JP7397974B2 - 通気性部材、半導体製造装置用部材、プラグおよび吸着部材 - Google Patents
通気性部材、半導体製造装置用部材、プラグおよび吸着部材 Download PDFInfo
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- JP7397974B2 JP7397974B2 JP2022517697A JP2022517697A JP7397974B2 JP 7397974 B2 JP7397974 B2 JP 7397974B2 JP 2022517697 A JP2022517697 A JP 2022517697A JP 2022517697 A JP2022517697 A JP 2022517697A JP 7397974 B2 JP7397974 B2 JP 7397974B2
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Description
きる。また、ヘリウム等の冷却用ガスが供給される下側の主面は、凹凸がなだらかになるので、チャンバー1内を浮遊する粒子が固着しにくくなり、通気抵抗の上昇を抑制することができる。冷却用ガスが排出される上側の主面も、凹凸がなだらかになるので、チャンバー1内を浮遊する粒子が堆積しにくくなり、長期間に亘って冷却用ガスを容易に排出することができる。
(1)ジルコン酸イットリウムを主成分として含み、さらに酸化イットリウムを含んだ多孔質セラミックス。
(2)酸化イットリウムを主成分として含み、さらにジルコン酸イットリウムを含んだ多孔質セラミックス。
(3)ジルコン酸イットリウムおよび前記酸化イットリウムを主成分として含む多孔質セラミックス。
平均気孔径がこの範囲であると、機械的強度の大きな低下を抑えつつ、プラズマ生成用ガスが通過しても、気孔の周辺や気孔の内部から生じるパーティクルを小さくすることができる。
ジルコン酸イットリウム(YZrO3)の(222)面の回折ピークI1の位置は、PDF(登録商標)Number:01-089-5593で示されるカードによれば、回折角(2θ)29.333°である。
次に、本開示の通気性部材の製造方法の一例について説明する。
2 シャワープレート
3 基板支持アセンブリ支持部
4 取り付け部
5 絶縁部
6 支持部
9 接合層
10 クランプ電極
11 Oリング
12 貫通孔
13 プラグ
14 プラグ
15 高周波電源
20 プラズマ処理装置
30 静電チャック
31 載置面
32 凸状部
33 内部空間
34 ガス排出孔
35 底面
36 段差面
37 プラグ
40 冷却部材
41 ガス供給孔
50 接着層
51 接続孔
60 半導体製造装置用部材
70 ベベルエッチャ
71 処理室
72 吸着部材
73 支持部持
74 ガス導入管
75 シャワープレート
76 下部電極
77 下部サポートリング
78 上部電極
79 上部リング
Claims (18)
- 柱状または板状の多孔質セラミックスからなり、該多孔質セラミックスの外周面の粗さ曲線における2乗平均平方根傾斜(RΔq)が、0.2以上0.8以下であり、前記多孔質セラミックスの主面の粗さ曲線における2乗平均平方根傾斜(RΔq)よりも大きい、通気性部材。
- 前記多孔質セラミックスの少なくともいずれか一方の主面の粗さ曲線における2乗平均平方根傾斜(RΔq)が、0.2以上0.8以下である(但し、前記主面の2乗平均平方根傾斜(RΔq)は、前記外周面のそれよりも小さい)、請求項1に記載の通気性部材。
- 前記多孔質セラミックスはジルコン酸イットリウムおよび酸化イットリウムを含み、その少なくともいずれかが主成分である、請求項1または2に記載の通気性部材。
- 前記多孔質セラミックスはジルコン酸イットリウムを主成分として含み、さらに酸化イットリウムを含む、請求項3に記載の通気性部材。
- 前記多孔質セラミックスは酸化イットリウムを主成分として含み、さらにジルコン酸イットリウムを含む、請求項3に記載の通気性部材。
- 前記多孔質セラミックスはジルコン酸イットリウムおよび酸化イットリウムを主成分として含む、請求項3に記載の通気性部材。
- 前記ジルコン酸イットリウムおよび前記酸化イットリウムは、いずれも結晶構造が立方晶である、請求項3~6のいずれかに記載の通気性部材。
- X線回折によって得られるジルコン酸イットリウム(YZrO3)の(222)面の回折ピークI1は低角側に、酸化イットリウム(Y2O3)の(222)面の回折ピークI2は高角側にシフトしている、請求項3~7のいずれかに記載の通気性部材。
- 前記回折ピークI1のシフト量Δ1および前記回折ピークI2のシフト量Δ2の絶対値がいずれも0.5°以下である、請求項8に記載の通気性部材。
- 前記多孔質セラミックスの内部の気孔率は、前記多孔質セラミックスの表層部の気孔率よりも高い、請求項1~9のいずれかに記載の通気性部材。
- 前記多孔質セラミックスは、径方向に沿って伸びる環状凸部を備え、該環状凸部の外周側表面が前記多孔質セラミックスの外周面である、請求項1~10のいずれかに記載の通気性部材。
- 前記多孔質セラミックスは、気孔面積占有率が20面積%以上45面積%以下である、請求項1~11のいずれかに記載の通気性部材。
- 前記多孔質セラミックスは、平均気孔径が1μm以上6μm以下である、請求項1~12のいずれかに記載の通気性部材。
- 鉄、コバルトおよびニッケルの少なくともいずれかを含み、前記金属元素の含有量の合計が0.1質量%以下である、請求項1~13のいずれかに記載の通気性部材。
- カリウム、ナトリウム、マグネシウムおよびカルシウムの少なくともいずれかを含み、前記金属元素の含有量の合計が0.001質量%以下である、請求項1~12のいずれかに記載の通気性部材。
- 請求項1~15のいずれかに記載の通気性部材を備えてなる、半導体製造装置用部材。
- 請求項1~15のいずれかに記載の通気性部材からなる、プラグ。
- 請求項1~15のいずれかに記載の通気性部材からなる、吸着部材。
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WO2017109975A1 (ja) | 2015-12-24 | 2017-06-29 | Toto株式会社 | 耐プラズマ性部材 |
JP2017178665A (ja) | 2016-03-30 | 2017-10-05 | 京セラ株式会社 | 多孔質セラミックスおよびガス分散板ならびに吸着用部材 |
JP2018162205A (ja) | 2017-03-17 | 2018-10-18 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 原子層堆積による多孔質体の耐プラズマ性コーティング |
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WO2017109975A1 (ja) | 2015-12-24 | 2017-06-29 | Toto株式会社 | 耐プラズマ性部材 |
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