JP6312884B2 - トランジスタセルおよび補償構造体を含む広バンドギャップ半導体デバイス - Google Patents
トランジスタセルおよび補償構造体を含む広バンドギャップ半導体デバイス Download PDFInfo
- Publication number
- JP6312884B2 JP6312884B2 JP2017043929A JP2017043929A JP6312884B2 JP 6312884 B2 JP6312884 B2 JP 6312884B2 JP 2017043929 A JP2017043929 A JP 2017043929A JP 2017043929 A JP2017043929 A JP 2017043929A JP 6312884 B2 JP6312884 B2 JP 6312884B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- gate
- doped region
- drain
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 106
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 31
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 31
- 239000010410 layer Substances 0.000 claims description 20
- 239000011229 interlayer Substances 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 2
- 230000008859 change Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 230000006870 function Effects 0.000 description 9
- 239000013078 crystal Substances 0.000 description 7
- 230000007480 spreading Effects 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000002019 doping agent Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000008186 active pharmaceutical agent Substances 0.000 description 4
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 210000000746 body region Anatomy 0.000 description 4
- 230000005669 field effect Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000011135 tin Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910016570 AlCu Inorganic materials 0.000 description 1
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229940104869 fluorosilicate Drugs 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- -1 silicon carbide metal oxide Chemical class 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0688—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions characterised by the particular shape of a junction between semiconductor regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0878—Impurity concentration or distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0886—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41741—Source or drain electrodes for field effect devices for vertical or pseudo-vertical devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
- H01L29/7804—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode
- H01L29/7805—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode in antiparallel, e.g. freewheel diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/14—Modifications for compensating variations of physical values, e.g. of temperature
- H03K17/145—Modifications for compensating variations of physical values, e.g. of temperature in field-effect transistor switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/8213—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using SiC technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
- H01L27/0211—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique adapted for requirements of temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
- H01L27/0705—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type
- H01L27/0727—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with diodes, or capacitors or resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/4238—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the surface lay-out
