JP6265013B2 - 圧電素子 - Google Patents
圧電素子 Download PDFInfo
- Publication number
- JP6265013B2 JP6265013B2 JP2014075415A JP2014075415A JP6265013B2 JP 6265013 B2 JP6265013 B2 JP 6265013B2 JP 2014075415 A JP2014075415 A JP 2014075415A JP 2014075415 A JP2014075415 A JP 2014075415A JP 6265013 B2 JP6265013 B2 JP 6265013B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- pair
- piezoelectric element
- piezoelectric substrate
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 79
- 239000000919 ceramic Substances 0.000 claims description 17
- 235000014443 Pyrus communis Nutrition 0.000 claims description 8
- 239000013078 crystal Substances 0.000 description 44
- 230000010287 polarization Effects 0.000 description 35
- 239000000463 material Substances 0.000 description 20
- 238000006073 displacement reaction Methods 0.000 description 17
- 230000002269 spontaneous effect Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000005764 inhibitory process Effects 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 229910018487 Ni—Cr Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
Claims (2)
- 互いに対向する一対の主面を有し且つ圧電セラミックからなる圧電基板と、
前記一対の主面上に配置されている一対の電極と、を備え、
前記一対の主面は、自然面且つ梨地面であり、
前記一対の電極は、自然面且つ梨地面である前記主面に沿って前記主面上に形成されており、
前記一対の電極の各表面は、対応する前記主面の形状が反映された梨地面であることを特徴とする圧電素子。 - 前記一対の電極の厚さは、100nm〜400nmであることを特徴とする請求項1に記載の圧電素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014075415A JP6265013B2 (ja) | 2014-04-01 | 2014-04-01 | 圧電素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014075415A JP6265013B2 (ja) | 2014-04-01 | 2014-04-01 | 圧電素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015198161A JP2015198161A (ja) | 2015-11-09 |
JP6265013B2 true JP6265013B2 (ja) | 2018-01-24 |
Family
ID=54547687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014075415A Active JP6265013B2 (ja) | 2014-04-01 | 2014-04-01 | 圧電素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6265013B2 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0248953A (ja) * | 1988-05-13 | 1990-02-19 | Canon Inc | インクジェット記録ヘッドおよびその表面処理方法 |
JPH10296986A (ja) * | 1997-04-30 | 1998-11-10 | Canon Inc | インクジェット記録ヘッドの製造方法およびインクジェット記録ヘッド |
JP2008109072A (ja) * | 2006-09-26 | 2008-05-08 | Ngk Insulators Ltd | モノモルフ型圧電/電歪素子、及びその製造方法 |
JP2009279593A (ja) * | 2008-05-20 | 2009-12-03 | Seiko Epson Corp | パンチ |
CN104221174A (zh) * | 2012-07-26 | 2014-12-17 | 株式会社村田制作所 | 陶瓷电子部件以及陶瓷电子部件的制造方法 |
-
2014
- 2014-04-01 JP JP2014075415A patent/JP6265013B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2015198161A (ja) | 2015-11-09 |
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