JP5484700B2 - 測長装置 - Google Patents
測長装置 Download PDFInfo
- Publication number
- JP5484700B2 JP5484700B2 JP2008232990A JP2008232990A JP5484700B2 JP 5484700 B2 JP5484700 B2 JP 5484700B2 JP 2008232990 A JP2008232990 A JP 2008232990A JP 2008232990 A JP2008232990 A JP 2008232990A JP 5484700 B2 JP5484700 B2 JP 5484700B2
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- JP
- Japan
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- length
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- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005259 measurement Methods 0.000 claims description 25
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000000463 material Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 241000669003 Aspidiotus destructor Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34753—Carriages; Driving or coupling means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
Description
この相対運動により、機械案内部と、測長装置内の走査キャリッジ10の案内部との間の案内誤差により引き起こされた状態で、第一連結部分141の平らな連結面F1において
第二連結部分142の丸く曲げられた連結面F2は滑動する。
13 帯行体
14 連結体
16 動力部材
20 スケール
21 測定目盛
141 第一連結部
142 第二連結部
201 案内面
202 案内面
F1 連結面
F2 連結面
P 接触部
X 測定方向
Claims (5)
- 二つの対象物の相対位置を測定するための測長装置であって、
−スケール(20)と、
−スケール(20)の目盛(21)を走査するための走査キャリッジ(10)と、
−連結体(14)とを備えており、
前記走査キャリッジ(10)が測長装置の案内面(201,202)において測定方向(
X)で縦方向に案内されており、
前記連結体を介して、走査キャリッジ(10)が測定方向(X)で硬く、かつこの測定方向(X)に対して横方向で帯行体(13)に可動に連結しており、この帯行体が両対象物の一つに固定可能であり、
この場合、連結体(14)が第一連結部(141)を走査キャリッジ(10)に接して備
えており、第二連結部(142)を帯行体(13)に接して備えており、第一連結部(1
41)の平坦な連結面(F1)が第二連結部(142)の球形に曲げられた連結面(F2)に点状に接触している測長装置において、
前記第二連結部(142)の球形に曲げられた連結面(F2)が、前記第一連結部(1
41)の平坦な連結面(F1)で滑動することにより、キャリッジの前記可動な連結が実現されていること、
−第二連結部(142)がセラミック材料でできていること、
−第二連結部(142)が帯行体(13)に不動に固定された物体であり、この物体が測定方向(X)に対して垂直に延在している接触面(F3)でもって帯行体(13)に支持されており、その際接触面(F3)が連結面(F2)から測定方向(X)に間隔をおいて設けられていること、
−第二連結部(142)の接触面(F3)が長さを測定方向(X)に対して垂直に有しており、この長さが点状の接触部(P)により設定された位置からスケール(20)への方向(+Z)ではスケール(20)から遠ざかる方向(−Z)での長さより何倍も短いことを特徴とする測長装置。 - セラミック材料が酸化ジルコニウムであることを特徴とする請求項1記載の測長装置。
- 第一連結部(141)の連結面(F1)が平面であり、この平面が測定方向(X)に対し
て垂直に延在していることを特徴とする請求項1または2に記載の測長装置。 - 動力部材(16)が設けられており、この動力部材が両連結部を接し合って押付けている
ことを特徴とする請求項1〜3のいずれか一つに記載の測長装置。 - 動力部材がバネ(16)であることを特徴とする請求項4記載の測長装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007044128A DE102007044128A1 (de) | 2007-09-15 | 2007-09-15 | Längenmesseinrichtung |
DE102007044128.4 | 2007-09-15 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009069154A JP2009069154A (ja) | 2009-04-02 |
JP2009069154A5 JP2009069154A5 (ja) | 2012-01-19 |
JP5484700B2 true JP5484700B2 (ja) | 2014-05-07 |
Family
ID=40193830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008232990A Active JP5484700B2 (ja) | 2007-09-15 | 2008-09-11 | 測長装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7856734B2 (ja) |
EP (1) | EP2037230B1 (ja) |
JP (1) | JP5484700B2 (ja) |
CN (1) | CN101387509B (ja) |
DE (1) | DE102007044128A1 (ja) |
ES (1) | ES2390113T3 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007033574A1 (de) * | 2007-07-19 | 2009-01-22 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
DE102009043293A1 (de) * | 2009-09-29 | 2011-03-31 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