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
101 第1の表面
102 第2の表面
103 外表面
110 ソース区域
115 本体区域
116 ダイオード領域
120 ドレイン構造体
121 低濃度ドープドリフト区域
125 電流波及区域
129 高濃度ドープコンタクト層
150 トレンチゲート構造体
151 ゲート誘電体
155 ゲート電極
170 メサ区分
180 ドープ領域
210 層間絶縁膜
310 ソース電極
315 第1のコンタクト構造体
316 第2のコンタクト構造体
320 ドレイン電極
330 ゲート金属
331 ゲートパッド
332 ゲートランナ
335 ゲートコンタクト
341 金属含有界面層
342 主層
440 キャパシタンスフリートランジスタ
450 補償構造体
451 第1の容量性構造体
452 第2の容量性構造体
455 接続ノード
456 サーミスタ構造体
500 半導体デバイス
510 トランジスタセル配列
610 価電子帯
615 バンドギャップ
620 伝導帯
Cgd キャパシタンス
Cgs キャパシタンス
D ドレイン端子
Dit 界面準位密度
EC 下縁部
EV 上縁部
G ゲート端子
Q1 ゲート電荷
Qcmp 補償電荷
Qg ゲート電荷
Qgd ミラー電荷
Qth 閾値電圧電荷
S ソース端子
T1 温度
T2 温度
T3 温度
TC トランジスタセル
Tx 温度
Ty 温度
V1 ソース間電圧
VDS ソース間電圧
Vth 閾値電圧
pn1 第1のpn接合
pn2 第2のpn接合
pn3 第3のpn接合
pnx pn接合
Claims (19)
- 広バンドギャップ材料からできた半導体部分(100)内に形成され、かつゲート端子(G)、ソース端子(S)およびドレイン端子(D)に電気接続されたトランジスタセル(TC)と、
前記ゲート端子(G)、ならびに前記ソース端子(S)および前記ドレイン端子(D)のうちの少なくとも一方と電気接続された補償構造体(450)であって、前記補償構造体(450)の実効キャパシタンスが、前記トランジスタセル(TC)のゲート−ドレイン間キャパシタンスとゲート−ソース間キャパシタンスとの比の温度係数を少なくとも部分的に補償する温度係数を有する、補償構造体(450)と
を備える半導体デバイス。 - 前記補償構造体(450)が、前記ドレイン端子(D)と前記ゲート端子(G)との間で有効な第1のキャパシタンスを有する第1の容量性構造体(451)を備え、前記第1のキャパシタンスが負の温度係数を有する、請求項1に記載の半導体デバイス。
- 前記補償構造体(450)が、前記ゲート端子(G)と前記ソース端子(S)との間で有効なキャパシタンスを有する第2の容量性構造体(452)を含み、前記キャパシタンスが正の温度係数を有する、請求項1または2に記載の半導体デバイス。
- 前記補償構造体(450)が、(i)前記ゲート端子(G)と前記ドレイン端子(D)との間の第1の容量性構造体(451)および第2の容量性構造体(452)の直列接続、ならびに(ii)前記ソース端子(S)と、前記第1の容量性構造体(451)と前記第2の容量性構造体(452)との間の接続ノード(455)との間に負の温度係数を有するサーミスタ構造体(456)を備える、請求項1〜3のいずれか一項に記載の半導体デバイス。
- 前記サーミスタ構造体(456)が前記半導体部分(100)内のドープ領域(180)を備える、請求項4に記載の半導体デバイス。
- 前記ドープ領域(180)が少なくとも5E17cm−3の濃度におけるアルミニウムを含有する、請求項5に記載の半導体デバイス。
- 層間絶縁膜(210)を貫いて延在し、かつソース電極(310)を前記ドープ領域(180)と電気接続するコンタクト構造体(316)であって、前記層間絶縁膜が前記ソース電極(310)と前記半導体部分(100)とを分離する、コンタクト構造体(316)をさらに備える、請求項5または6に記載の半導体デバイス。
- 前記第1の容量性構造体(451)の第1の電極が、層間絶縁膜(210)の一部分によって前記半導体部分(100)から分離されたゲート金属(330)の一部分である、請求項5〜7のいずれか一項に記載の半導体デバイス。
- ゲートパッド(331)が前記第1の容量性構造体(451)の前記第1の電極を形成する、請求項8に記載の半導体デバイス。
- 前記ドープ領域(180)が、前記第1の容量性構造体(451)の第2の電極、前記接続ノード(455)、および前記第2の容量性構造体(452)の第1の電極を形成する、請求項5〜9のいずれか一項に記載の半導体デバイス。
- 前記半導体部分(100)内のドレイン構造体(120)をさらに備え、前記ドレイン構造体(120)が前記トランジスタセル(TC)をドレイン電極(320)と電気接続し、前記ドレイン構造体(120)が前記ドープ領域(180)とのpn接合(pnx)を形成し、かつ前記第2の容量性構造体(452)の第2の電極を形成する、請求項5〜10のいずれか一項に記載の半導体デバイス。
- 炭化ケイ素からできた半導体部分(100)内のトランジスタセル(TC)であって、ゲート金属(330)、ソース電極(310)およびドレイン電極(320)に電気接続されている、トランジスタセル(TC)と、
前記半導体部分(100)内のドープ領域(180)であって、前記ソース電極(310)に電気接続され、および前記ドープ領域(180)の抵抗が負の温度係数を有する、ドープ領域(180)と、
前記ゲート金属(330)を前記ドープ領域(180)から分離する層間絶縁膜(210)と、
前記半導体部分(100)内のドレイン構造体(120)であって、前記トランジスタセル(TC)を前記ドレイン電極(320)と電気接続し、かつ前記ドープ領域(180)とのpn接合(pnx)を形成する、ドレイン構造体(120)と
を備える半導体デバイス。 - 前記ドープ領域(180)が少なくとも5E17cm−3の濃度におけるアルミニウムを含有する、請求項12に記載の半導体デバイス。
- 前記層間絶縁膜(210)を貫いて延在し、かつ前記ソース電極(310)および前記ドープ領域(180)に直接隣接するコンタクト構造体(316)をさらに備える、請求項12または13に記載の半導体デバイス。
- 前記コンタクト構造体(316)のうちの2つが前記ゲート金属の反対側に配置されている、請求項14に記載の半導体デバイス。
- 前記ゲート金属(330)がゲートパッド(331)を備える、請求項12〜15のいずれか一項に記載の半導体デバイス。
- 前記ドープ領域(180)が少なくとも100μmの最小活性水平延長を有する、請求項12〜16のいずれか一項に記載の半導体デバイス。
- 前記ドープ領域(180)が前記半導体部分(100)の第1の表面(101)に直接隣接する、請求項12〜17のいずれか一項に記載の半導体デバイス。
