JP6413720B2 - Ｃａ含有銅合金の製造方法 - Google Patents

Ｃａ含有銅合金の製造方法 Download PDF

Info

Publication number
JP6413720B2
JP6413720B2 JP2014247994A JP2014247994A JP6413720B2 JP 6413720 B2 JP6413720 B2 JP 6413720B2 JP 2014247994 A JP2014247994 A JP 2014247994A JP 2014247994 A JP2014247994 A JP 2014247994A JP 6413720 B2 JP6413720 B2 JP 6413720B2
Authority
JP
Japan
Prior art keywords
copper
metal
coated
copper alloy
ingot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014247994A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015134375A (ja
JP2015134375A5 (enExample
Inventor
訓 熊谷
訓 熊谷
喬 園畠
喬 園畠
路暁 大戸
路暁 大戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP2014247994A priority Critical patent/JP6413720B2/ja
Publication of JP2015134375A publication Critical patent/JP2015134375A/ja
Publication of JP2015134375A5 publication Critical patent/JP2015134375A5/ja
Application granted granted Critical
Publication of JP6413720B2 publication Critical patent/JP6413720B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/10—Supplying or treating molten metal
    • B22D11/108—Feeding additives, powders, or the like
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B15/00—Obtaining copper
    • C22B15/0026—Pyrometallurgy
    • C22B15/006—Pyrometallurgy working up of molten copper, e.g. refining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D1/00—Treatment of fused masses in the ladle or the supply runners before casting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/001—Continuous casting of metals, i.e. casting in indefinite lengths of specific alloys
    • B22D11/004—Copper alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/10—Supplying or treating molten metal
    • B22D11/11—Treating the molten metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/10—Supplying or treating molten metal
    • B22D11/11—Treating the molten metal
    • B22D11/116—Refining the metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D21/00—Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D21/00—Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
    • B22D21/002—Castings of light metals
    • B22D21/005—Castings of light metals with high melting point, e.g. Be 1280 degrees C, Ti 1725 degrees C
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D7/00—Casting ingots, e.g. from ferrous metals
    • B22D7/005—Casting ingots, e.g. from ferrous metals from non-ferrous metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/10—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals with refining or fluxing agents; Use of materials therefor, e.g. slagging or scorifying agents
    • C22B9/103—Methods of introduction of solid or liquid refining or fluxing agents
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/02—Making non-ferrous alloys by melting
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Continuous Casting (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Coating By Spraying Or Casting (AREA)
JP2014247994A 2013-12-17 2014-12-08 Ｃａ含有銅合金の製造方法 Active JP6413720B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014247994A JP6413720B2 (ja) 2013-12-17 2014-12-08 Ｃａ含有銅合金の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013260259 2013-12-17
JP2013260259 2013-12-17
JP2014247994A JP6413720B2 (ja) 2013-12-17 2014-12-08 Ｃａ含有銅合金の製造方法

Publications (3)

Publication Number Publication Date
JP2015134375A JP2015134375A (ja) 2015-07-27
JP2015134375A5 JP2015134375A5 (enExample) 2015-10-29
JP6413720B2 true JP6413720B2 (ja) 2018-10-31

Family

ID=53402682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014247994A Active JP6413720B2 (ja) 2013-12-17 2014-12-08 Ｃａ含有銅合金の製造方法

Country Status (6)

