JP6327367B2 - 基板移載システム - Google Patents
基板移載システム Download PDFInfo
- Publication number
- JP6327367B2 JP6327367B2 JP2016570432A JP2016570432A JP6327367B2 JP 6327367 B2 JP6327367 B2 JP 6327367B2 JP 2016570432 A JP2016570432 A JP 2016570432A JP 2016570432 A JP2016570432 A JP 2016570432A JP 6327367 B2 JP6327367 B2 JP 6327367B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- suction
- vacuum
- transfer system
- suction pads
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Description
図1では、吸着パッド10の吸着面に突起部102が円環形状に形成される例を示した。しかし、突起部102の形状は、基板100と接触する上面の面積が小さければどのような形状であってもよい。
上記のように、本発明は実施形態によって記載したが、この開示の一部をなす論述及び図面はこの発明を限定するものであると理解すべきではない。この開示から当業者には様々な代替実施形態、実施例及び運用技術が明らかとなろう。
Claims (5)
- 真空吸着によって基板を保持する基板移載システムであって、
真空孔及び該真空孔の周囲を囲む突起部が形成された吸着面をそれぞれ有し、前記基板の互いに離間した位置にそれぞれの前記突起部の上面が接触する複数の吸着パッドと、
前記複数の吸着パッドを支持するアーム部と、
前記複数の吸着パッドの前記真空孔とそれぞれ真空経路を介して接続され、前記真空経路の内部を周囲よりも負圧にする真空装置と
を備え、
前記突起部が前記吸着面に2個の環形状体を二重に配置して構成され、
前記2個の環形状体に挟まれた領域に前記真空孔が形成され、
前記基板の全面に分散する複数の箇所にそれぞれが接触する前記複数の吸着パッドのすべてに前記基板を真空吸着させることを特徴とする基板移載システム。 - 前記基板の表面に対向してマトリクス状に配置された4個の前記吸着パッドを備え、
前記吸着パッド間の中心位置が前記基板の表面の中心位置と対向するように前記吸着パッドが配置されていることを特徴とする請求項1に記載の基板移載システム。 - 前記複数の吸着パッドが装着されたベースプレートを更に備え、
前記アーム部が前記ベースプレートを支持することを特徴とする請求項1に記載の基板移載システム。 - 前記吸着パッドが、セラミックよりも硬度の低い材料からなることを特徴とする請求項1に記載の基板移載システム。
- 前記吸着パッドの材料が、カーボン又はポリエーテルエーテルケトンであることを特徴とする請求項4に記載の基板移載システム。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2015/051712 WO2016117095A1 (ja) | 2015-01-22 | 2015-01-22 | 基板移載システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016117095A1 JPWO2016117095A1 (ja) | 2017-06-15 |
JP6327367B2 true JP6327367B2 (ja) | 2018-05-23 |
Family
ID=56416660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016570432A Expired - Fee Related JP6327367B2 (ja) | 2015-01-22 | 2015-01-22 | 基板移載システム |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6327367B2 (ja) |
CN (1) | CN107210253A (ja) |
WO (1) | WO2016117095A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7006554B2 (ja) * | 2018-09-26 | 2022-01-24 | 株式会社島津製作所 | 試料搬送装置 |
TW202342252A (zh) * | 2022-01-12 | 2023-11-01 | 日商東京威力科創股份有限公司 | 搬送臂及基板搬送裝置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2837332B2 (ja) * | 1993-02-26 | 1998-12-16 | 東京エレクトロン株式会社 | 搬送アーム |
JPH08236597A (ja) * | 1995-02-27 | 1996-09-13 | Hitachi Ltd | 移載装置 |
US20050110292A1 (en) * | 2002-11-26 | 2005-05-26 | Axcelis Technologies, Inc. | Ceramic end effector for micro circuit manufacturing |
US7181132B2 (en) * | 2003-08-20 | 2007-02-20 | Asm International N.V. | Method and system for loading substrate supports into a substrate holder |
JP2006027795A (ja) * | 2004-07-14 | 2006-02-02 | Toshiba Corp | 吸着装置、ならびに板状部材の搬送方法、液晶表示装置の製造方法 |
JP2008130800A (ja) * | 2006-11-21 | 2008-06-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2014072321A (ja) * | 2012-09-28 | 2014-04-21 | Hitachi High-Technologies Corp | 板状体保持機構、基板貼り合わせ装置及び基板貼り合わせ方法 |
-
2015
- 2015-01-22 WO PCT/JP2015/051712 patent/WO2016117095A1/ja active Application Filing
- 2015-01-22 CN CN201580058301.2A patent/CN107210253A/zh active Pending
- 2015-01-22 JP JP2016570432A patent/JP6327367B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2016117095A1 (ja) | 2016-07-28 |
JPWO2016117095A1 (ja) | 2017-06-15 |
CN107210253A (zh) | 2017-09-26 |
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