JP6386457B2 - TiAlN被覆工具 - Google Patents
TiAlN被覆工具 Download PDFInfo
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- JP6386457B2 JP6386457B2 JP2015524719A JP2015524719A JP6386457B2 JP 6386457 B2 JP6386457 B2 JP 6386457B2 JP 2015524719 A JP2015524719 A JP 2015524719A JP 2015524719 A JP2015524719 A JP 2015524719A JP 6386457 B2 JP6386457 B2 JP 6386457B2
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Description
この実施例では、ソリッド超硬合金(SHM)エンドミル(いわゆる「Tough Guys」)に、本発明による被膜を、また、従来技術による比較用の被膜を施し、それらの被覆された工具を切削試験で比較した。
直径:10mm
切れ刃の数:4
切れ刃の長さ:直径の200%
ねじれ角:50o
横断切れ刃のレーキ角:13.5o
主切れ刃のレーキ角:10.5o
基材:平均粒度が0.8μmのWCと10重量%のCo粘結剤を含む微粒子超硬合金
先ず、基材表面に、Ti−Al混合ターゲット(Ti:Al=50:50)を用いたア−ク蒸着法により、厚さ0.2μmのTiAlN中間被膜を堆積した(バイアス:100V、4Paの窒素、0.8A/cm2の電流密度、蒸着温度:550℃)。その上に、本発明の耐摩耗保護被膜を、合計2μmの層厚で、これもまたアーク蒸着法によって堆積した。Ti:Alが50:50である4個のTi−Al混合ターゲットと、Ti:Alが33:67である2個のTi−Al混合ターゲットを同時に用いて堆積した(バイアス:60V、4.5Paの窒素、両方の種類のターゲットに対して0.8A/cm2の電流密度、蒸着温度:550℃)。基材は回転テーブル上に導かれ、異なる種類のターゲットに対向させた。全体で、90層のTix(A)Aly(A)N被膜(A)(ただしTi:Al=50:50)及び90層のTix(B)Aly(B)N被膜(B)(ただしTi:Al=33:67)が、周期的に交互に堆積され、これらTix(A)Aly(A)N被膜(A)は、それぞれ約15〜19nmの厚さを有し、またこれらTix(B)Aly(B)N被膜(B)は、それぞれ約3〜6nmの厚さを有した。その後、最後に、最も外側の被膜を、Ti:Alが33:67であるTi−Al混合ターゲットを用いて、アーク蒸着法によって層厚0.1μmで堆積した(バイアス:40V、3.0Paの窒素、0.8A/cm2の電流密度、蒸着温度:550℃)。
単層TiAlN耐摩耗保護被膜を、基材表面に、Ti:Alが33:67であるTi−Al混合ターゲットを用いて、アーク蒸着法によって合計2.5μmの層厚で堆積した(バイアス:80V、1.5Paの窒素、蒸着温度:550℃、2A/cm2の電流密度)。
これらの被覆工具をフライス加工試験で比較し、平均逃げ面摩耗Vb及び最大逃げ面摩耗Vbmaxを、各ケースの2回の試験からの平均として求めた。試験の結果を次の表1に示す。
切削条件:刃送りfz=0.07mm
切削速度vc=170m/分
切削幅ae=4mm
切削深さap=8mm
CL5%による冷却(=冷却用潤滑油5%を含むエマルション)
この実施例では、実施例1の場合と同様、ソリッド超硬合金(SHM)エンドミル(いわゆる「Tough Guys」)に、本発明による被膜を、また、従来技術による比較用の被覆を施し、それらの被覆された工具を切削試験で比較した。被覆されたエンドミルは、実施例1と比較して、形状を異なるものとした。
直径:3mm
切れ刃の数:3
切れ刃の長さ:直径の200%
ねじれ角:50o
横断切れ刃のレーキ角:13.5o
主切れ刃のレーキ角:10.5o
基材:平均粒度が0.8μmのWCと10重量%のCo粘結剤を含む微粒子超硬合金
これらの被覆工具をフライス加工試験で比較し、平均逃げ面摩耗Vb及び最大逃げ面摩耗Vbmaxを、各ケースの2回の試験からの平均として求めた。試験の結果を次の表2に示す。
切削条件:刃送りfz=0.02mm
切削速度vc=141m/分
切削幅ae=1.2mm
切削深さap=2.4mm
CL5%による冷却(=冷却用潤滑油5%を含むエマルション)
この実施例では、被覆される工具基材は、実施例1の場合と同一である。同様に、先ず、基材表面に、Ti−Al混合ターゲット(Ti:Al=50:50)を用いたからアーク蒸着法により、厚さ0.2μmのTiAlN中間被膜を堆積した(バイアス:100V、4Paの窒素、0.8A/cm2の電流密度、蒸着温度:550℃)。
この実施例では、強度が880N/mm2である42CrMo4鋼からなる四角形の基礎形状を有するスローアウェイ切削インサートP2808に、本発明による被膜を、また、従来技術による比較用の被膜を施し、それらの被覆された工具を切削試験で比較した。
