JP6470214B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6470214B2 JP6470214B2 JP2016053106A JP2016053106A JP6470214B2 JP 6470214 B2 JP6470214 B2 JP 6470214B2 JP 2016053106 A JP2016053106 A JP 2016053106A JP 2016053106 A JP2016053106 A JP 2016053106A JP 6470214 B2 JP6470214 B2 JP 6470214B2
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- 239000004065 semiconductor Substances 0.000 title claims description 72
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 257
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 257
- 239000012535 impurity Substances 0.000 claims description 55
- 229910052698 phosphorus Inorganic materials 0.000 claims description 21
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 20
- 239000011574 phosphorus Substances 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 17
- 230000015556 catabolic process Effects 0.000 description 12
- 238000005468 ion implantation Methods 0.000 description 9
- 229910052785 arsenic Inorganic materials 0.000 description 7
- 230000007547 defect Effects 0.000 description 7
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910021332 silicide Inorganic materials 0.000 description 6
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 3
- 229910021334 nickel silicide Inorganic materials 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004645 scanning capacitance microscopy Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004627 transmission electron microscopy Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- TWRSDLOICOIGRH-UHFFFAOYSA-N [Si].[Si].[Hf] Chemical compound [Si].[Si].[Hf] TWRSDLOICOIGRH-UHFFFAOYSA-N 0.000 description 1
- LKTZODAHLMBGLG-UHFFFAOYSA-N alumanylidynesilicon;$l^{2}-alumanylidenesilylidenealuminum Chemical compound [Si]#[Al].[Si]#[Al].[Al]=[Si]=[Al] LKTZODAHLMBGLG-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System further characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
Description
本実施形態の半導体装置100は、第1の電極と、第2の電極と、第1の電極と第2の電極の間に設けられたp型の第1の炭化珪素領域と、第1の電極と第1の炭化珪素領域の間に設けられたn型の第2の炭化珪素領域と、第1の電極と第1の炭化珪素領域の間に設けられ第2の炭化珪素領域に含まれるn型不純物とは異なるn型不純物を含む第3の炭化珪素領域と、第1の炭化珪素領域と第2の電極の間に設けられたn型の第4の炭化珪素領域と、第1の炭化珪素領域、第2の炭化珪素領域及び第4の炭化珪素領域に、絶縁膜を介して設けられた第3の電極と、を備える。
本実施形態の半導体装置200は、第2の炭化珪素領域22は絶縁膜50と第3の炭化珪素領域24の間及び第1の炭化珪素領域14と第3の炭化珪素領域24の間に設けられている点で、第1の実施形態の半導体装置と異なっている。ここで、第1の実施形態と重複する点については、その記載を省略する。
本実施形態の半導体装置300は、第2の炭化珪素領域22は絶縁膜50と第3の炭化珪素領域24の間に設けられた点で、第1の実施形態の半導体装置と異なっている。ここで、第1及び第2の実施形態と重複する点については、その記載を省略する。
12 第4の炭化珪素領域(ドリフト領域)
14 第1の炭化珪素領域(ウェル領域)
20 第6の炭化珪素領域(コンタクト領域)
22 第2の炭化珪素領域
24 第3の炭化珪素領域(ソース領域)
26 第3の炭化珪素領域の上面を含む平面
27 第3の炭化珪素領域の上面
28 第4の電極の上面
30 第3の電極(ゲート電極)
32 第4の電極(コンタクト電極)
34 第1の電極(ソース電極)
36 第2の電極(ドレイン電極)
40 第1の溝
42 第1の溝の底部
44 第2の溝
46 第2の溝の底部
50 絶縁膜
100 半導体装置
200 半導体装置
300 半導体装置
Claims (9)
- 第1の電極と、
第2の電極と、
前記第1の電極と前記第2の電極の間に設けられたp型の第1の炭化珪素領域と、
前記第1の電極と前記第1の炭化珪素領域の間に設けられたn型の第2の炭化珪素領域と、
前記第1の電極と前記第1の炭化珪素領域の間に設けられ前記第2の炭化珪素領域に含まれるn型不純物とは異なるn型不純物を含む第3の炭化珪素領域と、
前記第1の炭化珪素領域と前記第2の電極の間に設けられたn型の第4の炭化珪素領域と、
前記第1の炭化珪素領域、前記第2の炭化珪素領域及び前記第4の炭化珪素領域に、絶縁膜を介して設けられた第3の電極と、
を備え、
前記第3の電極と前記第3の炭化珪素領域の距離は前記第3の電極と前記第2の炭化珪素領域の距離の2倍以上であり、前記第3の炭化珪素領域は前記第1の電極と前記第2の炭化珪素領域の間に設けられている半導体装置。 - 前記第2の炭化珪素領域に含まれるn型不純物は窒素である請求項1記載の半導体装置。
- 前記第3の炭化珪素領域に含まれるn型不純物はリンである請求項1又は請求項2記載の半導体装置。
- 前記第2の炭化珪素領域は前記絶縁膜と前記第3の炭化珪素領域の間に設けられた請求項1乃至請求項3いずれか一項記載の半導体装置。