DE102011007459B4 (de) * | 2011-04-15 | 2023-05-11 | Dr. Johannes Heidenhain Gmbh | Optische Längenmesseinrichtung |
CN102445133B (zh) * | 2011-09-26 | 2013-10-16 | 湖北三江航天红峰控制有限公司 | 部件运动状态下伸缩长度测量装置 |
JP2014196955A (ja) * | 2013-03-29 | 2014-10-16 | 株式会社ミツトヨ | 光電式エンコーダ |
ES2618855T3 (es) * | 2014-10-14 | 2017-06-22 | Dr. Johannes Heidenhain Gmbh | Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada |
EP3228993B1 (de) * | 2016-04-05 | 2018-08-01 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung |
EP3276310B1 (de) * | 2016-07-27 | 2018-09-19 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung |
EP3279615B1 (de) * | 2016-08-02 | 2018-10-17 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung |
EP3293496B1 (de) * | 2016-09-12 | 2018-11-21 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung und verfahren zu deren montage |
DE102021200417B3 (de) | 2021-01-18 | 2022-04-28 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2845542C2 (de) | 1978-10-19 | 1980-01-31 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längenmeßeinrichtung |
DE3201887C2 (de) * | 1982-01-22 | 1983-11-24 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längenmeßeinrichtung |
IT1190631B (it) * | 1986-04-22 | 1988-02-16 | G Giacomo Giacomello | Trasduttore per misure incrementali di precisione di grandezze lineari,con compensazione delle dilatazioni termiche del regolo di misura |
EP0348660B1 (de) * | 1988-06-29 | 1992-02-19 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
DE9006138U1 (de) | 1990-05-31 | 1990-08-02 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Positionsmeßeinrichtung |
JPH086704B2 (ja) * | 1990-09-12 | 1996-01-29 | ダイキン工業株式会社 | 摺動部構造及びオイルレス圧縮機の摺動部構造 |
JPH04132659A (ja) * | 1990-09-21 | 1992-05-06 | Brother Ind Ltd | 酸化クロム系複合焼結体 |
JP2002053371A (ja) * | 2000-08-08 | 2002-02-19 | Toshiba Corp | 導電性を有する酸化ジルコニウム焼結体およびそれを用いた摺動部材 |
JP4434452B2 (ja) * | 2000-08-15 | 2010-03-17 | ソニーマニュファクチュアリングシステムズ株式会社 | 測尺装置 |
DE10320991B4 (de) * | 2002-08-03 | 2017-10-19 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
DE10236381A1 (de) * | 2002-08-08 | 2004-02-19 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
JP4230810B2 (ja) * | 2003-04-24 | 2009-02-25 | 株式会社ミツトヨ | 測長装置 |
-
2007
- 2007-09-15 DE DE102007044128A patent/DE102007044128A1/de not_active Withdrawn
-
2008
- 2008-06-14 ES ES08010849T patent/ES2390113T3/es active Active
- 2008-06-14 EP EP08010849A patent/EP2037230B1/de active Active
- 2008-09-04 US US12/231,607 patent/US7856734B2/en active Active
- 2008-09-11 JP JP2008232990A patent/JP5484700B2/ja active Active
- 2008-09-12 CN CN200810215938XA patent/CN101387509B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
DE102007044128A1 (de) | 2009-03-19 |
JP2009069154A (ja) | 2009-04-02 |
CN101387509A (zh) | 2009-03-18 |
ES2390113T3 (es) | 2012-11-06 |
EP2037230A1 (de) | 2009-03-18 |
US7856734B2 (en) | 2010-12-28 |
US20090071025A1 (en) | 2009-03-19 |
EP2037230B1 (de) | 2012-08-22 |
CN101387509B (zh) | 2012-04-25 |
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