JP6369042B2 - 光学式エンコーダユニット及び光学式エンコーダ - Google Patents

光学式エンコーダユニット及び光学式エンコーダ Download PDF

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Publication number
JP6369042B2
JP6369042B2 JP2014024887A JP2014024887A JP6369042B2 JP 6369042 B2 JP6369042 B2 JP 6369042B2 JP 2014024887 A JP2014024887 A JP 2014024887A JP 2014024887 A JP2014024887 A JP 2014024887A JP 6369042 B2 JP6369042 B2 JP 6369042B2
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optical
substrate
light
light source
wirings
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Japanese (ja)
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JP2015111089A5 (enExample
JP2015111089A (ja
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寿明 小口
寿明 小口
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NSK Ltd
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NSK Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
    • G01D5/345—Polarising encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2014024887A 2013-11-05 2014-02-12 光学式エンコーダユニット及び光学式エンコーダ Active JP6369042B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014024887A JP6369042B2 (ja) 2013-11-05 2014-02-12 光学式エンコーダユニット及び光学式エンコーダ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013229565 2013-11-05
JP2013229565 2013-11-05
JP2014024887A JP6369042B2 (ja) 2013-11-05 2014-02-12 光学式エンコーダユニット及び光学式エンコーダ

Publications (3)

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JP2015111089A JP2015111089A (ja) 2015-06-18
JP2015111089A5 JP2015111089A5 (enExample) 2017-03-09
JP6369042B2 true JP6369042B2 (ja) 2018-08-08

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JP2014024887A Active JP6369042B2 (ja) 2013-11-05 2014-02-12 光学式エンコーダユニット及び光学式エンコーダ
JP2015546627A Active JP6369474B2 (ja) 2013-11-05 2014-10-31 光学式エンコーダユニット及び光学式エンコーダ

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US (1) US10156459B2 (enExample)
EP (1) EP3067668B1 (enExample)
JP (2) JP6369042B2 (enExample)
CN (1) CN105683718B (enExample)
WO (1) WO2015068662A1 (enExample)

Families Citing this family (7)

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CN107095644B (zh) * 2016-02-19 2020-05-19 光宝光电(常州)有限公司 光感测器模组及具有该光感测器模组的穿戴装置
CN109073423A (zh) * 2016-02-25 2018-12-21 日本精工株式会社 传感器
JP2018100837A (ja) * 2016-12-19 2018-06-28 セイコーエプソン株式会社 エンコーダー、ロボットおよびプリンター
JP7080129B2 (ja) * 2018-08-01 2022-06-03 株式会社トプコン 角度検出システムおよび角度検出方法
CN111024225B (zh) * 2019-12-02 2021-12-31 西北核技术研究院 一种激光远场桶中功率分布曲线的绝对测量方法
EP4394332A1 (de) * 2023-01-01 2024-07-03 POLDI microelectronics GmbH Verfahren zur iterativen erzeugung einer matrix aus grundelementen
EP4394461B1 (de) * 2023-01-01 2025-07-16 POLDI microelectronics GmbH Integrierte schaltung zur messung der polarisation von licht

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JPS61225626A (ja) 1985-03-29 1986-10-07 Mitsubishi Electric Corp 光計測装置
JPH01216213A (ja) * 1988-02-25 1989-08-30 Mitsutoyo Corp 光学式変位検出器
US4922095A (en) 1989-05-11 1990-05-01 Conoco Inc. Method and apparatus for sensing disturbance using fiber-optic polarization rotation
JPH06174494A (ja) 1992-12-09 1994-06-24 Oki Electric Ind Co Ltd エンコーダ
JP3349343B2 (ja) * 1996-05-08 2002-11-25 山洋電気株式会社 光電式エンコーダ
US5981941A (en) 1996-05-20 1999-11-09 Matsushita Electric Industrial Co., Ltd. Optical encorder for detection having a moving reference point
US5844673A (en) * 1998-04-17 1998-12-01 Cambridge Technology, Inc. Axial led position detector for determining the angular position of a rotatable element
JP3014389B2 (ja) 1998-04-28 2000-02-28 カナレ電気株式会社 量子波干渉層を有した受光素子
EP0954034A3 (en) 1998-04-28 2000-01-26 Canare Electric Co., Ltd. Light receiving device with quantum-wave interference layers
DE60009171T2 (de) * 2000-06-15 2004-10-14 Scanlab Ag Ein positionsdetektor für eine abtastvorrichtung
JP2002208725A (ja) * 2000-11-13 2002-07-26 Mitsutoyo Corp 受光素子アレイとこれを用いた光学式エンコーダ及び受光素子アレイの製造方法
JP3695398B2 (ja) 2002-01-30 2005-09-14 富士ゼロックス株式会社 光学式エンコーダ及びエンコーダ用スケール
JP4476682B2 (ja) 2003-05-16 2010-06-09 株式会社ミツトヨ 光電式エンコーダ
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JP4364711B2 (ja) 2004-04-14 2009-11-18 シャープ株式会社 光学式エンコーダおよびそれを備えた電子機器
JP4857785B2 (ja) * 2006-01-27 2012-01-18 ミツミ電機株式会社 エンコーダ付モータ及びその組立方法
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Also Published As

Publication number Publication date
EP3067668B1 (en) 2019-01-30
US10156459B2 (en) 2018-12-18
EP3067668A4 (en) 2017-10-04
CN105683718A (zh) 2016-06-15
WO2015068662A1 (ja) 2015-05-14
JPWO2015068662A1 (ja) 2017-03-09
US20160282149A1 (en) 2016-09-29
JP2015111089A (ja) 2015-06-18
JP6369474B2 (ja) 2018-08-08
CN105683718B (zh) 2018-05-15
EP3067668A1 (en) 2016-09-14

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