- 前記ドレイン構造体(120)が、高濃度ドープコンタクト層(129)、および前記ドープ領域(180)との前記pn接合(pnx)を形成し、かつ前記ドープ領域(180)を前記コンタクト層(129)から分離する低濃度ドープドリフト区域(121)を含む、請求項12〜18のいずれか一項に記載の半導体デバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016104256.0A DE102016104256B3 (de) | 2016-03-09 | 2016-03-09 | Transistorzellen und Kompensationsstruktur aufweisende Halbleitervorrichtung mit breitem Bandabstand |
DE102016104256.0 | 2016-03-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017168834A JP2017168834A (ja) | 2017-09-21 |
JP6312884B2 true JP6312884B2 (ja) | 2018-04-18 |
Family
ID=59069322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017043929A Active JP6312884B2 (ja) | 2016-03-09 | 2017-03-08 | トランジスタセルおよび補償構造体を含む広バンドギャップ半導体デバイス |
Country Status (4)
Country | Link |
---|---|
US (2) | US20170263712A1 (ja) |
JP (1) | JP6312884B2 (ja) |
CN (1) | CN107180872B (ja) |
DE (1) | DE102016104256B3 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3261129B1 (fr) * | 2016-04-15 | 2020-05-06 | STMicroelectronics (Tours) SAS | Structure de diode |
DE102017122634A1 (de) * | 2017-09-28 | 2019-03-28 | Infineon Technologies Ag | Siliziumcarbid-Halbleitervorrichtung mit Graben-Gatestruktur und vertikalem Pn-Übergang zwischen einem Bodygebiet und einer Driftstruktur |
DE102018103550B4 (de) * | 2018-02-16 | 2021-08-12 | Infineon Technologies Ag | Halbleitervorrichtung mit einem halbleiterkörper aus siliziumcarbid |
DE102018106689B4 (de) * | 2018-03-21 | 2020-10-15 | Infineon Technologies Ag | Siliziumcarbid-Halbleitervorrichtung mit einer Graben-Gatestruktur und horizontal angeordneten Kanal- und Stromausbreitungsgebieten |
JP2019169579A (ja) * | 2018-03-23 | 2019-10-03 | 株式会社東芝 | 半導体装置及びその製造方法 |
CN108493239A (zh) * | 2018-03-28 | 2018-09-04 | 珠海格力电器股份有限公司 | 绝缘栅双极型晶体管器件及其制作方法、电力电子设备 |
IT201800007780A1 (it) * | 2018-08-02 | 2020-02-02 | St Microelectronics Srl | Dispositivo mosfet in carburo di silicio e relativo metodo di fabbricazione |
DE102018216998B4 (de) * | 2018-10-04 | 2023-01-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Leistungsmodul mit unipolarem Halbleiterbauelement für hohe Lebensdauer |
DE102018127797B4 (de) * | 2018-11-07 | 2022-08-04 | Infineon Technologies Ag | Einen siliziumcarbid-körper enthaltende halbleitervorrichtung |
IT201900006709A1 (it) * | 2019-05-10 | 2020-11-10 | St Microelectronics Srl | Dispositivo mosfet di potenza a super giunzione con affidabilita' migliorata, e metodo di fabbricazione |
US11579030B2 (en) | 2020-06-18 | 2023-02-14 | Cirrus Logic, Inc. | Baseline estimation for sensor system |
US11835410B2 (en) | 2020-06-25 | 2023-12-05 | Cirrus Logic Inc. | Determination of resonant frequency and quality factor for a sensor system |
US11869762B2 (en) | 2020-10-13 | 2024-01-09 | Alpha Power Solutions Limited | Semiconductor device with temperature sensing component |
EP4040500A1 (en) * | 2021-02-04 | 2022-08-10 | Infineon Technologies AG | Transistor device and method of manufacturing |
JP7512951B2 (ja) | 2021-05-19 | 2024-07-09 | 株式会社デンソー | 信号検出回路 |
Family Cites Families (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3757245A (en) * | 1972-06-02 | 1973-09-04 | Western Electric Co | Temperature compensated field effect transistor crystal oscillator |
JPS61125208A (ja) * | 1984-11-21 | 1986-06-12 | Alps Electric Co Ltd | 温度補償型水晶発振回路 |
JPH03175814A (ja) * | 1989-12-05 | 1991-07-30 | Mitsubishi Electric Corp | Cr積分回路 |
