JP2020123881A5 - - Google Patents

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Publication number
JP2020123881A5
JP2020123881A5 JP2019015322A JP2019015322A JP2020123881A5 JP 2020123881 A5 JP2020123881 A5 JP 2020123881A5 JP 2019015322 A JP2019015322 A JP 2019015322A JP 2019015322 A JP2019015322 A JP 2019015322A JP 2020123881 A5 JP2020123881 A5 JP 2020123881A5
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JP
Japan
Prior art keywords
stress
preferable
frequency fluctuation
remarkably
exhibited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019015322A
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English (en)
Japanese (ja)
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JP2020123881A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2019015322A priority Critical patent/JP2020123881A/ja
Priority claimed from JP2019015322A external-priority patent/JP2020123881A/ja
Priority to CN202010076811.5A priority patent/CN111510103A/zh
Priority to US16/776,109 priority patent/US11569795B2/en
Publication of JP2020123881A publication Critical patent/JP2020123881A/ja
Publication of JP2020123881A5 publication Critical patent/JP2020123881A5/ja
Pending legal-status Critical Current

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JP2019015322A 2019-01-31 2019-01-31 振動デバイス、振動モジュール、電子機器および移動体 Pending JP2020123881A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019015322A JP2020123881A (ja) 2019-01-31 2019-01-31 振動デバイス、振動モジュール、電子機器および移動体
CN202010076811.5A CN111510103A (zh) 2019-01-31 2020-01-23 振动器件、振动模块、电子设备以及移动体
US16/776,109 US11569795B2 (en) 2019-01-31 2020-01-29 Resonator device, resonator module, electronic apparatus, and vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019015322A JP2020123881A (ja) 2019-01-31 2019-01-31 振動デバイス、振動モジュール、電子機器および移動体

Publications (2)

Publication Number Publication Date
JP2020123881A JP2020123881A (ja) 2020-08-13
JP2020123881A5 true JP2020123881A5 (enExample) 2021-11-25

Family

ID=71837950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019015322A Pending JP2020123881A (ja) 2019-01-31 2019-01-31 振動デバイス、振動モジュール、電子機器および移動体

Country Status (3)

Country Link
US (1) US11569795B2 (enExample)
JP (1) JP2020123881A (enExample)
CN (1) CN111510103A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022046920A (ja) * 2020-09-11 2022-03-24 セイコーエプソン株式会社 電子デバイス
US20240387436A1 (en) * 2021-10-05 2024-11-21 Mitsubishi Electric Corporation Hermetic package device, and device module

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1188104A (ja) * 1997-09-10 1999-03-30 Meidensha Corp Ａｔカット水晶振動子
JP2000332571A (ja) * 1999-05-24 2000-11-30 Toyo Commun Equip Co Ltd 圧電デバイス
JP5218543B2 (ja) * 2000-12-12 2013-06-26 セイコーエプソン株式会社 圧電デバイス
EP1303042B1 (fr) * 2001-10-09 2018-12-05 Eta SA Fabriques d'Ebauches Résonateur piézoélectrique et ensemble comprenant un tel résonateur enfermé dans un boîtier
JP2009016894A (ja) * 2007-06-29 2009-01-22 Citizen Finetech Miyota Co Ltd 圧電デバイス及びその製造方法
JP5085682B2 (ja) * 2010-04-26 2012-11-28 日本電波工業株式会社 圧電デバイス
JP5708079B2 (ja) 2011-03-16 2015-04-30 株式会社大真空 水晶振動子
JP2013055400A (ja) * 2011-09-01 2013-03-21 Seiko Instruments Inc 圧電振動デバイス及び発振器
US9620702B2 (en) * 2011-09-30 2017-04-11 Daishinku Corporation Electronic component package, electronic component package sealing member and method for producing the electronic component package sealing member
JP2013157692A (ja) * 2012-01-27 2013-08-15 Seiko Instruments Inc 振動デバイス及び発振器
JP6543931B2 (ja) * 2015-01-06 2019-07-17 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体
JP6052651B1 (ja) * 2015-03-03 2016-12-27 株式会社村田製作所 水晶振動子
WO2017022504A1 (ja) * 2015-07-31 2017-02-09 株式会社村田製作所 電子部品及びその製造方法
JP6327327B2 (ja) * 2016-12-09 2018-05-23 セイコーエプソン株式会社 振動子、電子機器、移動体および発振器
JP7230541B2 (ja) * 2019-01-31 2023-03-01 セイコーエプソン株式会社 振動デバイスおよび振動モジュール

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