JP6463220B2 - 処理システム - Google Patents
処理システム Download PDFInfo
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- JP6463220B2 JP6463220B2 JP2015103896A JP2015103896A JP6463220B2 JP 6463220 B2 JP6463220 B2 JP 6463220B2 JP 2015103896 A JP2015103896 A JP 2015103896A JP 2015103896 A JP2015103896 A JP 2015103896A JP 6463220 B2 JP6463220 B2 JP 6463220B2
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- 239000000758 substrate Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
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- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
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- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32899—Multiple chambers, e.g. cluster tools
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- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
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- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
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Description
図1は、処理システム10の一例を示す図である。図1は、上方から見た処理システム10を模式的に示している。本実施形態における処理システム10は、例えば図1に示すように、LM(Loader Module)11、搬送室12、および複数の処理ユニット20−1〜20−12を備える。処理システム10は、例えばクリーンルーム内に設置される。なお、以下では、複数の処理ユニット20−1〜20−12のそれぞれを区別することなく総称する場合に処理ユニット20と記載する。また、図1では、12台の処理ユニット20を有する処理システム10が例示されているが、処理システム10には、11台以下の処理ユニット20が設けられてもよく、13台以上の処理ユニット20が設けられていてもよい。
図2は、処理ユニット20の一例を示す図である。図3は、図2のA方向から見た処理ユニット20の一例を示す図である。図4は、図2のB方向から見た処理ユニット20の一例を示す図である。
11 LM
12 搬送室
13 搬送装置
14 電源ユニット
20 処理ユニット
21 LLM
210 ゲートバルブ
211 搬送装置
212 ゲートバルブ
22 処理チャンバ
220 整合器
221 シャワーヘッド
222 載置台
23 隙間
230 配管
231 配管
232 配管
233 配管
234 配管
30 ユーティリティモジュール
31 流量制御部
32 排気バルブ
33 リモートプラズマ生成部
34 排気ポンプ
40 ガス供給源
41 排気装置
42 排ガス処理装置
Claims (5)
- 1以上の処理ユニットを備え、
それぞれの前記処理ユニットは、
供給された処理ガスを用いて被処理体を処理する複数の処理チャンバと、
前記複数の処理チャンバのそれぞれに供給される前記処理ガスの流量を制御する流量制御部、および、前記複数の処理チャンバのそれぞれから排気されるガスの排気量を制御する排気制御部を含むユーティリティモジュールと、
前記複数の処理チャンバのそれぞれから排気されるガスが流通する第1の配管と
を有し、
前記複数の処理チャンバは、上下方向に重ねて配置され、
前記ユーティリティモジュールは、前記複数の処理チャンバのうち、上下方向に隣接する2つの処理チャンバの間に配置され、
前記複数の処理チャンバのそれぞれから前記排気制御部までの前記第1の配管の長さは、前記処理ユニット内の前記複数の処理チャンバ間で同一であることを特徴とする処理システム。 - 前記ユーティリティモジュールは、
プラズマを生成し、生成されたプラズマ中のラジカルを、前記処理ユニットが有する前記複数の処理チャンバのそれぞれに供給するリモートプラズマ生成部をさらに有することを特徴とする請求項1に記載の処理システム。 - それぞれの前記処理ユニットは、
前記リモートプラズマ生成部によって生成され、前記複数の処理チャンバのそれぞれに分配されるラジカルが流通する第2の配管を有し、
前記複数の処理チャンバのそれぞれから前記リモートプラズマ生成部までの前記第2の配管の長さは、前記処理ユニット内の前記複数の処理チャンバ間で同一であることを特徴とする請求項2に記載の処理システム。 - それぞれの前記処理ユニットが有する前記複数の処理チャンバの数は2以上の偶数であり、
前記ユーティリティモジュールは、
前記処理ユニットが有する前記複数の処理チャンバの数をnとした場合に、上からn/2番目の処理チャンバと、上から(n/2)+1番目の処理チャンバとの間に配置されることを特徴とする請求項1に記載の処理システム。 - 前記処理ユニット単位で、前記処理ユニットの増減が可能であることを特徴とする請求項1に記載の処理システム。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015103896A JP6463220B2 (ja) | 2015-05-21 | 2015-05-21 | 処理システム |
US15/574,514 US20180130681A1 (en) | 2015-05-21 | 2016-05-11 | Processing system |