JP3287173B2 (ja) * | 1995-04-07 | 2002-05-27 | 三菱電機株式会社 | 赤外線検出素子 |
GB9513420D0 (en) * | 1995-06-30 | 1995-09-06 | Philips Electronics Uk Ltd | Power semiconductor devices |
DE19526902A1 (de) * | 1995-07-22 | 1997-01-23 | Bosch Gmbh Robert | Monolithisch integrierte planare Halbleiteranordnung |
JP2002231721A (ja) * | 2001-02-06 | 2002-08-16 | Mitsubishi Electric Corp | 半導体装置 |
JP2004014547A (ja) * | 2002-06-03 | 2004-01-15 | Toshiba Corp | 半導体装置及び容量調節回路 |
JP2005166930A (ja) * | 2003-12-02 | 2005-06-23 | Matsushita Electric Ind Co Ltd | SiC−MISFET及びその製造方法 |
DE10361714B4 (de) * | 2003-12-30 | 2009-06-10 | Infineon Technologies Ag | Halbleiterbauelement |
DE102006005033B4 (de) * | 2006-02-03 | 2013-12-05 | Infineon Technologies Ag | Halbleiterbauelementanordnung mit einem Leistungstransistor und einer Temperaturmessanordnung |
KR100825760B1 (ko) * | 2006-06-02 | 2008-04-29 | 한국전자통신연구원 | 급격한 mit 소자, 그 소자를 이용한 mit 센서 및 그mit 센서를 포함한 경보기 및 이차전지 폭발 방지 회로 |
KR100821127B1 (ko) * | 2006-09-28 | 2008-04-14 | 한국전자통신연구원 | 열전대를 구비하는 고전력 소자 및 그 제조방법 |
DE102007001107B4 (de) * | 2007-01-04 | 2009-06-10 | Infineon Technologies Ag | Schaltungsanordnung mit einem Leistungstransistor und mit dessen Ansteuerschaltung |
DE102007020657B4 (de) * | 2007-04-30 | 2012-10-04 | Infineon Technologies Austria Ag | Halbleiterbauelement mit einem Halbleiterkörper und Verfahren zur Herstellung desselben |
JP5221976B2 (ja) * | 2008-02-19 | 2013-06-26 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
US8203181B2 (en) * | 2008-09-30 | 2012-06-19 | Infineon Technologies Austria Ag | Trench MOSFET semiconductor device and manufacturing method therefor |
US8420987B2 (en) * | 2008-11-18 | 2013-04-16 | Electronics And Telecommunications Research Institute | Thermistor with 3 terminals, thermistor-transistor, circuit for controlling heat of power transistor using the thermistor-transistor, and power system including the circuit |
US8004806B2 (en) * | 2009-05-04 | 2011-08-23 | United Silicon Carbide, Inc. | Solid-state disconnect device |
US7990749B2 (en) * | 2009-06-08 | 2011-08-02 | Radiant Technology, Inc. | Variable impedance circuit controlled by a ferroelectric capacitor |
JP2011066139A (ja) * | 2009-09-16 | 2011-03-31 | Sanken Electric Co Ltd | 複合半導体装置 |
DE102011007271B4 (de) * | 2010-04-19 | 2022-08-11 | Electronics And Telecommunications Research Institute | Feldeffekttransistor mit variablem Gate |
US8946850B2 (en) * | 2011-12-06 | 2015-02-03 | Infineon Technologies Austria Ag | Integrated circuit including a power transistor and an auxiliary transistor |
DE102012224348A1 (de) * | 2012-06-25 | 2014-01-02 | Osram Gmbh | Beleuchtungsanlage mit einer Schnittstelle aufweisend ein Netzgerät und mindestens ein Lichtquellenmodul |
US20140177304A1 (en) * | 2012-12-24 | 2014-06-26 | Laurence P. Sadwick | Constant Current Source |
US9515145B2 (en) | 2013-02-28 | 2016-12-06 | Mitsubishi Electric Corporation | Vertical MOSFET device with steady on-resistance |
JP2016516303A (ja) * | 2013-03-13 | 2016-06-02 | ディー スリー セミコンダクター エルエルシー | 縦型電界効果素子の温度補償のための素子構造および方法 |
US10211304B2 (en) * | 2013-12-04 | 2019-02-19 | General Electric Company | Semiconductor device having gate trench in JFET region |
