JP6492949B2 - 回路装置、物理量検出装置、電子機器及び移動体 - Google Patents

回路装置、物理量検出装置、電子機器及び移動体 Download PDF

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Publication number
JP6492949B2
JP6492949B2 JP2015098792A JP2015098792A JP6492949B2 JP 6492949 B2 JP6492949 B2 JP 6492949B2 JP 2015098792 A JP2015098792 A JP 2015098792A JP 2015098792 A JP2015098792 A JP 2015098792A JP 6492949 B2 JP6492949 B2 JP 6492949B2
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signal
mode
detection circuit
circuit
input
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Japanese (ja)
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JP2016217713A (ja
JP2016217713A5 (enExample
Inventor
青山　孝志
孝志 青山
顕太郎 瀬尾
顕太郎 瀬尾
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2015098792A priority Critical patent/JP6492949B2/ja
Priority to US15/143,849 priority patent/US10055975B2/en
Priority to CN201610299003.9A priority patent/CN106153027B/zh
Publication of JP2016217713A publication Critical patent/JP2016217713A/ja
Publication of JP2016217713A5 publication Critical patent/JP2016217713A5/ja
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    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C15/00—Arrangements characterised by the use of multiplexing for the transmission of a plurality of signals over a common path
    • G08C15/06—Arrangements characterised by the use of multiplexing for the transmission of a plurality of signals over a common path successively, i.e. using time division
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C25/00—Arrangements for preventing or correcting errors; Monitoring arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C2200/00—Transmission systems for measured values, control or similar signals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
  • Computer Networks & Wireless Communication (AREA)
JP2015098792A 2015-05-14 2015-05-14 回路装置、物理量検出装置、電子機器及び移動体 Active JP6492949B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015098792A JP6492949B2 (ja) 2015-05-14 2015-05-14 回路装置、物理量検出装置、電子機器及び移動体
US15/143,849 US10055975B2 (en) 2015-05-14 2016-05-02 Circuit device, physical quantity detection device, electronic apparatus, and moving object
CN201610299003.9A CN106153027B (zh) 2015-05-14 2016-05-06 电路装置、物理量检测装置、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015098792A JP6492949B2 (ja) 2015-05-14 2015-05-14 回路装置、物理量検出装置、電子機器及び移動体

Publications (3)

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JP2016217713A JP2016217713A (ja) 2016-12-22
JP2016217713A5 JP2016217713A5 (enExample) 2018-06-21
JP6492949B2 true JP6492949B2 (ja) 2019-04-03

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US (1) US10055975B2 (enExample)
JP (1) JP6492949B2 (enExample)
CN (1) CN106153027B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6492739B2 (ja) 2015-02-20 2019-04-03 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
JP6586735B2 (ja) * 2015-02-20 2019-10-09 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
CN105987691B (zh) * 2015-03-16 2021-02-05 精工爱普生株式会社 电路装置、物理量检测装置、电子设备以及移动体
JP7009923B2 (ja) * 2017-10-31 2022-01-26 セイコーエプソン株式会社 物理量測定装置、電子機器及び移動体
JP7069968B2 (ja) * 2018-03-29 2022-05-18 セイコーエプソン株式会社 回路装置並びにそれを用いた物理量測定装置、発振器、電子機器及び移動体

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6912901B1 (en) * 1995-05-30 2005-07-05 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP5458462B2 (ja) * 2005-10-11 2014-04-02 パナソニック株式会社 振動型慣性力検知センサ
JP2007327943A (ja) * 2006-05-09 2007-12-20 Seiko Epson Corp 検出装置、ジャイロセンサ及び電子機器
JP4924370B2 (ja) * 2007-01-26 2012-04-25 パナソニック株式会社 Σδ型ａｄ変換器およびそれを用いた角速度センサ
JP5274130B2 (ja) * 2008-07-15 2013-08-28 キヤノン株式会社 像振れ補正装置及び光学機器、撮像装置並びに像振れ補正装置の制御方法
IT1394898B1 (it) * 2009-06-03 2012-07-20 St Microelectronics Rousset Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico
JP5368181B2 (ja) * 2009-06-12 2013-12-18 セイコーエプソン株式会社 物理量検出装置並びに物理量検出装置の制御方法、異常診断システム及び異常診断方法
EP2447671B1 (en) * 2009-06-26 2017-08-09 Rohm Co., Ltd. Angular velocity sensor, and synchronous detection circuit used therein
JP5552976B2 (ja) * 2010-09-07 2014-07-16 セイコーエプソン株式会社 角速度検出装置及び電子機器
JP5975601B2 (ja) * 2011-02-25 2016-08-23 セイコーエプソン株式会社 検出回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
JP5638419B2 (ja) * 2011-02-25 2014-12-10 セイコーエプソン株式会社 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
JP4924912B2 (ja) * 2011-08-24 2012-04-25 セイコーエプソン株式会社 角速度測定方法および角速度測定装置の診断回路
JP6194606B2 (ja) * 2013-03-22 2017-09-13 セイコーエプソン株式会社 検出装置、センサー、ジャイロセンサー、電子機器及び移動体
JP6331356B2 (ja) * 2013-11-25 2018-05-30 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP2014197010A (ja) 2014-05-29 2014-10-16 セイコーエプソン株式会社 角速度検出装置及び電子機器

Also Published As

Publication number Publication date
US20160335885A1 (en) 2016-11-17
CN106153027B (zh) 2021-04-20
JP2016217713A (ja) 2016-12-22
CN106153027A (zh) 2016-11-23
US10055975B2 (en) 2018-08-21

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