JP6475231B2 - 粒子特性を光学測定するための装置および方法 - Google Patents
粒子特性を光学測定するための装置および方法 Download PDFInfo
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- JP6475231B2 JP6475231B2 JP2016516953A JP2016516953A JP6475231B2 JP 6475231 B2 JP6475231 B2 JP 6475231B2 JP 2016516953 A JP2016516953 A JP 2016516953A JP 2016516953 A JP2016516953 A JP 2016516953A JP 6475231 B2 JP6475231 B2 JP 6475231B2
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- 239000002245 particle Substances 0.000 title claims description 85
- 230000003287 optical effect Effects 0.000 title claims description 23
- 238000000034 method Methods 0.000 title claims description 19
- 238000005259 measurement Methods 0.000 title claims description 9
- 230000010287 polarization Effects 0.000 claims description 96
- 230000003595 spectral effect Effects 0.000 claims description 17
- 238000001228 spectrum Methods 0.000 claims description 12
- 238000003384 imaging method Methods 0.000 claims description 11
- 239000011159 matrix material Substances 0.000 claims description 8
- 238000002310 reflectometry Methods 0.000 claims description 8
- 238000000926 separation method Methods 0.000 claims description 6
- 239000003086 colorant Substances 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 238000004590 computer program Methods 0.000 claims description 3
- 238000011156 evaluation Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 239000012491 analyte Substances 0.000 claims 1
- 238000005286 illumination Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 239000011149 active material Substances 0.000 description 1
- 238000000339 bright-field microscopy Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000011192 particle characterization Methods 0.000 description 1
- 239000011860 particles by size Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N15/0227—Investigating particle size or size distribution by optical means using imaging; using holography
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0092—Polarisation microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1434—Optical arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/082—Condensers for incident illumination only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/288—Filters employing polarising elements, e.g. Lyot or Solc filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1429—Signal processing
- G01N15/1433—Signal processing using image recognition
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N2021/217—Measuring depolarisation or comparing polarised and depolarised parts of light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013219181.2A DE102013219181B4 (de) | 2013-09-24 | 2013-09-24 | Vorrichtung und Verfahren zur optischen Bestimmung von Partikeleigenschaften |
| DE102013219181.2 | 2013-09-24 | ||
| PCT/EP2014/002440 WO2015043716A1 (de) | 2013-09-24 | 2014-09-10 | Vorrichtung und verfahren zur optischen bestimmung von partikeleigenschaften |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016535288A JP2016535288A (ja) | 2016-11-10 |
| JP2016535288A5 JP2016535288A5 (enExample) | 2017-05-25 |
| JP6475231B2 true JP6475231B2 (ja) | 2019-02-27 |
Family
ID=51518738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016516953A Active JP6475231B2 (ja) | 2013-09-24 | 2014-09-10 | 粒子特性を光学測定するための装置および方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9612186B2 (enExample) |
| JP (1) | JP6475231B2 (enExample) |
| CN (1) | CN105579830B (enExample) |
| DE (1) | DE102013219181B4 (enExample) |
| GB (1) | GB2532675B (enExample) |
| WO (1) | WO2015043716A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170186262A1 (en) * | 2014-02-14 | 2017-06-29 | Rotas Italia SRL | Product authentication method |
| KR101766328B1 (ko) * | 2015-05-28 | 2017-08-08 | 광주과학기술원 | 현미경 |
| KR101638016B1 (ko) * | 2015-05-28 | 2016-07-08 | 광주과학기술원 | 내시경 |
| JP6817083B2 (ja) * | 2017-01-19 | 2021-01-20 | オリンパス株式会社 | 正立顕微鏡 |
| WO2018149889A1 (en) * | 2017-02-16 | 2018-08-23 | Koninklijke Philips N.V. | Particle characterization apparatus and method |
| DE102017109252A1 (de) * | 2017-04-28 | 2018-10-31 | Leica Microsystems Cms Gmbh | Programmierbare Mikroskopsteuerungseinheit mit frei verwendbaren Ein- und Ausgängen, Mikroskopsystem mit einer Mikroskopsteuerungseinheit und Verfahren zum Betrieb einer Mikroskopsteuerungseinheit |
| NL2019089B1 (en) * | 2017-06-17 | 2018-12-24 | Acad Medisch Ct | Polarization microscope |
| CN109387460A (zh) * | 2017-08-14 | 2019-02-26 | 阅美测量系统(上海)有限公司 | 一种污染颗粒观察及测试装置及分析方法 |
| CN113508288B (zh) * | 2018-09-28 | 2025-04-18 | 西门子瑞士有限公司 | 具有波长选择偏振器的散射光烟雾探测器以及这种偏振器的合适用途 |
| DE102019205654A1 (de) * | 2019-04-18 | 2020-10-22 | Krones Ag | Durchlichtinspektionsvorrichtung und -verfahren zur Inspektion von Behältern |
| WO2021039900A1 (ja) * | 2019-08-28 | 2021-03-04 | 公立大学法人兵庫県立大学 | 試料測定装置および試料測定方法 |
| DE102020102419A1 (de) * | 2020-01-31 | 2021-08-05 | Carl Zeiss Microscopy Gmbh | Partikelanalyse mit Lichtmikroskop und Mehrpixelpolarisationsfilter |
| US11782001B2 (en) | 2020-12-04 | 2023-10-10 | Attolight AG | Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements |
| TWI808554B (zh) * | 2020-12-04 | 2023-07-11 | 亞光股份有限公司 | 使用陰極發光測量判別半導體材料中的位錯類型和密度的裝置與方法 |
| CN115106191A (zh) * | 2022-06-30 | 2022-09-27 | 扬州纳力新材料科技有限公司 | 柔性膜材表面金属颗粒的收集设备、收集方法和检测方法 |
| EP4303562A1 (en) * | 2022-07-08 | 2024-01-10 | Socar Turkey Arastirma Gelistirme Ve Inovasyon A.S. | The method and system of performing shape and size analysis of all solid particles with image processing |
| CN120525863B (zh) * | 2025-07-11 | 2025-10-17 | 深圳市天鼎自动化科技有限公司 | 相机镜头缺陷检测方法、装置、存储介质及产品 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3341302C2 (de) * | 1983-11-15 | 1985-09-12 | C. Reichert Optische Werke Ag, Wien | Optische Anordnung für Mikroskope |
| GB8330813D0 (en) | 1983-11-18 | 1983-12-29 | Smiths Industries Plc | Fibre-optic cable assemblies |
| US4678291A (en) * | 1984-12-14 | 1987-07-07 | C. Reichert Optische Werke Ag | Optical arrangement for microscopes |
| FI96058C (fi) | 1992-12-07 | 1996-04-25 | Valtion Teknillinen | Menetelmä ja laitteisto väliaineessa olevien hiukkasten analysoimiseksi ja väliaineeseen kosketuksissa olevien mekaanisten kontaktien kulumistilanteen jatkuvatoimiseksi määrittämiseksi |
| JPH09297004A (ja) * | 1996-05-01 | 1997-11-18 | Olympus Optical Co Ltd | 顕微鏡装置 |
| DE10052384B4 (de) | 2000-10-20 | 2011-02-10 | Schwartz, Margit | Vorrichtung und Verfahren zur Bestimmung von Partikeleigenschaften und/oder Partikelkonzentrationen in einem fluiden Medium |
| IL145683A0 (en) * | 2001-09-26 | 2002-06-30 | Enoron Technologies Ltd | Apparatus and method for measuring optically active materials |
| DE10241472B4 (de) | 2002-09-04 | 2019-04-11 | Carl Zeiss Microscopy Gmbh | Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität |
| DE10247247A1 (de) * | 2002-10-10 | 2004-04-22 | Leica Microsystems Heidelberg Gmbh | Optische Anordnung und Mikroskop |
| WO2006091221A2 (en) * | 2004-06-30 | 2006-08-31 | Chemimage Corporation | Spectroscopic methods for component particle analysis |
| DE102004034961A1 (de) | 2004-07-16 | 2006-02-02 | Carl Zeiss Jena Gmbh | Lichtrastermikroskop mit linienförmiger Abtastung und Verwendung |
| DE102005062439B3 (de) | 2005-12-23 | 2007-05-10 | JOMESA Meßsysteme GmbH | Verfahren für die Partikelanalyse und Partikelanalysesystem |
| JP5333215B2 (ja) * | 2007-05-31 | 2013-11-06 | 株式会社ニコン | チューナブルフィルタ、光源装置およびスペクトル分布測定装置 |
| DE202007014466U1 (de) | 2007-10-16 | 2008-01-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Klassifizierung transparenter Bestandteile in einem Materialstrom |
| DE102009014080B4 (de) | 2009-03-23 | 2011-12-15 | Baumer Innotec Ag | Vorrichtung zum Bestimmen von Partikelgrössen |
| JP5428509B2 (ja) * | 2009-05-11 | 2014-02-26 | ソニー株式会社 | 2次元固体撮像装置、及び、2次元固体撮像装置における偏光光データ処理方法 |
| BR112012024633B1 (pt) * | 2010-04-01 | 2020-03-17 | Nippon Steel Corporation | Dispositivo de medição de partícula e método de medição de partícula |
-
2013
- 2013-09-24 DE DE102013219181.2A patent/DE102013219181B4/de active Active
-
2014
- 2014-09-10 JP JP2016516953A patent/JP6475231B2/ja active Active
- 2014-09-10 CN CN201480052233.4A patent/CN105579830B/zh active Active
- 2014-09-10 WO PCT/EP2014/002440 patent/WO2015043716A1/de not_active Ceased
- 2014-09-10 GB GB1603617.0A patent/GB2532675B/en active Active
-
2016
- 2016-03-24 US US15/079,627 patent/US9612186B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20160202165A1 (en) | 2016-07-14 |
| DE102013219181A1 (de) | 2015-03-26 |
| JP2016535288A (ja) | 2016-11-10 |
| GB2532675B (en) | 2018-08-29 |
| CN105579830B (zh) | 2018-10-12 |
| DE102013219181B4 (de) | 2018-05-09 |
| US9612186B2 (en) | 2017-04-04 |
| GB201603617D0 (en) | 2016-04-13 |
| CN105579830A (zh) | 2016-05-11 |
| WO2015043716A1 (de) | 2015-04-02 |
| GB2532675A (en) | 2016-05-25 |
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