JP6157338B2 (ja) * | 2013-12-11 | 2017-07-05 | 三菱電機株式会社 | 半導体装置 |
US9553179B2 (en) * | 2014-01-31 | 2017-01-24 | Infineon Technologies Ag | Semiconductor device and insulated gate bipolar transistor with barrier structure |
US9513318B2 (en) * | 2014-05-29 | 2016-12-06 | Infineon Technologies Ag | Current or voltage sensing |
US9871126B2 (en) * | 2014-06-16 | 2018-01-16 | Infineon Technologies Ag | Discrete semiconductor transistor |
DE102014117954B4 (de) * | 2014-12-05 | 2020-09-24 | Infineon Technologies Ag | Halbleitervorrichtungen mit Transistorzellen und thermoresistivem Element |
WO2016113938A1 (ja) * | 2015-01-14 | 2016-07-21 | 三菱電機株式会社 | 半導体装置及び半導体装置の製造方法 |
DE102016103623B4 (de) * | 2015-03-02 | 2023-05-17 | Epistar Corporation | LED-Treiber |
DE102015112919B4 (de) * | 2015-08-06 | 2019-12-24 | Infineon Technologies Ag | Halbleiterbauelemente, eine Halbleiterdiode und ein Verfahren zum Bilden eines Halbleiterbauelements |
DE102016120292A1 (de) * | 2016-10-25 | 2018-04-26 | Infineon Technologies Ag | Halbleitervorrichtung, die eine Transistorvorrichtung enthält |
-
2016
- 2016-03-09 DE DE102016104256.0A patent/DE102016104256B3/de active Active
-
2017
- 2017-03-07 CN CN201710131889.0A patent/CN107180872B/zh active Active
- 2017-03-08 JP JP2017043929A patent/JP6312884B2/ja active Active
- 2017-03-08 US US15/453,322 patent/US20170263712A1/en not_active Abandoned
-
2019
- 2019-06-14 US US16/442,022 patent/US10811499B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN107180872A (zh) | 2017-09-19 |
US20200006495A1 (en) | 2020-01-02 |
US10811499B2 (en) | 2020-10-20 |
DE102016104256B3 (de) | 2017-07-06 |
JP2017168834A (ja) | 2017-09-21 |
US20170263712A1 (en) | 2017-09-14 |
CN107180872B (zh) | 2020-11-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6312884B2 (ja) | トランジスタセルおよび補償構造体を含む広バンドギャップ半導体デバイス | |
US10211306B2 (en) | Semiconductor device with diode region and trench gate structure | |
US9960243B2 (en) | Semiconductor device with stripe-shaped trench gate structures and gate connector structure | |
US20160190301A1 (en) | Semiconductor Device with Stripe-Shaped Trench Gate Structures, Transistor Mesas and Diode Mesas | |
CN111162127B (zh) | 包括碳化硅本体的半导体器件和制造方法 | |
WO2015008385A1 (ja) | パワーモジュール | |
CN112582394B (zh) | 开关速度可调的igbt与超结mosfet组合器件 | |
JPWO2019077877A1 (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
JP7486571B2 (ja) | 炭化珪素トランジスタデバイス | |
US11810912B2 (en) | Semiconductor devices having asymmetric integrated gate resistors for balanced turn-on/turn-off behavior | |
US20140077255A1 (en) | Semiconductor device | |
US7642596B2 (en) | Insulated gate field effect transistor | |
CN112582395B (zh) | 改良igbt的轻负荷效率 | |
US9041097B2 (en) | Semiconductor device | |
JP7516236B2 (ja) | 半導体装置 | |
CN113053992B (zh) | 一种碳化硅mosfet器件的元胞结构及功率半导体器件 | |
JP2022094676A (ja) | 半導体装置 | |
DE102016015738A1 (de) | Transistorzellen und Kompensationsstruktur aufweisende Halbleitervorrichtung mit breitem Bandabstand |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180209 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180220 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180320 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6312884 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |