A (zh) * | 2017-08-10 | 2017-10-20 | 武汉华星光电技术有限公司 | 光配向补正设备及光配向补正调节方法 |
| JP2019101226A (ja) * | 2017-12-01 | 2019-06-24 | シャープ株式会社 | 偏光照射装置、及び、感光膜付き基板の製造方法 |
| CN108761926A (zh) * | 2018-05-09 | 2018-11-06 | 深圳市华星光电技术有限公司 | 配向微观检测设备及配向检测方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4451374B2 (ja) * | 2005-10-17 | 2010-04-14 | 住友重機械工業株式会社 | ステージ装置 |
| JP4887165B2 (ja) | 2007-02-02 | 2012-02-29 | 富士フイルム株式会社 | 描画装置及び方法 |
| NL1036742A1 (nl) * | 2008-04-18 | 2009-10-20 | Asml Netherlands Bv | Stage system calibration method, stage system and lithographic apparatus comprising such stage system. |
| NL2006981A (en) * | 2010-07-26 | 2012-01-30 | Asml Netherlands Bv | Position control system, lithographic apparatus, and method to control a position of a movable object. |
| JP2012145786A (ja) * | 2011-01-13 | 2012-08-02 | Hitachi High-Technologies Corp | 露光装置及び露光方法 |
| US9366908B2 (en) * | 2013-06-03 | 2016-06-14 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Optical alignment device and the method thereof |
| JP5862616B2 (ja) * | 2013-07-17 | 2016-02-16 | ウシオ電機株式会社 | 光配向用偏光光照射装置及び光配向用偏光光照射方法 |
-
2015
- 2015-06-12 JP JP2015119608A patent/JP6492994B2/ja not_active Expired - Fee Related
-
2016
- 2016-01-28 KR KR1020160010805A patent/KR20160146502A/ko not_active Application Discontinuation
- 2016-03-21 TW TW105108646A patent/TW201643529A/zh unknown
- 2016-03-21 CN CN201620216526.8U patent/CN205507314U/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN205507314U (zh) | 2016-08-24 |
| JP2017003876A (ja) | 2017-01-05 |
| KR20160146502A (ko) | 2016-12-21 |
| TW201643529A (zh) | 2016-12-16 |
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