JP6337172B2 - 長さ測定装置 - Google Patents
長さ測定装置 Download PDFInfo
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- JP6337172B2 JP6337172B2 JP2017074333A JP2017074333A JP6337172B2 JP 6337172 B2 JP6337172 B2 JP 6337172B2 JP 2017074333 A JP2017074333 A JP 2017074333A JP 2017074333 A JP2017074333 A JP 2017074333A JP 6337172 B2 JP6337172 B2 JP 6337172B2
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- Prior art keywords
- probe carriage
- elastic means
- measuring device
- length measuring
- rotary joint
- Prior art date
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- 239000000523 sample Substances 0.000 claims description 70
- 238000005259 measurement Methods 0.000 claims description 35
- 230000008878 coupling Effects 0.000 claims description 27
- 238000010168 coupling process Methods 0.000 claims description 27
- 238000005859 coupling reaction Methods 0.000 claims description 27
- 230000005484 gravity Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34753—Carriages; Driving or coupling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
測定方向において縦長に延在した支持体であって、当該支持体上に設けられたスケールを有する支持体と、
スケールの目盛りを走査するプローブキャリッジであって、少なくとも一つのガイド面上を測定方向において縦長に案内されているプローブキャリッジと、
連結部であって、当該連結部によって、プローブキャリッジが測定方向においては硬直的に且つそれとは交差する方向には柔軟に連行体(Mitnehmer)に連結されており、測定方向に延在する結合部材を有し、当該結合部材は、プローブキャリッジ側において第一の回転継手に回転自在に支持されており且つ連行体側において第一の回転継手に対して測定方向に隔てられた第二の回転継手に回転自在に支持されており、プローブキャリッジが少なくとも一つのガイド面に向けて押し付けられる連結部とを有し、
結合部材と連行体との間に第一の弾性手段が備えられており、当該第一の弾性手段がプローブキャリッジに押圧力を及ぼし且つ当該プローブキャリッジを少なくとも一つのガイド面に向けて押圧し、
結合部材とプローブキャリッジとの間に第二の弾性手段が備えられており、当該第二の弾性手段は、プローブキャリッジに押圧力を及ぼし且つ当該プローブキャリッジを少なくとも一つのガイド面に向けて押圧し、
第一の弾性手段は、第二の弾性手段から測定方向に隔てられて設けられている。
FF 弾性部材6又は7の弾性力
L 二つの弾性部材6,7の相互間隔
A 二つの回転継手51,52の相互間隔
Claims (8)
- −測定方向(X)において縦長に延在した支持体(4)であって、当該支持体上に設けられたスケール(1)を有する支持体、
−スケール(1)の目盛り(11)を走査するプローブキャリッジ(2)であって、少なくとも一つのガイド面(12,13)上を測定方向(X)において縦長に案内されているプローブキャリッジ(2)、
−連結部であって、当該連結部によって、プローブキャリッジ(2)が測定方向(X)においては硬直的に且つそれと交差する方向には柔軟に連行体(3)に連結されており、測定方向(X)に延在する結合部材(5)を有し、当該結合部材は、プローブキャリッジ(2)側において第一の回転継手(51)に回転自在に支持されており且つ連行体(3)側において第一の回転継手(51)に対して測定方向(X)に隔てられた第二の回転継手(52)に回転自在に支持されており、プローブキャリッジ(2)が少なくとも一つのガイド面(12,13)に向けて押し付けられる連結部、
を有する長さ測定装置において、
−結合部材(5)と連行体(3)との間の第一の弾性手段(6)であって、第一の位置においてプローブキャリッジ(2)に押圧力を及ぼし且つ当該プローブキャリッジを少なくとも一つのガイド面(12,13)に向けて押圧する第一の弾性手段、及び
−結合部材(5)とプローブキャリッジ(2)との間の第二の弾性手段(7)であって、第一の弾性手段(6)から測定方向(X)に隔てられて設けられており、第一の位置に対して測定方向(X)に隔てられた第二の位置においてプローブキャリッジ(2)に押圧力を及ぼし且つ当該プローブキャリッジを少なくとも一つのガイド面(12,13)に向けて押圧する第二の弾性手段を有することを特徴とする長さ測定装置。 - プローブキャリッジ(2)が、互いに垂直に延在する二つのガイド面(12,13)上で測定方向(X)において縦長に案内されている請求項1に記載の長さ測定装置。
- プローブキャリッジ(2)が、互いに垂直に延在するスケール(1)の二つのガイド面(12,13)上で測定方向(X)において縦長に案内されている請求項2に記載の長さ測定装置。
- 第一の回転継手(51)と第二の回転継手(52)は、それぞれ玉継手として構成されている請求項1から3のいずれか一項に記載の長さ測定装置。
- 第一の弾性手段(6)と第二の弾性手段(7)は、それぞれ押しバネである請求項1から4のいずれか一項に記載の長さ測定装置。
- 第一の弾性手段(6)と第二の弾性手段(7)は、プローブキャリッジ(2)上に生じる押圧力がプローブキャリッジ(2)の重心(S)にあるように配置され且つ構成されている請求項1から5のいずれか一項に記載の長さ測定装置。
- 第一の弾性手段(6)と第二の弾性手段(7)は、測定方向(X)に着目して、プローブキャリッジ(2)の重心(S)から等距離(L/2)のところに配置されている請求項1から6のいずれか一項に記載の長さ測定装置。
- 第一の回転継手(51)と第二の回転継手(52)は、測定方向(X)に着目して、プローブキャリッジ(2)の重心(S)から等距離(A/2)のところに配置されている請求項1から7のいずれか一項に記載の長さ測定装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16163847.3A EP3228993B1 (de) | 2016-04-05 | 2016-04-05 | Längenmesseinrichtung |
EP16163847.3 | 2016-04-05 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017187491A JP2017187491A (ja) | 2017-10-12 |
JP2017187491A5 JP2017187491A5 (ja) | 2018-04-19 |
JP6337172B2 true JP6337172B2 (ja) | 2018-06-06 |
Family
ID=55661330
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017074333A Active JP6337172B2 (ja) | 2016-04-05 | 2017-04-04 | 長さ測定装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10234277B2 (ja) |
