JP2019041105A - 門形構造の位置決め装置 - Google Patents
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
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- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/27—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an absolute digital measuring device
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- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/02—Assembly jigs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/046—Allowing translations adapted to upward-downward translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/2092—Undercarriages with or without wheels comprising means allowing depth adjustment, i.e. forward-backward translation of the head relatively to the undercarriage
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
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- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0015—Orientation; Alignment; Positioning
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
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- G05—CONTROLLING; REGULATING
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- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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Abstract
【解決手段】門形構造の位置決め装置は、第1横ビーム(FY1)に、機能要素(T)を有するY方向走行車(LY)が第2方向(Y)に可動に保持され、第2横ビーム(FY2)およびY方向走行車(LY)に、第2横ビーム(FY2)に対するY方向走行車(LY)の相対姿勢を検出するための位置測定装置が配置される。機能要素(T)がY方向走行車(LY)に対してZ方向走行車(LZ)により第3方向(Z)に可動に保持され、Y方向走行車(LY)および機能要素(T)に、Y方向走行車(LY)に対する機能要素(T)の相対姿勢を検出するための他の位置測定装置(AKxy2′、Mxy2′他)が配置される。
【選択図】図3
Description
第1横ビームおよび第2横ビームを第1方向に可動に保持する、ベース上に相互に平行に配置された2つの線形ガイドを有する門形構造の位置決め装置が開示され、この場合、第1横ビームに、機能要素を有するY方向走行車が第2方向に可動に保持され、この場合、Y方向走行車および第2横ビームに、第2横ビームに対するY方向走行車の相対姿勢を検出するための位置測定装置が配置されている。機能要素は、Y方向走行車に対して、Z方向走行車により第3方向に可動に保持され、この場合、Y方向走行車および機能要素に、Y方向走行車に対する機能要素の相対姿勢を検出するための他の位置測定装置が配置されている。
したがって、加工力がかからないように保持されかつ正確な位置測定を可能にする、移動される基準系の評価される考え方は、他の測定方向に拡張される。第2横ビームに対して固有の駆動装置が省略されることにより、従来技術に比較して構造がさらに簡単化され、かつ二重ガントリ配置もまた可能にされるようにコンパクトに形成可能である。
ここではベースGと剛に結合されている第2横ビームFY2の位置の決定のために、図3および4に示された尺度M1、M2の配置に対する変更により、これらの尺度M1、M2は、ベースG上に配置された、それ自身剛であったり温度に対して安定していたりする必要のない構造部品上に装着されていてもよい。この構造部品は、例えば、ウェーハまたは回路基板のような物体に対する操作システムであってもよい。尺度M1、M2がこの物体の平面上で構造部品に固定されているにも関わらず、FY2の位置は、構造部品の変形においても物体と共に動く尺度M1、M2に相対的に固定されるので、その正確な加工が可能である。
B1、B2 固定要素
FX1、FX2 線形ガイド
FY1、FY2 横ビーム
G ベース、花崗岩
LMX1、LMX2 リニアモータ
LMY 他のリニアモータ
LX1、LX2 X方向走行車
LY Y方向走行車
LZ Z方向走行車
M1、M2、MX1、MX2、Mxy、Mxy1、Mxy2、Mxy2′、MY、Mz 位置測定装置、尺度
S1、S2 装着面
T 機能要素、テーブル
V 剛結合
X 第1方向
Y 第2方向
Z 第3方向
Claims (13)
- 第1横ビーム(FY1)および第2横ビーム(FY2)を第1方向(X)に可動に保持する、ベース(G)上に相互に平行に配置された2つの線形ガイド(FX1、FX2)を有する門形構造の位置決め装置であって、この場合、第1横ビーム(FY1)に、機能要素(T)を有するY方向走行車(LY)が第2方向(Y)に可動に保持され、第2横ビーム(FY2)およびY方向走行車(LY)に、第2横ビーム(FY2)に対するY方向走行車(LY)の相対姿勢を検出するための位置測定装置(Mxy、Mz、AKz2、Mxy1、AKxy1)が配置されている門形構造の位置決め装置において、
