JP6456065B2 - 産業用ロボットのハンドおよび産業用ロボット - Google Patents

産業用ロボットのハンドおよび産業用ロボット Download PDF

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Publication number
JP6456065B2
JP6456065B2 JP2014151053A JP2014151053A JP6456065B2 JP 6456065 B2 JP6456065 B2 JP 6456065B2 JP 2014151053 A JP2014151053 A JP 2014151053A JP 2014151053 A JP2014151053 A JP 2014151053A JP 6456065 B2 JP6456065 B2 JP 6456065B2
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Japan
Prior art keywords
pad
glass substrate
hand
fork
contact surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014151053A
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English (en)
Japanese (ja)
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JP2015217509A (ja
Inventor
矢澤　隆之
隆之 矢澤
佳久 増澤
佳久 増澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to KR1020167017554A priority Critical patent/KR102294719B1/ko
Priority to CN201580005352.9A priority patent/CN106414002B/zh
Priority to PCT/JP2015/062622 priority patent/WO2015174256A1/ja
Priority to TW104115075A priority patent/TWI609749B/zh
Publication of JP2015217509A publication Critical patent/JP2015217509A/ja
Application granted granted Critical
Publication of JP6456065B2 publication Critical patent/JP6456065B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B25J15/0066—Gripping heads and other end effectors multiple gripper units or multiple end effectors with different types of end effectors, e.g. gripper and welding gun
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2014151053A 2014-05-16 2014-07-24 産業用ロボットのハンドおよび産業用ロボット Active JP6456065B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020167017554A KR102294719B1 (ko) 2014-05-16 2015-04-25 산업용 로봇의 핸드 및 산업용 로봇
CN201580005352.9A CN106414002B (zh) 2014-05-16 2015-04-25 产业用机器人的手部及产业用机器人
PCT/JP2015/062622 WO2015174256A1 (ja) 2014-05-16 2015-04-25 産業用ロボットのハンドおよび産業用ロボット
TW104115075A TWI609749B (zh) 2014-05-16 2015-05-12 產業用機器人之手部及產業用機器人

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461994226P 2014-05-16 2014-05-16
US61/994,226 2014-05-16

Publications (2)

Publication Number Publication Date
JP2015217509A JP2015217509A (ja) 2015-12-07
JP6456065B2 true JP6456065B2 (ja) 2019-01-23

Family

ID=54777356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014151053A Active JP6456065B2 (ja) 2014-05-16 2014-07-24 産業用ロボットのハンドおよび産業用ロボット

Country Status (4)

Country Link
JP (1) JP6456065B2 (zh)
KR (1) KR102294719B1 (zh)
CN (1) CN106414002B (zh)
TW (1) TWI609749B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102424792B1 (ko) * 2021-12-07 2022-07-22 권재천 정전기 방지 기능을 구비한 돔 형태의 건식 패드 구조체

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
US6095582A (en) * 1998-03-11 2000-08-01 Trusi Technologies, Llc Article holders and holding methods
US6216883B1 (en) * 1998-07-24 2001-04-17 Mitsubishi Denki Kabushiki Kaisha Wafer holding hand
JP2000100903A (ja) * 1998-09-22 2000-04-07 Olympus Optical Co Ltd 基板保持装置
KR20040038783A (ko) * 2002-10-30 2004-05-08 가부시기가이샤 산교세이기 세이사꾸쇼 산업용 로봇
WO2004113205A1 (ja) * 2003-06-19 2004-12-29 Rorze Corporation 薄板支持体
US20060113806A1 (en) * 2004-11-29 2006-06-01 Asm Japan K.K. Wafer transfer mechanism
JP5059573B2 (ja) * 2007-12-06 2012-10-24 東京エレクトロン株式会社 基板保持具、基板搬送装置および基板処理システム
JP4768001B2 (ja) 2008-09-04 2011-09-07 株式会社日立ハイテクノロジーズ 有機ｅｌデバイス製造装置及び同製造方法並びに成膜装置及び成膜方法
JP5846917B2 (ja) * 2009-01-11 2016-01-20 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板を移動させるシステム、装置、および方法

Also Published As

Publication number Publication date
TWI609749B (zh) 2018-01-01
KR20170007232A (ko) 2017-01-18
CN106414002A (zh) 2017-02-15
CN106414002B (zh) 2019-03-01
TW201603974A (zh) 2016-02-01
KR102294719B1 (ko) 2021-08-30
JP2015217509A (ja) 2015-12-07

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