- 前記第3の炭化珪素領域の上面を含む平面との距離が前記第3の炭化珪素領域の上面を含む平面と前記第3の電極の距離より長い前記第2の炭化珪素領域の不純物濃度は、前記第3の炭化珪素領域の不純物濃度より低い請求項1乃至請求項4いずれか一項記載の半導体装置。
- 前記第3の炭化珪素領域の上面を含む平面との距離が前記第3の炭化珪素領域の上面を含む平面と前記第3の電極の距離より長い前記第2の炭化珪素領域の不純物濃度は1×1019cm−3以下であり、前記第3の炭化珪素領域の不純物濃度は1×1019cm−3以上である請求項1乃至請求項4いずれか一項記載の半導体装置。
- 前記第1の炭化珪素領域がアルミニウムを含む請求項1乃至請求項6いずれか一項記載の半導体装置。
- 第1の電極と、
第2の電極と、
前記第1の電極と前記第2の電極の間に設けられたp型の第1の炭化珪素領域と、
前記第1の電極と前記第1の炭化珪素領域の間に設けられたn型の第2の炭化珪素領域と、
前記第1の電極と前記第1の炭化珪素領域の間に設けられ前記第2の炭化珪素領域に含まれるn型不純物とは異なるn型不純物を含む第3の炭化珪素領域と、
前記第1の炭化珪素領域と前記第2の電極の間に設けられたn型の第4の炭化珪素領域と、
前記第1の炭化珪素領域、前記第2の炭化珪素領域及び前記第4の炭化珪素領域に、絶縁膜を介して設けられた第3の電極と、
を備え、
前記第3の電極と前記第3の炭化珪素領域の距離は前記第3の電極と前記第2の炭化珪素領域の距離の2倍以上であり、前記第2の炭化珪素領域は前記絶縁膜と前記第3の炭化珪素領域の間及び前記第1の炭化珪素領域と前記第3の炭化珪素領域の間に設けられている半導体装置。 - 第1の電極と、
第2の電極と、
前記第1の電極と前記第2の電極の間に設けられたp型の第1の炭化珪素領域と、
前記第1の電極と前記第1の炭化珪素領域の間に設けられたn型の第2の炭化珪素領域と、
前記第1の電極と前記第1の炭化珪素領域の間に設けられ前記第2の炭化珪素領域に含まれるn型不純物とは異なるn型不純物を含む第3の炭化珪素領域と、
前記第1の炭化珪素領域と前記第2の電極の間に設けられたn型の第4の炭化珪素領域と、
前記第1の炭化珪素領域、前記第2の炭化珪素領域及び前記第4の炭化珪素領域に、絶縁膜を介して設けられた第3の電極と、
を備え、
前記第3の電極と前記第3の炭化珪素領域の距離は前記第3の電極と前記第2の炭化珪素領域の距離の2倍以上であり、前記第3の炭化珪素領域の上面を含む平面と前記第3の電極の距離は前記第3の炭化珪素領域の膜厚より長い半導体装置。
Priority Applications (2)
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JP2016053106A JP6470214B2 (ja) | 2016-03-16 | 2016-03-16 | 半導体装置 |
US15/243,835 US20170271507A1 (en) | 2016-03-16 | 2016-08-22 | Semiconductor device |
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JP2016053106A JP6470214B2 (ja) | 2016-03-16 | 2016-03-16 | 半導体装置 |
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JP2017168667A JP2017168667A (ja) | 2017-09-21 |
JP6470214B2 true JP6470214B2 (ja) | 2019-02-13 |
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JP7182850B2 (ja) * | 2016-11-16 | 2022-12-05 | 富士電機株式会社 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
JP6880669B2 (ja) * | 2016-11-16 | 2021-06-02 | 富士電機株式会社 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
JP6862384B2 (ja) * | 2018-03-21 | 2021-04-21 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び、昇降機 |
WO2022054241A1 (ja) * | 2020-09-11 | 2022-03-17 | サンケン電気株式会社 | 半導体装置 |
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JP4568930B2 (ja) * | 1998-10-16 | 2010-10-27 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
JP2009302510A (ja) * | 2008-03-03 | 2009-12-24 | Fuji Electric Device Technology Co Ltd | トレンチゲート型半導体装置およびその製造方法 |
JP5369464B2 (ja) * | 2008-03-24 | 2013-12-18 | 富士電機株式会社 | 炭化珪素mos型半導体装置 |
JP4877286B2 (ja) * | 2008-07-08 | 2012-02-15 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
JP5732790B2 (ja) * | 2010-09-14 | 2015-06-10 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
JP5750948B2 (ja) * | 2011-03-11 | 2015-07-22 | 三菱電機株式会社 | 炭化珪素半導体装置およびその製造方法 |
JP5482745B2 (ja) * | 2011-08-10 | 2014-05-07 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
JP6139312B2 (ja) * | 2013-07-18 | 2017-05-31 | 株式会社東芝 | 半導体装置 |
JP6064977B2 (ja) * | 2014-11-06 | 2017-01-25 | 三菱電機株式会社 | 炭化珪素半導体装置 |
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2016
- 2016-03-16 JP JP2016053106A patent/JP6470214B2/ja active Active
- 2016-08-22 US US15/243,835 patent/US20170271507A1/en not_active Abandoned
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JP2017168667A (ja) | 2017-09-21 |
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