CN105829554B - 含Ca铜合金的制造方法 - Google Patents

含Ca铜合金的制造方法 Download PDF

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Publication number
CN105829554B
CN105829554B CN201480068286.5A CN201480068286A CN105829554B CN 105829554 B CN105829554 B CN 105829554B CN 201480068286 A CN201480068286 A CN 201480068286A CN 105829554 B CN105829554 B CN 105829554B
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CN
China
Prior art keywords
copper
metal
coated
addition
copper alloy
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CN201480068286.5A
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Chinese (zh)
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CN105829554A (zh
Inventor
熊谷训
园畠乔
大户路晓
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/10—Supplying or treating molten metal
    • B22D11/108—Feeding additives, powders, or the like
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B15/00—Obtaining copper
    • C22B15/0026—Pyrometallurgy
    • C22B15/006—Pyrometallurgy working up of molten copper, e.g. refining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D1/00—Treatment of fused masses in the ladle or the supply runners before casting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/001—Continuous casting of metals, i.e. casting in indefinite lengths of specific alloys
    • B22D11/004—Copper alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/10—Supplying or treating molten metal
    • B22D11/11—Treating the molten metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/10—Supplying or treating molten metal
    • B22D11/11—Treating the molten metal
    • B22D11/116—Refining the metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D21/00—Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D21/00—Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
    • B22D21/002—Castings of light metals
    • B22D21/005—Castings of light metals with high melting point, e.g. Be 1280 degrees C, Ti 1725 degrees C
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D7/00—Casting ingots, e.g. from ferrous metals
    • B22D7/005—Casting ingots, e.g. from ferrous metals from non-ferrous metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/10—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals with refining or fluxing agents; Use of materials therefor, e.g. slagging or scorifying agents
    • C22B9/103—Methods of introduction of solid or liquid refining or fluxing agents
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/02—Making non-ferrous alloys by melting
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Continuous Casting (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Manufacture And Refinement Of Metals (AREA)
CN201480068286.5A 2013-12-17 2014-12-08 含Ca铜合金的制造方法 Active CN105829554B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-260259 2013-12-17
JP2013260259 2013-12-17
PCT/JP2014/082400 WO2015093333A1 (ja) 2013-12-17 2014-12-08 Ｃａ含有銅合金の製造方法

Publications (2)

Publication Number Publication Date
CN105829554A CN105829554A (zh) 2016-08-03
CN105829554B true CN105829554B (zh) 2018-12-18

Family

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CN201480068286.5A Active CN105829554B (zh) 2013-12-17 2014-12-08 含Ca铜合金的制造方法

Country Status (6)

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US (1) US20160312335A1 (enExample)
JP (1) JP6413720B2 (enExample)
KR (1) KR20160099550A (enExample)
CN (1) CN105829554B (enExample)
TW (1) TW201529861A (enExample)
WO (1) WO2015093333A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7384086B2 (ja) * 2020-03-23 2023-11-21 株式会社プロテリアル 合金元素添加材および銅合金材の製造方法
JP7394017B2 (ja) * 2020-05-14 2023-12-07 Ｊｘ金属株式会社 金属合金の製造方法
JP7158434B2 (ja) * 2020-05-14 2022-10-21 Ｊｘ金属株式会社 銅合金インゴット、銅合金箔、および銅合金インゴットの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5415416A (en) * 1977-07-05 1979-02-05 Hitachi Cable Ltd Filamentous calcium additive for copper alloy
JPS6187831A (ja) * 1984-10-03 1986-05-06 Sumitomo Light Metal Ind Ltd 銅および銅合金製造用の添加剤
JP2009215613A (ja) * 2008-03-11 2009-09-24 Mitsubishi Materials Corp 密着性に優れた銅合金複合膜の成膜方法およびこの成膜方法で使用するＣａ含有銅合金ターゲット
JP2011044674A (ja) * 2009-08-24 2011-03-03 Mitsubishi Materials Corp 半導体装置、その製造方法及びその製造方法に用いるスパッタリングターゲット
CN102686337A (zh) * 2010-01-26 2012-09-19 三菱综合材料株式会社 含活性元素的铜合金线材的制造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5597419A (en) * 1979-01-18 1980-07-24 Hitachi Cable Ltd Additive for iron and steel
JPS6217143A (ja) * 1985-07-16 1987-01-26 Mitsubishi Atom Power Ind Inc アルミニウム・リチウム合金の製造法
GB2179673A (en) * 1985-08-23 1987-03-11 London Scandinavian Metall Grain refining copper alloys
JP3269708B2 (ja) * 1993-08-04 2002-04-02 日鉱金属株式会社 銅合金溶製時の活性金属添加方法
JPH07179926A (ja) * 1993-12-24 1995-07-18 Nippon Steel Weld Prod & Eng Co Ltd 金属カプセル添加剤
JP2002309321A (ja) * 2001-04-10 2002-10-23 Osamichi Nakada 高濃度珪素アルミニウム合金と製造方法
JP5708315B2 (ja) * 2011-07-05 2015-04-30 三菱マテリアル株式会社 銅合金製スパッタリングターゲット

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5415416A (en) * 1977-07-05 1979-02-05 Hitachi Cable Ltd Filamentous calcium additive for copper alloy
JPS6187831A (ja) * 1984-10-03 1986-05-06 Sumitomo Light Metal Ind Ltd 銅および銅合金製造用の添加剤
JP2009215613A (ja) * 2008-03-11 2009-09-24 Mitsubishi Materials Corp 密着性に優れた銅合金複合膜の成膜方法およびこの成膜方法で使用するＣａ含有銅合金ターゲット
JP2011044674A (ja) * 2009-08-24 2011-03-03 Mitsubishi Materials Corp 半導体装置、その製造方法及びその製造方法に用いるスパッタリングターゲット
CN102686337A (zh) * 2010-01-26 2012-09-19 三菱综合材料株式会社 含活性元素的铜合金线材的制造方法

Also Published As

Publication number Publication date
CN105829554A (zh) 2016-08-03
JP2015134375A (ja) 2015-07-27
KR20160099550A (ko) 2016-08-22
WO2015093333A1 (ja) 2015-06-25
TW201529861A (zh) 2015-08-01
JP6413720B2 (ja) 2018-10-31
US20160312335A1 (en) 2016-10-27

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