KR1020177033083A KR102110021B1 (ko) | 2015-05-21 | 2016-05-11 | 처리 시스템 |
PCT/JP2016/064066 WO2016185984A1 (ja) | 2015-05-21 | 2016-05-11 | 処理システム |
CN201680029129.2A CN107615446B (zh) | 2015-05-21 | 2016-05-11 | 处理系统 |
TW105115209A TWI698551B (zh) | 2015-05-21 | 2016-05-17 | 處理系統 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015103896A JP6463220B2 (ja) | 2015-05-21 | 2015-05-21 | 処理システム |
Publications (2)
Publication Number | Publication Date |
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JP2016219629A JP2016219629A (ja) | 2016-12-22 |
JP6463220B2 true JP6463220B2 (ja) | 2019-01-30 |
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Application Number | Title | Priority Date | Filing Date |
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JP2015103896A Active JP6463220B2 (ja) | 2015-05-21 | 2015-05-21 | 処理システム |
Country Status (6)
Country | Link |
---|---|
US (1) | US20180130681A1 (ja) |
JP (1) | JP6463220B2 (ja) |
KR (1) | KR102110021B1 (ja) |
CN (1) | CN107615446B (ja) |
TW (1) | TWI698551B (ja) |
WO (1) | WO2016185984A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6844263B2 (ja) * | 2017-01-05 | 2021-03-17 | 東京エレクトロン株式会社 | 基板処理装置 |
GB201718752D0 (en) * | 2017-11-13 | 2017-12-27 | Edwards Ltd | Vacuum and abatement systems |
KR102240925B1 (ko) | 2019-07-17 | 2021-04-15 | 세메스 주식회사 | 기판 처리 설비 및 기판 반송 장치 |
Family Cites Families (18)
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JPS6063374A (ja) * | 1983-09-14 | 1985-04-11 | Canon Inc | 気相法堆積膜製造装置 |
US6176667B1 (en) * | 1996-04-30 | 2001-01-23 | Applied Materials, Inc. | Multideck wafer processing system |
KR100269097B1 (ko) * | 1996-08-05 | 2000-12-01 | 엔도 마코토 | 기판처리장치 |
JPH10229111A (ja) * | 1997-02-18 | 1998-08-25 | Hitachi Ltd | 半導体製造装置 |
JP3161450B2 (ja) * | 1999-02-02 | 2001-04-25 | 日本電気株式会社 | 基板処理装置、ガス供給方法、及び、レーザ光供給方法 |
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-
2015
- 2015-05-21 JP JP2015103896A patent/JP6463220B2/ja active Active
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2016
- 2016-05-11 KR KR1020177033083A patent/KR102110021B1/ko active IP Right Grant
- 2016-05-11 WO PCT/JP2016/064066 patent/WO2016185984A1/ja active Application Filing
- 2016-05-11 US US15/574,514 patent/US20180130681A1/en not_active Abandoned
- 2016-05-11 CN CN201680029129.2A patent/CN107615446B/zh active Active
- 2016-05-17 TW TW105115209A patent/TWI698551B/zh not_active IP Right Cessation
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KR20170137196A (ko) | 2017-12-12 |
WO2016185984A1 (ja) | 2016-11-24 |
CN107615446B (zh) | 2020-12-04 |
CN107615446A (zh) | 2018-01-19 |
KR102110021B1 (ko) | 2020-05-12 |
JP2016219629A (ja) | 2016-12-22 |
TWI698551B (zh) | 2020-07-11 |
TW201706450A (zh) | 2017-02-16 |
US20180130681A1 (en) | 2018-05-10 |
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