先ず、基材表面に、Ti−Al混合ターゲット(Ti:Al=50:50)を用いたアーク蒸着法により、厚さ0.2μmのTiAlN中間被膜を堆積した(バイアス:100V、4Paの窒素、1.0A/cm2の電流密度、蒸着温度:550℃)。その上に、本発明の耐摩耗保護被膜を合計2μmの層厚で、これもまたアーク蒸着法によって堆積した。Ti:Alが50:50である4個のTi−Al混合ターゲットと、Ti:Alが33:67である2個のTi−Al混合ターゲットを同時用いて堆積した(バイアス:60V、4Paの窒素、両方のターゲットに対して1.0A/cm2の電流密度、蒸着温度:550℃)。基材は回転テーブル上に導かれ、それら異なる種類のターゲットに対向させた。全体で、90層のTix(A)Aly(A)N被膜(A)(ただしTi:Al=50:50)及び90層のTix(B)Aly(B)N被膜(B)(ただしTi:Al=33:67)が、周期的に交互に堆積され、これらTix(A)Aly(A)N被膜(A)は、それぞれ約15〜19nmの厚さを有し、またこれらTix(B)Aly(B)N被膜(B)は、それぞれ約3〜6nmの厚さを有した。その後、最後に、最も外側の被膜を、Ti:Alが33:67であるTi−Al混合ターゲットを用いて、アーク蒸着法により、層厚0.1μmで堆積した(バイアス:40V、3.0Paの窒素、0.8A/cm2の電流密度、蒸着温度:550℃)。
多層被膜(60層の被膜)のTiAlN耐摩耗保護被膜を、基材表面に、Ti:Alが33:67であるTi−Al混合ターゲットを用いて、アーク蒸着法によって合計4.0μmの層厚で堆積した(蒸着温度:450℃、0.8A/cm2の電流密度)。圧力及びバイアスは、30V及び窒素5Paから60V及び窒素2Paまで変化させた。次いで、厚さ0.1μmのTiN装飾被膜を、Tiターゲットを用いて、0.8Paの窒素、0.8A/cm2の電流密度、及び100Vのバイアスで堆積した。
これらの被覆工具をフライス加工試験で比較し、最大逃げ面摩耗Vbmaxを各ケースの2回の試験からの平均として求めた。試験の結果を次の表3に示す。
切削条件:送りvf=120mm/分
刃送りfz=0.2mm
切削速度vc=235m/分
フライス加工軌跡 6×800mm
フライス加工は冷却なし
Claims (9)
- 超硬合金、サーメット、セラミックス、鋼、又は高速度鋼から造られる基体と、それにPVDプロセスで堆積される単層又は多層の耐摩耗保護被膜とを含み、前記耐摩耗保護被膜の少なくとも1層が、窒化チタンアルミニウム層TixAlyN(ただしx+y=1)であり、その層が、5重量%までの更なる金属を含有することができる工具であって、
前記TixAlyN層が、少なくとも40かつ最高で300の周期的に交互に存在するTix(A)Aly(A)N被膜(A)(ただしx(A)+y(A)=1)及びTix(B)Aly(B)N被膜(B)(ただしx(B)+y(B)=1)を有する多被膜副構造体であり、
被膜(B)中の前記Al濃度y(B)が、最高で70原子%(y(B)≦0.70)であり、かつ
被膜(B)中の前記Al濃度y(B)が、被膜(A)中の前記Al濃度y(A)よりも10〜25原子%高く(y(B)=(y(A)+0.10)〜(y(A)+0.25))、
前記Tix(A)Aly(A)N被膜(A)中のTi対Alの濃度比x(A):y(A)が、0.40:0.60〜0.60:0.40であり、
前記TixAlyN層が、2500〜4000のビッカース硬さ、長さ10μmにわたって測定される、1.0μm以下の平均表面粗さRa、及び380GPa〜470GPaの弾性係数(E−モジュラス)を有し、かつ、
前記Tix(A)Aly(A)N被膜(A)が、前記Tix(B)Aly(B)N被膜(B)より大きな厚さを有する、
ことを特徴とする、工具。 - 前記Tix(A)Aly(A)N被膜(A)が、2〜40nmの範囲内の厚さを有し、かつ前記Tix(B)Aly(B)N被膜(B)が、1〜20nmの範囲内の厚さを有することを特徴とする、請求項1に記載の工具。
- 前記Tix(A)Aly(A)N被膜(A)が、前記Tix(B)Aly(B)N被膜(B)の1.5〜3.0倍の厚さを有することを特徴とする、請求項1又は2に記載の工具。
- 前記Tix(A)Aly(A)N被膜(A)中のTi対Alの濃度比x(A):y(A)が、0.45:0.55〜0.55:0.45であることを特徴とする、請求項1〜3のいずれか1項に記載の工具。
- 多被膜副構造体を有する前記TixAlyN層が、前記耐摩耗保護被膜の最外層であり、かつ任意選択で少なくとも一部の領域に0.1〜1.5μmの厚さを有する、上に重ねられた薄い摩耗検知層を有することを特徴とする、請求項1〜4のいずれか1項に記載の工具。
- 前記TixAlyN層が、3000〜3500のビッカース硬さを有することを特徴とする、請求項1〜5のいずれか1項に記載の工具。
- 前記TixAlyN層が、長さ10μmにわたって測定される、0.5μm以下の平均表面粗さRaを有することを特徴とする、請求項1〜6のいずれか1項に記載の工具。
- 前記TixAlyN層が、420GPa〜460GPaの弾性係数(E−モジュラス)を有することを特徴とする、請求項1〜7のいずれか1項に記載の工具。
- ソリッド超硬合金工具又はスローアウェイ切削インサートであることを特徴とする、請求項1〜8のいずれか1項に記載の工具。
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DE102012107129.2A DE102012107129A1 (de) | 2012-08-03 | 2012-08-03 | TiAIN-beschichtetes Werkzeug |
PCT/EP2013/065550 WO2014019897A1 (de) | 2012-08-03 | 2013-07-23 | Tialn-beschichtetes werkzeug |
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