機能要素(T)がY方向走行車(LY)に対してZ方向走行車(LZ)により第3方向(Z)に可動に保持され、この場合、Y方向走行車(LY)および機能要素(T)に、Y方向走行車(LY)に対する機能要素(T)の相対姿勢を検出するための他の位置測定装置(AKxy2、AKxy2′、Mxy2、Mxy2′)が配置されていることを特徴とする門形構造の位置決め装置。 - 他の位置測定装置(AKxy2、AKxy2′、Mxy2、Mxy2′)は、Y方向走行車(LY)に対する第1および第2方向(X、Y)における機能要素(T)の相対変位の検出を可能にすることを特徴とする請求項1に記載の位置決め装置。
- 他の位置測定装置(AKxy2、AKxy2′、Mxy2、Mxy2′)は、第3方向(Z)に対するそれぞれ1つの測定トラックおよび第1および/または第2方向(X、Y)に対する直線性トラックを有する、2つの1Dplus尺度(Mxy2、Mxy2′)を含み、この場合、1Dplus尺度(Mxy2、Mxy2′)にそれぞれ1つの走査ヘッド(AKxy2、AKxy2′)が設けられていることを特徴とする請求項2に記載の位置決め装置。
- 1Dplus尺度(Mxy2、Mxy2′)の直線性トラックは、第1方向のみならず第2方向(X、Y)にもある角度をなして切り取られ、これにより、機能要素(T)の変位は、両方の走査ヘッド(AKxy2、AKxy2′)の位置値の算出により決定可能であることを特徴とする請求項3に記載の位置決め装置。
- 走査ヘッド(AKxy2、AKxy2′)は剛結合(V)を介してY方向走行車(LY)と結合されていること、および1Dplus尺度(Mxy2、Mxy2′)は機能要素(T)に固定されていることを特徴とする請求項3または4に記載の位置決め装置。
- 剛結合(V)は、さらに、第2横ビーム(FY2)に対するY方向走行車(LY)の相対姿勢を検出するために、位置測定装置(Mxy1、AKxy1)の他の走査ヘッド(AKxy1)を支持することを特徴とする請求項5に記載の位置決め装置。
- 剛結合(V)は走査ヘッド(AKxy2、AKxy2′)のための装着面(S1、S2)を有し、この場合、装着面(S1、S2)は相互に90度の角度を形成することを特徴とする請求項5または6に記載の位置決め装置。
- 1Dplus尺度(Mxy2、Mxy2′)は、機能要素(T)において、第3方向(Z)の周りに相互に90度だけねじられて配置されていることを特徴とする請求項5−7のいずれかに記載の位置決め装置。
- 第2横ビーム(LY2)は2つの固定要素(B1、B2)を介して2つのX方向走行車(LX1、LX2)に固定されていることを特徴とする請求項1−8のいずれかに記載の位置決め装置。
- 固定要素(B1、B2)は、第2横ビーム(FY2)の重量を支持しかつ第1方向(X)内の第2横ビーム(FY2)の同伴を保証するが、第2横ビーム(FY2)内に曲げ力を導入しない可撓性要素を含むことを特徴とする請求項9に記載の位置決め装置。
- 第2横ビーム(FY2)は、第3方向(Z)に関して、第1横ビーム(FY1)、Y方向走行車(LZ)、Z方向走行車(LZ)および機能要素(T)からなる複合体の下方でかつベース(G)の上方に配置されていることを特徴とする請求項1−10のいずれかに記載の位置決め装置。
- 剛結合(V)は、ベース(G)と第2横ビーム(FY2)の間で伸長することを特徴とする請求項11に記載の位置決め装置。
- 姿勢測定装置は、絶対基準系に対する第2横ビーム(FY2)の相対姿勢の検出を可能にし、これにより、第2横ビーム(FY2)は、絶対基準系に対するY方向走行車(LY)の相対空間姿勢の決定における可動基準系として使用されることを特徴とする請求項1−12のいずれかに記載の位置決め装置。
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EP17187633.7A EP3448140B1 (de) | 2017-08-24 | 2017-08-24 | Positioniereinrichtung in portalbauweise |
EP17187633.7 | 2017-08-24 |
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JP7154879B2 JP7154879B2 (ja) | 2022-10-18 |
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KR (1) | KR102649529B1 (ja) |
CN (1) | CN109421003B (ja) |
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US11130223B2 (en) * | 2017-10-30 | 2021-09-28 | Pearson Packaging Systems | Base for a robotic arm |
EP3670067B1 (de) * | 2018-12-20 | 2022-07-27 | Etel S.A. | Positioniereinrichtung in portalbauweise |
US11815153B2 (en) * | 2019-03-08 | 2023-11-14 | Calient Technologies, Inc. | Passive motion isolation system |
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US20150280529A1 (en) * | 2014-03-25 | 2015-10-01 | Etel S.A. | Positioning Device in Gantry Type of Construction |
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EP3448140B1 (de) | 2021-12-08 |
US11408554B2 (en) | 2022-08-09 |
KR20190022318A (ko) | 2019-03-06 |
CN109421003A (zh) | 2019-03-05 |
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KR102649529B1 (ko) | 2024-03-21 |
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