JP6359002B2 - Ｅｂｓｄ検出装置 - Google Patents

Ｅｂｓｄ検出装置 Download PDF

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JP6359002B2
JP6359002B2 JP2015243299A JP2015243299A JP6359002B2 JP 6359002 B2 JP6359002 B2 JP 6359002B2 JP 2015243299 A JP2015243299 A JP 2015243299A JP 2015243299 A JP2015243299 A JP 2015243299A JP 6359002 B2 JP6359002 B2 JP 6359002B2
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ebsd
sample
electron beam
image sensor
pattern
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Japanese (ja)
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JP2017110935A5 (https=
JP2017110935A (ja
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鈴木　清一
清一 鈴木
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TSL SOLUTIONS K.K.
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TSL SOLUTIONS K.K.
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Priority to JP2015243299A priority Critical patent/JP6359002B2/ja
Priority to PCT/JP2016/075793 priority patent/WO2017104186A1/ja
Publication of JP2017110935A publication Critical patent/JP2017110935A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2015243299A 2015-12-14 2015-12-14 Ｅｂｓｄ検出装置 Active JP6359002B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015243299A JP6359002B2 (ja) 2015-12-14 2015-12-14 Ｅｂｓｄ検出装置
PCT/JP2016/075793 WO2017104186A1 (ja) 2015-12-14 2016-09-02 Ｅｂｓｄ検出装置

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JP2015243299A JP6359002B2 (ja) 2015-12-14 2015-12-14 Ｅｂｓｄ検出装置

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JP2017110935A JP2017110935A (ja) 2017-06-22
JP2017110935A5 JP2017110935A5 (https=) 2018-05-24
JP6359002B2 true JP6359002B2 (ja) 2018-07-18

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JP2015243299A Active JP6359002B2 (ja) 2015-12-14 2015-12-14 Ｅｂｓｄ検出装置

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JP (1) JP6359002B2 (https=)
WO (1) WO2017104186A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6823563B2 (ja) * 2017-07-31 2021-02-03 株式会社日立製作所 走査電子顕微鏡および画像処理装置
EP3644341B1 (en) 2018-10-25 2025-01-22 Bruker Nano GmbH Moveable detector
CN113433149B (zh) * 2021-05-26 2022-10-11 中国科学院金属研究所 一种实现ebsd系统跨尺度连续自动表征分析测试方法
CN113376192B (zh) * 2021-06-11 2023-11-10 华东交通大学 一种基于ebsd花样推测模糊菊池带宽度的方法
EP4312021A1 (en) * 2022-07-26 2024-01-31 Bruker Nano GmbH Detector and method for obtaining kikuchi images
WO2024139049A1 (zh) * 2022-12-27 2024-07-04 纳克微束(北京)有限公司 一种探测系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50129170U (https=) * 1974-03-18 1975-10-23
JPS5762016B2 (https=) * 1974-05-17 1982-12-27 Nippon Electron Optics Lab
JPH088515Y2 (ja) * 1989-09-29 1996-03-06 横河電機株式会社 電子線回折装置
JPH05296947A (ja) * 1992-04-24 1993-11-12 Japan Aviation Electron Ind Ltd 電子線回折測定装置
JP3174396B2 (ja) * 1992-06-03 2001-06-11 科学技術振興事業団 電子エネルギー損失微細構造測定方法および装置
JP3910884B2 (ja) * 2002-07-02 2007-04-25 独立行政法人科学技術振興機構 Ｒｈｅｅｄのエネルギー損失スペクトル計測装置及び方法
JP5958914B2 (ja) * 2013-03-13 2016-08-02 株式会社Ｔｓｌソリューションズ 透過型ｅｂｓｄ法

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JP2017110935A (ja) 2017-06-22
WO2017104186A1 (ja) 2017-06-22

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