Country Link
US (1) US20160312335A1 (enExample)
JP (1) JP6413720B2 (enExample)
KR (1) KR20160099550A (enExample)
CN (1) CN105829554B (enExample)
TW (1) TW201529861A (enExample)
WO (1) WO2015093333A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7384086B2 (ja) * 2020-03-23 2023-11-21 株式会社プロテリアル 合金元素添加材および銅合金材の製造方法
JP7158434B2 (ja) * 2020-05-14 2022-10-21 Ｊｘ金属株式会社 銅合金インゴット、銅合金箔、および銅合金インゴットの製造方法
JP7394017B2 (ja) * 2020-05-14 2023-12-07 Ｊｘ金属株式会社 金属合金の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5415416A (en) * 1977-07-05 1979-02-05 Hitachi Cable Ltd Filamentous calcium additive for copper alloy
JPS5597419A (en) * 1979-01-18 1980-07-24 Hitachi Cable Ltd Additive for iron and steel
JPS6187831A (ja) * 1984-10-03 1986-05-06 Sumitomo Light Metal Ind Ltd 銅および銅合金製造用の添加剤
JPS6217143A (ja) * 1985-07-16 1987-01-26 Mitsubishi Atom Power Ind Inc アルミニウム・リチウム合金の製造法
GB2179673A (en) * 1985-08-23 1987-03-11 London Scandinavian Metall Grain refining copper alloys
JP3269708B2 (ja) * 1993-08-04 2002-04-02 日鉱金属株式会社 銅合金溶製時の活性金属添加方法
JPH07179926A (ja) * 1993-12-24 1995-07-18 Nippon Steel Weld Prod & Eng Co Ltd 金属カプセル添加剤
JP2002309321A (ja) * 2001-04-10 2002-10-23 Osamichi Nakada 高濃度珪素アルミニウム合金と製造方法
JP4936560B2 (ja) * 2008-03-11 2012-05-23 三菱マテリアル株式会社 密着性に優れた銅合金複合膜の成膜方法およびこの成膜方法で使用するＣａ含有銅合金ターゲット
JP5463794B2 (ja) 2009-08-24 2014-04-09 三菱マテリアル株式会社 半導体装置及びその製造方法
CN102686337B (zh) * 2010-01-26 2015-06-17 三菱综合材料株式会社 含活性元素的铜合金线材的制造方法
JP5708315B2 (ja) 2011-07-05 2015-04-30 三菱マテリアル株式会社 銅合金製スパッタリングターゲット

Also Published As

Publication number Publication date
CN105829554B (zh) 2018-12-18
WO2015093333A1 (ja) 2015-06-25
KR20160099550A (ko) 2016-08-22
CN105829554A (zh) 2016-08-03
US20160312335A1 (en) 2016-10-27
JP2015134375A (ja) 2015-07-27
TW201529861A (zh) 2015-08-01

Similar Documents

Publication Publication Date Title
CN102644053B (zh) 管状溅射靶
KR101782202B1 (ko) 고순도 티탄 잉곳, 그 제조 방법 및 티탄 스퍼터링 타깃
CN105452498B (zh) 锆基合金金属玻璃和用于形成锆基合金金属玻璃的方法
JP6274026B2 (ja) 銅合金スパッタリングターゲット及び銅合金スパッタリングターゲットの製造方法
CN106661720B (zh) 基于银合金的溅射靶
JP2015134375A (ja) Ｃａ含有銅合金の製造方法
TWI518183B (zh) Corrosion resistant high nickel alloy and its manufacturing method
CN110819817B (zh) 用于含铝钛镍基高温合金的基础渣系及电渣重熔方法
JP6630460B1 (ja) 蒸着材料
JP2013014808A (ja) 銅合金製スパッタリングターゲット
JP2011012300A (ja) 銅合金及び銅合金の製造方法
JP2014005503A (ja) Ａｇ合金導電膜及び膜形成用スパッタリングターゲット
JP2015134375A5 (enExample)
WO2022070432A1 (ja) 金の蒸着材料
Zang et al. Spreading process and interfacial characteristic of Sn–17Bi–0.5 Cu/Ni at temperatures ranging from 523 K to 673 K
CN101508016B (zh) 一种用于键合金丝的中间合金制备新方法
CN104812920B (zh) 溅射靶用铜合金制热轧板及溅射靶
JP6678501B2 (ja) スパッタリングターゲット及びその製造方法
JP6083521B2 (ja) Ａｌ−Ｌｉ系合金の製造方法
JP5157889B2 (ja) 銅合金鋳塊の製造方法、及び活性元素の添加方法
JP2018145518A (ja) Ｃｕ−Ｎｉ合金スパッタリングターゲット
Chen et al. Control of low melting point MnO-SiO2-Al2O3 inclusions in low carbon thin-strip continuous casting steel
CN113005325B (zh) 一种具有微晶结构高铁含量铜铁合金带材及其制备方法
KR102197979B1 (ko) 구리 합금 스퍼터링 타깃
JP2020007600A (ja) はんだ接合電極およびはんだ接合電極の被膜形成用錫合金ターゲット

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150907

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170926

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180613

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180619

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180719

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180904

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180917

R150 Certificate of patent or registration of utility model

Ref document number: 6413720

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250