JP6354575B2 - 圧電素子 - Google Patents
圧電素子 Download PDFInfo
- Publication number
- JP6354575B2 JP6354575B2 JP2014261605A JP2014261605A JP6354575B2 JP 6354575 B2 JP6354575 B2 JP 6354575B2 JP 2014261605 A JP2014261605 A JP 2014261605A JP 2014261605 A JP2014261605 A JP 2014261605A JP 6354575 B2 JP6354575 B2 JP 6354575B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric element
- pair
- electrodes
- main surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims description 52
- 239000000919 ceramic Substances 0.000 claims description 14
- 238000010304 firing Methods 0.000 claims description 4
- 238000004381 surface treatment Methods 0.000 claims description 4
- 230000010287 polarization Effects 0.000 description 41
- 239000013078 crystal Substances 0.000 description 30
- 238000006073 displacement reaction Methods 0.000 description 24
- 230000005764 inhibitory process Effects 0.000 description 11
- 238000005498 polishing Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000002269 spontaneous effect Effects 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000007517 polishing process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910018054 Ni-Cu Inorganic materials 0.000 description 2
- 229910018481 Ni—Cu Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Landscapes
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
Claims (6)
- 互いに対向する一対の主面を有し且つ圧電セラミックからなる圧電基板と、
前記一対の主面上に配置されている一対の電極と、を備え、
前記一対の主面のうち少なくとも一面は粗面であり、
前記粗面が形成された前記主面上の粗さ曲線要素の平均長さ(RSm)は、
第1の方向と前記第1の方向と交差する第2の方向で異なり、
前記一対の電極のうち前記粗面に配置される電極は、前記粗面である前記主面に沿って前記主面上に形成されていることを特徴とする圧電素子。 - 前記一対の主面は長方形であり、
前記長方形の長辺と平行な方向が第1の方向である請求項1に記載の圧電素子。 - 前記第1の方向の粗さ曲線要素の平均長さ(RSm)が、前記第2の方向の粗さ曲線要素の平均長さ(RSm)より小さい請求項2に記載の圧電素子。
- 前記一対の主面は、両面とも粗面である請求項1〜3に記載の圧電素子。
- 前記一対の主面は、焼成後に表面処理をしていない面である請求項1〜4に記載の圧電素子。
- 前記一対の電極は、主面の全面上に配置されている請求項1〜4に記載の圧電素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014261605A JP6354575B2 (ja) | 2014-12-25 | 2014-12-25 | 圧電素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014261605A JP6354575B2 (ja) | 2014-12-25 | 2014-12-25 | 圧電素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016122725A JP2016122725A (ja) | 2016-07-07 |
JP6354575B2 true JP6354575B2 (ja) | 2018-07-11 |
Family
ID=56329207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014261605A Active JP6354575B2 (ja) | 2014-12-25 | 2014-12-25 | 圧電素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6354575B2 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0254610A (ja) * | 1988-08-19 | 1990-02-23 | Murata Mfg Co Ltd | 圧電共振子及びその製造方法 |
WO2014017635A1 (ja) * | 2012-07-26 | 2014-01-30 | 株式会社村田製作所 | セラミック電子部品、及びセラミック電子部品の製造方法 |
JP5633549B2 (ja) * | 2012-10-11 | 2014-12-03 | Tdk株式会社 | 圧電素子 |
JP5949513B2 (ja) * | 2012-12-12 | 2016-07-06 | 王子ホールディングス株式会社 | 二軸延伸ポリオレフィンフィルム、該フィルムの製造方法、金属蒸着ポリオレフィンフィルムおよびフィルムコンデンサ |
JP6234709B2 (ja) * | 2013-05-29 | 2017-11-22 | 株式会社富士セラミックス | 圧電磁器組成物及びその製造方法 |
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2014
- 2014-12-25 JP JP2014261605A patent/JP6354575B2/ja active Active
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Publication number | Publication date |
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JP2016122725A (ja) | 2016-07-07 |
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