JP6382032B2 - Mems素子 - Google Patents
Mems素子 Download PDFInfo
- Publication number
- JP6382032B2 JP6382032B2 JP2014175348A JP2014175348A JP6382032B2 JP 6382032 B2 JP6382032 B2 JP 6382032B2 JP 2014175348 A JP2014175348 A JP 2014175348A JP 2014175348 A JP2014175348 A JP 2014175348A JP 6382032 B2 JP6382032 B2 JP 6382032B2
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- JP
- Japan
- Prior art keywords
- movable electrode
- mems element
- protrusion
- fixed electrode
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Micromachines (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Description
Claims (3)
- バックチャンバーを備えた基板と、該基板上に、スペーサーを挟んで固定電極と可動電極とを配置することでエアーギャップが形成されたMEMS素子において、
前記固定電極および前記可動電極の少なくともいずれか一方に、前記エアーギャップ側に突出する突起部を備え、
該突起部は、環状で、かつ屈曲形状であることを特徴とするMEMS素子。 - 請求項1記載のMEMS素子において、前記突起部は、前記可動電極から前記基板側に突出していることを特徴とするMEMS素子。
- 請求項1または2いずれか記載のMEMS素子において、
前記屈曲形状の変曲点は、湾曲形状であることを特徴とするMEMS素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014175348A JP6382032B2 (ja) | 2014-08-29 | 2014-08-29 | Mems素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014175348A JP6382032B2 (ja) | 2014-08-29 | 2014-08-29 | Mems素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016049583A JP2016049583A (ja) | 2016-04-11 |
JP6382032B2 true JP6382032B2 (ja) | 2018-08-29 |
Family
ID=55657513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014175348A Active JP6382032B2 (ja) | 2014-08-29 | 2014-08-29 | Mems素子 |
Country Status (1)
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JP (1) | JP6382032B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6885828B2 (ja) * | 2017-09-02 | 2021-06-16 | 新日本無線株式会社 | Mems素子及びその製造方法 |
JP7040722B2 (ja) * | 2018-01-22 | 2022-03-23 | 日清紡マイクロデバイス株式会社 | Mems素子 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060280319A1 (en) * | 2005-06-08 | 2006-12-14 | General Mems Corporation | Micromachined Capacitive Microphone |
DE102006022377B4 (de) * | 2006-05-12 | 2016-03-03 | Robert Bosch Gmbh | Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung |
EP2473830A4 (en) * | 2009-09-02 | 2014-07-02 | Kontel Data System Ltd | MEMS BURDENING CONCENTRATION STRUCTURE FOR MEMS SENSORS |
US8464589B2 (en) * | 2010-10-14 | 2013-06-18 | Solid State System Co., Ltd. | Micro-electromechanical systems (MEMS) structure |
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2014
- 2014-08-29 JP JP2014175348A patent/JP6382032B2/ja active Active
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Publication number | Publication date |
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JP2016049583A (ja) | 2016-04-11 |
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