JP6485388B2 - 可変焦点ミラーおよび光走査装置 - Google Patents

可変焦点ミラーおよび光走査装置 Download PDF

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Publication number
JP6485388B2
JP6485388B2 JP2016037902A JP2016037902A JP6485388B2 JP 6485388 B2 JP6485388 B2 JP 6485388B2 JP 2016037902 A JP2016037902 A JP 2016037902A JP 2016037902 A JP2016037902 A JP 2016037902A JP 6485388 B2 JP6485388 B2 JP 6485388B2
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Japan
Prior art keywords
piezoelectric element
recess
base
variable focus
focus mirror
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Application number
JP2016037902A
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English (en)
Japanese (ja)
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JP2017156453A5 (enExample
JP2017156453A (ja
Inventor
浩市 大山
浩市 大山
勝間田　卓
卓 勝間田
榎本　哲也
哲也 榎本
丸山　ユミ
ユミ 丸山
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Denso Corp
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Denso Corp
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Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2016037902A priority Critical patent/JP6485388B2/ja
Priority to PCT/JP2017/000804 priority patent/WO2017149946A1/ja
Priority to US16/080,038 priority patent/US20190064509A1/en
Publication of JP2017156453A publication Critical patent/JP2017156453A/ja
Publication of JP2017156453A5 publication Critical patent/JP2017156453A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2016037902A 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置 Active JP6485388B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016037902A JP6485388B2 (ja) 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置
PCT/JP2017/000804 WO2017149946A1 (ja) 2016-02-29 2017-01-12 可変焦点ミラーおよび光走査装置
US16/080,038 US20190064509A1 (en) 2016-02-29 2017-01-12 Variable focus mirror and optical scanning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016037902A JP6485388B2 (ja) 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置

Publications (3)

Publication Number Publication Date
JP2017156453A JP2017156453A (ja) 2017-09-07
JP2017156453A5 JP2017156453A5 (enExample) 2018-04-12
JP6485388B2 true JP6485388B2 (ja) 2019-03-20

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Family Applications (1)

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JP2016037902A Active JP6485388B2 (ja) 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置

Country Status (3)

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US (1) US20190064509A1 (enExample)
JP (1) JP6485388B2 (enExample)
WO (1) WO2017149946A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202000023110A1 (it) * 2020-09-30 2022-03-30 St Microelectronics Srl Dispositivo microelettromeccanico a specchio con compensazione di errori di planarita'
GB202101833D0 (en) * 2021-02-10 2021-03-24 Sintef Tto As Actuating device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7369723B1 (en) * 2001-11-09 2008-05-06 The Charles Stark Draper Laboratory, Inc. High speed piezoelectric optical system with tunable focal length
JP2004347753A (ja) * 2003-05-21 2004-12-09 Matsushita Electric Ind Co Ltd 形状可変ミラー素子及び形状可変ミラー素子の製造方法並びに形状可変ミラーユニット並びに光ピックアップ
FR2950154B1 (fr) * 2009-09-15 2011-12-23 Commissariat Energie Atomique Dispositif optique a membrane deformable a actionnement piezoelectrique en forme de couronne continue
FR2950153B1 (fr) * 2009-09-15 2011-12-23 Commissariat Energie Atomique Dispositif optique a membrane deformable a actionnement piezoelectrique
EP2713196A1 (en) * 2012-09-27 2014-04-02 poLight AS Deformable lens having piezoelectric actuators arranged with an interdigitated electrode configuration
JP2014215534A (ja) * 2013-04-26 2014-11-17 株式会社デンソー 光走査装置
JP5916668B2 (ja) * 2013-07-17 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
JP2015210450A (ja) * 2014-04-28 2015-11-24 キヤノン電子株式会社 振動素子、光走査装置、画像形成装置、画像投影装置および光学パターン読み取り装置

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Publication number Publication date
US20190064509A1 (en) 2019-02-28
WO2017149946A1 (ja) 2017-09-08
JP2017156453A (ja) 2017-09-07

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