EP (1) | EP3228993B1 (ja) |
JP (1) | JP6337172B2 (ja) |
CN (1) | CN107270799B (ja) |
ES (1) | ES2694043T3 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3293496B1 (de) * | 2016-09-12 | 2018-11-21 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung und verfahren zu deren montage |
DE102021200417B3 (de) | 2021-01-18 | 2022-04-28 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH609149A5 (ja) * | 1975-10-23 | 1979-02-15 | Heidenhain Gmbh Dr Johannes | |
DE2712421C2 (de) * | 1977-03-22 | 1982-06-24 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Gekapselte Längenmeßeinrichtung |
DE2712422C2 (de) * | 1977-03-22 | 1978-11-09 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längenmeßeinrichtung |
DE2714521A1 (de) * | 1977-04-01 | 1978-10-05 | Kolb Alfred | Vorrichtung zur exakten lagebestimmung von zwei gegeneinander geradlinig verschieblichen teilen |
DE2727769C2 (de) * | 1977-06-21 | 1979-01-25 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Gekapselte Längenmeßeinrichtung für große Meßlängen |
DE2810341C2 (de) * | 1978-03-10 | 1980-01-31 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längenmeßeinrichtung |
DE2820753C2 (de) * | 1978-05-12 | 1980-03-06 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Einrichtung zur Fehlerkorrektur bei Positionsmeßsystemen |
DE3208591C2 (de) * | 1982-03-10 | 1986-06-05 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Digitales elektrisches Längen- oder Winkelmeßsystem |
DE3210962A1 (de) * | 1982-03-25 | 1983-10-20 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Laengen- oder winkelmesssystem |
DE3216616C2 (de) * | 1982-05-04 | 1985-06-27 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Elektrisches Längen- oder Winkelmeßsystem |
US4549353A (en) | 1982-07-28 | 1985-10-29 | Mitutoyo Mfg. Co., Ltd. | Displacement measuring instrument |
JPS5920803A (ja) * | 1982-07-28 | 1984-02-02 | Mitsutoyo Mfg Co Ltd | 変位測定装置 |
DE3311118C2 (de) * | 1983-03-26 | 1986-04-17 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Gekapselte lichtelektrische Meßeinrichtung |
US4974332A (en) * | 1988-08-19 | 1990-12-04 | Delta International Machinery Corp. | Measurement system reader element standoff |
AT394110B (de) * | 1989-02-10 | 1992-02-10 | Rsf Elektronik Gmbh | Laengenmesssystem |
ES2110902B1 (es) * | 1995-07-18 | 1998-08-01 | Fagor S Coop | Dispositivo de fijacion de la escala en una regla optica. |
JP4434452B2 (ja) * | 2000-08-15 | 2010-03-17 | ソニーマニュファクチュアリングシステムズ株式会社 | 測尺装置 |
JP2003106833A (ja) * | 2001-09-28 | 2003-04-09 | Kawaguchiko Seimitsu Co Ltd | 測長機 |
DE502005005331D1 (de) * | 2005-06-08 | 2008-10-23 | Heidenhain Gmbh Dr Johannes | Geberelement eines Messsystems |
DE102007044128A1 (de) * | 2007-09-15 | 2009-03-19 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
JP6302623B2 (ja) * | 2013-04-05 | 2018-03-28 | ハイデンハイン株式会社 | リニアエンコーダ |
-
2016
- 2016-04-05 EP EP16163847.3A patent/EP3228993B1/de active Active
- 2016-04-05 ES ES16163847.3T patent/ES2694043T3/es active Active
-
2017
- 2017-03-29 CN CN201710195909.0A patent/CN107270799B/zh active Active
- 2017-04-04 US US15/478,250 patent/US10234277B2/en active Active
- 2017-04-04 JP JP2017074333A patent/JP6337172B2/ja active Active
Also Published As
Publication number | Publication date |
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US10234277B2 (en) | 2019-03-19 |
EP3228993A1 (de) | 2017-10-11 |
ES2694043T3 (es) | 2018-12-17 |
JP2017187491A (ja) | 2017-10-12 |
EP3228993B1 (de) | 2018-08-01 |
US20170284793A1 (en) | 2017-10-05 |
CN107270799B (zh) | 2018-09-18 |
CN107270799A (zh) | 2017-10-20 |
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