JP6475231B2 - 粒子特性を光学測定するための装置および方法 - Google Patents

粒子特性を光学測定するための装置および方法 Download PDF

Info

Publication number
JP6475231B2
JP6475231B2 JP2016516953A JP2016516953A JP6475231B2 JP 6475231 B2 JP6475231 B2 JP 6475231B2 JP 2016516953 A JP2016516953 A JP 2016516953A JP 2016516953 A JP2016516953 A JP 2016516953A JP 6475231 B2 JP6475231 B2 JP 6475231B2
Authority
JP
Japan
Prior art keywords
light
color
polarization
particle
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016516953A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016535288A5 (enExample
JP2016535288A (ja
Inventor
イー ウェイ
イー ウェイ
Original Assignee
オリンパス・ソフト・イメージング・ソリューションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オリンパス・ソフト・イメージング・ソリューションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング filed Critical オリンパス・ソフト・イメージング・ソリューションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング
Publication of JP2016535288A publication Critical patent/JP2016535288A/ja
Publication of JP2016535288A5 publication Critical patent/JP2016535288A5/ja
Application granted granted Critical
Publication of JP6475231B2 publication Critical patent/JP6475231B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N15/0227—Investigating particle size or size distribution by optical means using imaging; using holography
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0092—Polarisation microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/288—Filters employing polarising elements, e.g. Lyot or Solc filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1429—Signal processing
    • G01N15/1433—Signal processing using image recognition
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/217—Measuring depolarisation or comparing polarised and depolarised parts of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2016516953A 2013-09-24 2014-09-10 粒子特性を光学測定するための装置および方法 Active JP6475231B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013219181.2 2013-09-24
DE102013219181.2A DE102013219181B4 (de) 2013-09-24 2013-09-24 Vorrichtung und Verfahren zur optischen Bestimmung von Partikeleigenschaften
PCT/EP2014/002440 WO2015043716A1 (de) 2013-09-24 2014-09-10 Vorrichtung und verfahren zur optischen bestimmung von partikeleigenschaften

Publications (3)

Publication Number Publication Date
JP2016535288A JP2016535288A (ja) 2016-11-10
JP2016535288A5 JP2016535288A5 (enExample) 2017-05-25
JP6475231B2 true JP6475231B2 (ja) 2019-02-27

Family

ID=51518738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016516953A Active JP6475231B2 (ja) 2013-09-24 2014-09-10 粒子特性を光学測定するための装置および方法

Country Status (6)

Country Link
US (1) US9612186B2 (enExample)
JP (1) JP6475231B2 (enExample)
CN (1) CN105579830B (enExample)
DE (1) DE102013219181B4 (enExample)
GB (1) GB2532675B (enExample)
WO (1) WO2015043716A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3105745A1 (en) * 2014-02-14 2016-12-21 Rotas Italia S.r.l. Product authentication method
KR101766328B1 (ko) * 2015-05-28 2017-08-08 광주과학기술원 현미경
KR101638016B1 (ko) * 2015-05-28 2016-07-08 광주과학기술원 내시경
JP6817083B2 (ja) * 2017-01-19 2021-01-20 オリンパス株式会社 正立顕微鏡
CN110312922B (zh) * 2017-02-16 2023-11-03 皇家飞利浦有限公司 粒子表征装置和方法
DE102017109252A1 (de) * 2017-04-28 2018-10-31 Leica Microsystems Cms Gmbh Programmierbare Mikroskopsteuerungseinheit mit frei verwendbaren Ein- und Ausgängen, Mikroskopsystem mit einer Mikroskopsteuerungseinheit und Verfahren zum Betrieb einer Mikroskopsteuerungseinheit
NL2019089B1 (en) * 2017-06-17 2018-12-24 Acad Medisch Ct Polarization microscope
CN109387460A (zh) * 2017-08-14 2019-02-26 阅美测量系统(上海)有限公司 一种污染颗粒观察及测试装置及分析方法
US11506590B2 (en) 2018-09-28 2022-11-22 Siemens Schweiz Ag Scattered light smoke detector having a two-color LED, a photosensor, and a wavelength-selective polarizer connected upstream of the photosensor or connected downstream of the two-color LED, and suitable use of such a polarizer
DE102019205654A1 (de) * 2019-04-18 2020-10-22 Krones Ag Durchlichtinspektionsvorrichtung und -verfahren zur Inspektion von Behältern
JP7525119B2 (ja) * 2019-08-28 2024-07-30 兵庫県公立大学法人 試料測定装置および試料測定方法
DE102020102419A1 (de) * 2020-01-31 2021-08-05 Carl Zeiss Microscopy Gmbh Partikelanalyse mit Lichtmikroskop und Mehrpixelpolarisationsfilter
TWI808554B (zh) * 2020-12-04 2023-07-11 亞光股份有限公司 使用陰極發光測量判別半導體材料中的位錯類型和密度的裝置與方法
US11782001B2 (en) 2020-12-04 2023-10-10 Attolight AG Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements
CN115106191A (zh) * 2022-06-30 2022-09-27 扬州纳力新材料科技有限公司 柔性膜材表面金属颗粒的收集设备、收集方法和检测方法
EP4303562A1 (en) * 2022-07-08 2024-01-10 Socar Turkey Arastirma Gelistirme Ve Inovasyon A.S. The method and system of performing shape and size analysis of all solid particles with image processing
CN120525863B (zh) * 2025-07-11 2025-10-17 深圳市天鼎自动化科技有限公司 相机镜头缺陷检测方法、装置、存储介质及产品

