JP6485118B2 - 圧電駆動装置及びロボット - Google Patents

圧電駆動装置及びロボット Download PDF

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Publication number
JP6485118B2
JP6485118B2 JP2015041957A JP2015041957A JP6485118B2 JP 6485118 B2 JP6485118 B2 JP 6485118B2 JP 2015041957 A JP2015041957 A JP 2015041957A JP 2015041957 A JP2015041957 A JP 2015041957A JP 6485118 B2 JP6485118 B2 JP 6485118B2
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Japan
Prior art keywords
piezoelectric
piezoelectric drive
drive device
driving device
piezoelectric driving
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Application number
JP2015041957A
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English (en)
Japanese (ja)
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JP2016163474A (ja
JP2016163474A5 (https=
Inventor
宮澤　修
修 宮澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2015041957A priority Critical patent/JP6485118B2/ja
Priority to EP16158225.9A priority patent/EP3065287B1/en
Priority to US15/058,442 priority patent/US10097111B2/en
Priority to CN201610118437.4A priority patent/CN105939131B/zh
Publication of JP2016163474A publication Critical patent/JP2016163474A/ja
Publication of JP2016163474A5 publication Critical patent/JP2016163474A5/ja
Application granted granted Critical
Publication of JP6485118B2 publication Critical patent/JP6485118B2/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/123—Linear actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • B25J15/0293—Gripping heads and other end effectors servo-actuated comprising parallel grippers having fingers directly connected to actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Manipulator (AREA)
JP2015041957A 2015-03-04 2015-03-04 圧電駆動装置及びロボット Active JP6485118B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015041957A JP6485118B2 (ja) 2015-03-04 2015-03-04 圧電駆動装置及びロボット
EP16158225.9A EP3065287B1 (en) 2015-03-04 2016-03-02 Piezoelectric drive device and robot
US15/058,442 US10097111B2 (en) 2015-03-04 2016-03-02 Piezoelectric drive device and robot
CN201610118437.4A CN105939131B (zh) 2015-03-04 2016-03-02 压电驱动装置以及机器人

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015041957A JP6485118B2 (ja) 2015-03-04 2015-03-04 圧電駆動装置及びロボット

Publications (3)

Publication Number Publication Date
JP2016163474A JP2016163474A (ja) 2016-09-05
JP2016163474A5 JP2016163474A5 (https=) 2018-03-22
JP6485118B2 true JP6485118B2 (ja) 2019-03-20

Family

ID=55453080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015041957A Active JP6485118B2 (ja) 2015-03-04 2015-03-04 圧電駆動装置及びロボット

Country Status (4)

Country Link
US (1) US10097111B2 (https=)
EP (1) EP3065287B1 (https=)
JP (1) JP6485118B2 (https=)
CN (1) CN105939131B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6766328B2 (ja) * 2015-07-30 2020-10-14 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法
JP2017184297A (ja) * 2016-03-28 2017-10-05 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ
JP2019027920A (ja) * 2017-07-31 2019-02-21 セイコーエプソン株式会社 力検出装置およびロボット

Family Cites Families (31)

* Cited by examiner, † Cited by third party
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JPH01190272A (ja) 1988-01-26 1989-07-31 Nippon Telegr & Teleph Corp <Ntt> 固体アクチュエータ変位拡大機構
EP0633616B1 (en) * 1993-07-09 2002-01-30 Nanomotion Ltd Ceramic motor
JPH1147690A (ja) 1997-08-05 1999-02-23 Nikon Corp 振動アクチュエータの駆動装置
JP4073060B2 (ja) 1997-11-04 2008-04-09 株式会社ナノコントロール 圧電素子の急速変形に伴う衝撃力を利用した小型精密位置決め装置
US6570298B2 (en) 2000-05-09 2003-05-27 Tokkyokiki Co., Ltd. Vibration control device and driving method thereof
JP2002035696A (ja) 2000-07-25 2002-02-05 Tokkyokiki Corp 振動制御装置およびその駆動方法
JP3338422B2 (ja) * 2000-07-06 2002-10-28 独立行政法人産業技術総合研究所 超微粒子材料吹き付け成膜方法
GB2381376B (en) * 2001-10-25 2005-04-20 1 Ltd Micromotor
JP2004260990A (ja) 2003-02-06 2004-09-16 Seiko Epson Corp 駆動装置および稼動装置
JP4192621B2 (ja) 2003-02-17 2008-12-10 セイコーエプソン株式会社 軸流ファンの駆動装置および軸流ファン
JP2004254353A (ja) 2003-02-17 2004-09-09 Seiko Epson Corp 駆動装置および稼動装置
JP2004320979A (ja) 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP2005176412A (ja) * 2003-12-08 2005-06-30 Hitachi Ltd アクチュエータ膜材料、アクチュエータ膜およびこれを用いたアクチュエータ
DE602005014718D1 (de) * 2004-09-27 2009-07-16 Brother Ind Ltd Aktor und Transportvorrichtung, bewegliches Gerät sowie Vorrichtung ausgestattet mit dem Aktor
JP4667838B2 (ja) 2004-11-26 2011-04-13 オリンパスイメージング株式会社 超音波モータ
US20060113867A1 (en) 2004-11-26 2006-06-01 Olympus Imaging Corp. Vibration wave motor
US20080297340A1 (en) * 2007-05-29 2008-12-04 Popa Dan O Compliant Wireless Sensitive Elements and Devices
KR101479232B1 (ko) * 2008-05-13 2015-01-06 삼성전자 주식회사 로봇과 로봇 핸드, 로봇 핸드의 제어 방법
JP5633508B2 (ja) 2009-03-31 2014-12-03 株式会社ニコン 圧電アクチュエータ及びレンズ鏡筒
JP2010259193A (ja) 2009-04-23 2010-11-11 Nikon Corp 駆動装置及びロボット装置
JP5930595B2 (ja) 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法
EP2572838A1 (en) * 2010-08-31 2013-03-27 Kabushiki Kaisha Yaskawa Denki Robot, robot system, robot control device, and state determining method
DE102011087801B4 (de) 2011-02-22 2013-04-25 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
JP2012235622A (ja) * 2011-05-02 2012-11-29 Seiko Epson Corp モーター、ロボットハンドおよびロボット
CN104271322B (zh) * 2012-03-08 2016-09-21 品质制造有限公司 触敏机器人抓手
JP2014075955A (ja) 2012-10-05 2014-04-24 Nikon Corp 駆動装置、ロボット装置及び露光装置
JP2014209819A (ja) 2013-04-16 2014-11-06 キヤノン株式会社 駆動装置
JP6232752B2 (ja) 2013-05-31 2017-11-22 セイコーエプソン株式会社 駆動装置、電子部品搬送装置、および電子部品検査装置
CN203365777U (zh) * 2013-06-25 2013-12-25 中国科学院西安光学精密机械研究所 应用于光学系统的压电陶瓷直线电机调焦装置
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CN104362897A (zh) * 2014-12-09 2015-02-18 苏州科技学院 一种单电信号驱动旋转超声电机

Also Published As

Publication number Publication date
CN105939131B (zh) 2019-04-12
EP3065287B1 (en) 2018-08-15
JP2016163474A (ja) 2016-09-05
EP3065287A1 (en) 2016-09-07
US10097111B2 (en) 2018-10-09
US20160261211A1 (en) 2016-09-08
CN105939131A (zh) 2016-09-14

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