JP6473830B2 - シャワープレート、半導体製造装置およびシャワープレートの製造方法 - Google Patents
シャワープレート、半導体製造装置およびシャワープレートの製造方法 Download PDFInfo
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- JP6473830B2 JP6473830B2 JP2017547860A JP2017547860A JP6473830B2 JP 6473830 B2 JP6473830 B2 JP 6473830B2 JP 2017547860 A JP2017547860 A JP 2017547860A JP 2017547860 A JP2017547860 A JP 2017547860A JP 6473830 B2 JP6473830 B2 JP 6473830B2
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Description
また、本開示の他の実施形態に係るシャワープレートは、セラミック焼結体からなり、第1面と、該第1面に対向する第2面と、前記第1面および前記第2面の間に位置する貫通孔とを備える。そして、該貫通孔の内面に、結晶粒子間に存在する粒界相の露出部よりも突出した突出結晶粒子を有している。さらに、前記貫通孔の内面における前記第1面に開口する部分にあたる開口領域と、前記貫通孔の軸方向の中央部分にあたる中央領域とにおいて、該中央領域における平均結晶粒径が、前記開口領域における平均結晶粒径よりも大きい。
図1は、第1実施形態のシャワープレートの一例を示す、(a)は平面図であり、(b)は(a)のA−A’線における断面図である。図2は、図1に示すシャワープレートを備えたCVD装置の一例を示す模式図である。
図5は、第2実施形態のシャワープレート11を示す図である。(a)は平面図であり、(b)は(a)のB−B’線における断面図である。
1A、11A 第1面
1B,11B 第2面
2 結晶粒子
2a 突出結晶粒子
2b 粒界相
2c 露出部
3、13 貫通孔
4 流路
4a、4b 溝
5a 第2成形体
5b 第3成形体
6 C面
7 腐食性ガス
15 ホース
16 容器
100 CVD装置
100A チャンバー
103 貫通孔
104 ヒータ
105 試料台
106 反応空間
108 ウエハ
109 ガス管
Claims (7)
- セラミック焼結体からなり、
第1面と、
該第1面に対向する第2面と、
前記第1面および前記第2面の間に位置する貫通孔とを備え、
該貫通孔の内面に、結晶粒子間に存在する粒界相の露出部よりも突出した突出結晶粒子を有しており、
前記突出結晶粒子は、前記露出部にあたる部分の内径よりも前記貫通孔の中心側に内径の広い部分を有していることを特徴とするシャワープレート。 - セラミック焼結体からなり、
第1面と、
該第1面に対向する第2面と、
前記第1面および前記第2面の間に位置する貫通孔とを備え、
該貫通孔の内面に、結晶粒子間に存在する粒界相の露出部よりも突出した突出結晶粒子を有しており、
前記貫通孔の内面における前記第1面に開口する部分にあたる開口領域と、前記貫通孔の軸方向の中央部分にあたる中央領域とにおいて、該中央領域における平均結晶粒径が、前記開口領域における平均結晶粒径よりも大きいことを特徴とするシャワープレート。 - 前記第1面および前記第2面の間に流路を備え、
前記貫通孔が、前記第1面および前記流路の間に位置することを特徴とする請求項1または2に記載のシャワープレート。 - 前記突出結晶粒子は、前記貫通孔の中心側にあたる輪郭が凸曲面状であることを特徴とする請求項1乃至請求項3のいずれかに記載のシャワープレート。
- 請求項1乃至請求項4のいずれかに記載のシャワープレートを備えてなることを特徴とする半導体製造装置。
- セラミック粉末を含むスラリーを造粒して顆粒を得て、
該顆粒を用いて、前記第1面となるA面と、該A面に対向し、前記第2面となるB面と、前記A面および前記B面の間に形成された貫通孔を有する第1成形体を得て、
該第1成形体を焼成してセラミック焼結体を得て、
前記焼成の後に前記貫通孔の内面に機械的加工を施さないことを特徴とする請求項1または2に記載のシャワープレートの製造方法。 - セラミック粉末を含むスラリーを造粒して顆粒を得て、
該顆粒を用いて、前記第1面となるC面を有する第2成形体と、前記第2面となるD面を有する第3成形体とを得て、
前記第2成形体の前記C面の反対面に溝を形成し、該溝と前記第2成形体の前記C面との間に貫通孔を形成し、
前記第2成形体の前記C面の反対面と、前記第3成形体の前記D面の反対面とを、前記セラミック粉末を主成分として含むペーストを介して接着して接着体を得て、
該接着体を焼成してセラミック焼結体を得て、
前記焼成の後に前記貫通孔の内面に機械的加工を施さないことを特徴とする請求項3に記載のシャワープレートの製造方法。
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