JP2017156453A5 - - Google Patents

Download PDF

Info

Publication number
JP2017156453A5
JP2017156453A5 JP2016037902A JP2016037902A JP2017156453A5 JP 2017156453 A5 JP2017156453 A5 JP 2017156453A5 JP 2016037902 A JP2016037902 A JP 2016037902A JP 2016037902 A JP2016037902 A JP 2016037902A JP 2017156453 A5 JP2017156453 A5 JP 2017156453A5
Authority
JP
Japan
Prior art keywords
piezoelectric element
recess
base
variable focus
focus mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016037902A
Other languages
English (en)
Japanese (ja)
Other versions
JP6485388B2 (ja
JP2017156453A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016037902A priority Critical patent/JP6485388B2/ja
Priority claimed from JP2016037902A external-priority patent/JP6485388B2/ja
Priority to US16/080,038 priority patent/US20190064509A1/en
Priority to PCT/JP2017/000804 priority patent/WO2017149946A1/ja
Publication of JP2017156453A publication Critical patent/JP2017156453A/ja
Publication of JP2017156453A5 publication Critical patent/JP2017156453A5/ja
Application granted granted Critical
Publication of JP6485388B2 publication Critical patent/JP6485388B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2016037902A 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置 Active JP6485388B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016037902A JP6485388B2 (ja) 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置
US16/080,038 US20190064509A1 (en) 2016-02-29 2017-01-12 Variable focus mirror and optical scanning device
PCT/JP2017/000804 WO2017149946A1 (ja) 2016-02-29 2017-01-12 可変焦点ミラーおよび光走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016037902A JP6485388B2 (ja) 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置

Publications (3)

Publication Number Publication Date
JP2017156453A JP2017156453A (ja) 2017-09-07
JP2017156453A5 true JP2017156453A5 (enExample) 2018-04-12
JP6485388B2 JP6485388B2 (ja) 2019-03-20

Family

ID=59742704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016037902A Active JP6485388B2 (ja) 2016-02-29 2016-02-29 可変焦点ミラーおよび光走査装置

Country Status (3)

Country Link
US (1) US20190064509A1 (enExample)
JP (1) JP6485388B2 (enExample)
WO (1) WO2017149946A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202000023110A1 (it) 2020-09-30 2022-03-30 St Microelectronics Srl Dispositivo microelettromeccanico a specchio con compensazione di errori di planarita'
GB202101833D0 (en) * 2021-02-10 2021-03-24 Sintef Tto As Actuating device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7369723B1 (en) * 2001-11-09 2008-05-06 The Charles Stark Draper Laboratory, Inc. High speed piezoelectric optical system with tunable focal length
JP2004347753A (ja) * 2003-05-21 2004-12-09 Matsushita Electric Ind Co Ltd 形状可変ミラー素子及び形状可変ミラー素子の製造方法並びに形状可変ミラーユニット並びに光ピックアップ
FR2950153B1 (fr) * 2009-09-15 2011-12-23 Commissariat Energie Atomique Dispositif optique a membrane deformable a actionnement piezoelectrique
FR2950154B1 (fr) * 2009-09-15 2011-12-23 Commissariat Energie Atomique Dispositif optique a membrane deformable a actionnement piezoelectrique en forme de couronne continue
EP2713196A1 (en) * 2012-09-27 2014-04-02 poLight AS Deformable lens having piezoelectric actuators arranged with an interdigitated electrode configuration
JP2014215534A (ja) * 2013-04-26 2014-11-17 株式会社デンソー 光走査装置
JP5916668B2 (ja) * 2013-07-17 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
JP2015210450A (ja) * 2014-04-28 2015-11-24 キヤノン電子株式会社 振動素子、光走査装置、画像形成装置、画像投影装置および光学パターン読み取り装置

Similar Documents

Publication Publication Date Title
JP2013519907A5 (enExample)
TW201715270A (zh) 光學成像系統
US20160011393A1 (en) Actuator unit and lens module
JP2015061193A5 (enExample)
JP2016508626A (ja) 一体化されたフレクシャを有するモノリシック光学構成要素
JP2016071039A5 (enExample)
TW202314313A (zh) 成像透鏡系統
ATE509292T1 (de) Lateral verstellbare optische fassung mit kniehebelmanipulatoreinheiten
JP2021039387A5 (ja) トーリック眼内用レンズ
JP2017156453A5 (enExample)
JP2005121799A5 (enExample)
JP2009077595A5 (enExample)
CN110662994A (zh) 光学镜头、光学组件和光学模组以及制造方法
JP6851775B2 (ja) 回折光学素子およびそれを有する光学系、撮像装置
JPWO2015145943A1 (ja) 光走査デバイス
JP2018097189A5 (ja) 光学系および撮像装置
JP6485388B2 (ja) 可変焦点ミラーおよび光走査装置
JP2019069752A5 (enExample)
US10843919B2 (en) Microelectromechanical system apparatus with heater
JP6324343B2 (ja) 撮像装置及びカメラ
JP2008191231A5 (enExample)
JP2007178825A5 (enExample)
JP2012523020A5 (enExample)
CN110854052A (zh) 一种平行度校准方法、装置及计算机存储介质
JP2020123881A5 (enExample)