CN107210253A - 基板移载系统 - Google Patents

基板移载系统 Download PDF

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Publication number
CN107210253A
CN107210253A CN201580058301.2A CN201580058301A CN107210253A CN 107210253 A CN107210253 A CN 107210253A CN 201580058301 A CN201580058301 A CN 201580058301A CN 107210253 A CN107210253 A CN 107210253A
Authority
CN
China
Prior art keywords
substrate
absorption layer
transfer system
substrate transfer
jut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201580058301.2A
Other languages
English (en)
Chinese (zh)
Inventor
森元阳介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN107210253A publication Critical patent/CN107210253A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
CN201580058301.2A 2015-01-22 2015-01-22 基板移载系统 Pending CN107210253A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2015/051712 WO2016117095A1 (ja) 2015-01-22 2015-01-22 基板移載システム

Publications (1)

Publication Number Publication Date
CN107210253A true CN107210253A (zh) 2017-09-26

Family

ID=56416660

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580058301.2A Pending CN107210253A (zh) 2015-01-22 2015-01-22 基板移载系统

Country Status (3)

Country Link
JP (1) JP6327367B2 (ja)
CN (1) CN107210253A (ja)
WO (1) WO2016117095A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110954633A (zh) * 2018-09-26 2020-04-03 株式会社岛津制作所 试样搬送装置
CN113396485A (zh) * 2019-02-12 2021-09-14 信越化学工业株式会社 微小构造体移载装置、模板头单元、微小构造体移载用模板部件及微小构造体集成部件的移载方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202342252A (zh) * 2022-01-12 2023-11-01 日商東京威力科創股份有限公司 搬送臂及基板搬送裝置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08236597A (ja) * 1995-02-27 1996-09-13 Hitachi Ltd 移載装置
US20050062465A1 (en) * 2003-08-20 2005-03-24 De Ridder Christianus Gerardus Maria Method and system for loading substrate supports into a substrate holder
US20050110292A1 (en) * 2002-11-26 2005-05-26 Axcelis Technologies, Inc. Ceramic end effector for micro circuit manufacturing
JP2006027795A (ja) * 2004-07-14 2006-02-02 Toshiba Corp 吸着装置、ならびに板状部材の搬送方法、液晶表示装置の製造方法
CN103715125A (zh) * 2012-09-28 2014-04-09 株式会社日立高新技术 板状体保持机构、基板贴合装置以及基板贴合方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2837332B2 (ja) * 1993-02-26 1998-12-16 東京エレクトロン株式会社 搬送アーム
JP2008130800A (ja) * 2006-11-21 2008-06-05 Dainippon Screen Mfg Co Ltd 基板処理装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08236597A (ja) * 1995-02-27 1996-09-13 Hitachi Ltd 移載装置
US20050110292A1 (en) * 2002-11-26 2005-05-26 Axcelis Technologies, Inc. Ceramic end effector for micro circuit manufacturing
US20050062465A1 (en) * 2003-08-20 2005-03-24 De Ridder Christianus Gerardus Maria Method and system for loading substrate supports into a substrate holder
JP2006027795A (ja) * 2004-07-14 2006-02-02 Toshiba Corp 吸着装置、ならびに板状部材の搬送方法、液晶表示装置の製造方法
CN103715125A (zh) * 2012-09-28 2014-04-09 株式会社日立高新技术 板状体保持机构、基板贴合装置以及基板贴合方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110954633A (zh) * 2018-09-26 2020-04-03 株式会社岛津制作所 试样搬送装置
CN113396485A (zh) * 2019-02-12 2021-09-14 信越化学工业株式会社 微小构造体移载装置、模板头单元、微小构造体移载用模板部件及微小构造体集成部件的移载方法

Also Published As

Publication number Publication date
WO2016117095A1 (ja) 2016-07-28
JPWO2016117095A1 (ja) 2017-06-15
JP6327367B2 (ja) 2018-05-23

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Application publication date: 20170926