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3341302C2 (de) * 1983-11-15 1985-09-12 C. Reichert Optische Werke Ag, Wien Optische Anordnung für Mikroskope
GB8330813D0 (en) 1983-11-18 1983-12-29 Smiths Industries Plc Fibre-optic cable assemblies
US4678291A (en) * 1984-12-14 1987-07-07 C. Reichert Optische Werke Ag Optical arrangement for microscopes
FI96058C (fi) 1992-12-07 1996-04-25 Valtion Teknillinen Menetelmä ja laitteisto väliaineessa olevien hiukkasten analysoimiseksi ja väliaineeseen kosketuksissa olevien mekaanisten kontaktien kulumistilanteen jatkuvatoimiseksi määrittämiseksi
JPH09297004A (ja) * 1996-05-01 1997-11-18 Olympus Optical Co Ltd 顕微鏡装置
DE10052384B4 (de) 2000-10-20 2011-02-10 Schwartz, Margit Vorrichtung und Verfahren zur Bestimmung von Partikeleigenschaften und/oder Partikelkonzentrationen in einem fluiden Medium
IL145683A0 (en) * 2001-09-26 2002-06-30 Enoron Technologies Ltd Apparatus and method for measuring optically active materials
DE10241472B4 (de) * 2002-09-04 2019-04-11 Carl Zeiss Microscopy Gmbh Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität
DE10247247A1 (de) * 2002-10-10 2004-04-22 Leica Microsystems Heidelberg Gmbh Optische Anordnung und Mikroskop
WO2006091221A2 (en) * 2004-06-30 2006-08-31 Chemimage Corporation Spectroscopic methods for component particle analysis
DE102004034961A1 (de) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Lichtrastermikroskop mit linienförmiger Abtastung und Verwendung
DE102005062439B3 (de) 2005-12-23 2007-05-10 JOMESA Meßsysteme GmbH Verfahren für die Partikelanalyse und Partikelanalysesystem
EP2157472B1 (en) * 2007-05-31 2019-10-30 Nikon Corporation Tunable filter, light source device and spectrum distribution measuring device
DE202007014466U1 (de) 2007-10-16 2008-01-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Klassifizierung transparenter Bestandteile in einem Materialstrom
DE102009014080B4 (de) 2009-03-23 2011-12-15 Baumer Innotec Ag Vorrichtung zum Bestimmen von Partikelgrössen
JP5428509B2 (ja) * 2009-05-11 2014-02-26 ソニー株式会社 2次元固体撮像装置、及び、2次元固体撮像装置における偏光光データ処理方法
WO2011125927A1 (ja) * 2010-04-01 2011-10-13 新日本製鐵株式会社 粒子測定装置および粒子測定方法

Also Published As

Publication number Publication date
DE102013219181B4 (de) 2018-05-09
CN105579830B (zh) 2018-10-12
GB2532675A (en) 2016-05-25
DE102013219181A1 (de) 2015-03-26
GB2532675B (en) 2018-08-29
CN105579830A (zh) 2016-05-11
US20160202165A1 (en) 2016-07-14
JP2016535288A (ja) 2016-11-10
WO2015043716A1 (de) 2015-04-02
GB201603617D0 (en) 2016-04-13
US9612186B2 (en) 2017-04-04

Similar Documents

Publication Publication Date Title
JP2016535288A (ja) 粒子特性を光学測定するための装置および方法
US11131840B2 (en) Microscope system and method for microscopic imaging
US10591417B2 (en) Systems and methods for 4-D hyperspectral imaging
EP3465157B1 (en) Systems and methods for 4-d hyperspectral imaging
JP2016535288A5 (enExample)
EP3514524B1 (en) Image inspection device and illumination device
JP2016507752A (ja) 表面色を備えた表面トポグラフィ干渉計
US9261352B2 (en) Chromatic converter for altimetry
JP2006208380A (ja) 焦点ずれ検出のためのマルチスペクトル技術
CN209746285U (zh) 棱镜分光相机装置
KR102135999B1 (ko) 조명 패터닝을 이용하는 압축 감지
JP7413234B2 (ja) 光学撮像装置、光学検査装置、および、光学検査方法
WO2014125804A1 (ja) マルチスペクトル撮像装置およびマルチスペクトル撮像方法
KR20240167029A (ko) 세포 평가 방법 및 세포 평가 장치
US12188876B2 (en) Optical inspection method, non-transitory storage medium storing optical inspection program, processing device, and optical inspection apparatus
US5914777A (en) Apparatus for and method of measuring a distribution of luminous intensity of light source
JP7370326B2 (ja) 大視野3d分光顕微鏡法
JP5887120B2 (ja) 接触部検出装置および接触部検出方法
JP2017156310A (ja) 蛍光測定装置
JP2003148927A (ja) 三次元形状検査装置
Liu et al. PolSpec: polarisation-based detection for spectral classification of optical signals
Liu et al. PolSpec: Polarisation‐Based Detection for Versatile, Cost‐Effective Rapid Hyperspectral Imaging
JP7463313B2 (ja) 光学検査方法、光学検査装置、および光学検査プログラム
KR102729431B1 (ko) 물체의 각도 및 분광 방출의 동시 측정이 가능한 광학 장치
CN116802481A (zh) 光学装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170405

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170405

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180410

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180706

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190108

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190131

R150 Certificate of patent or registration of utility model

Ref document number: 6475231

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250