JP6295611B2 - 振動子、発振器、電子機器、および移動体 - Google Patents

振動子、発振器、電子機器、および移動体 Download PDF

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Publication number
JP6295611B2
JP6295611B2 JP2013229054A JP2013229054A JP6295611B2 JP 6295611 B2 JP6295611 B2 JP 6295611B2 JP 2013229054 A JP2013229054 A JP 2013229054A JP 2013229054 A JP2013229054 A JP 2013229054A JP 6295611 B2 JP6295611 B2 JP 6295611B2
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Japan
Prior art keywords
vibrator
vibration element
vibration
substrate
axis
Prior art date
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Expired - Fee Related
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JP2013229054A
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English (en)
Japanese (ja)
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JP2015090988A (ja
JP2015090988A5 (enExample
Inventor
内藤　松太郎
松太郎 内藤
近藤　学
学 近藤
健作 磯畑
健作 磯畑
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to JP2013229054A priority Critical patent/JP6295611B2/ja
Priority to CN201410588750.5A priority patent/CN104617909B/zh
Priority to US14/532,444 priority patent/US9344056B2/en
Publication of JP2015090988A publication Critical patent/JP2015090988A/ja
Publication of JP2015090988A5 publication Critical patent/JP2015090988A5/ja
Application granted granted Critical
Publication of JP6295611B2 publication Critical patent/JP6295611B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0514—Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2013229054A 2013-11-05 2013-11-05 振動子、発振器、電子機器、および移動体 Expired - Fee Related JP6295611B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013229054A JP6295611B2 (ja) 2013-11-05 2013-11-05 振動子、発振器、電子機器、および移動体
CN201410588750.5A CN104617909B (zh) 2013-11-05 2014-10-28 振子、振荡器、电子设备以及移动体
US14/532,444 US9344056B2 (en) 2013-11-05 2014-11-04 Resonator, oscillator, electronic apparatus, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013229054A JP6295611B2 (ja) 2013-11-05 2013-11-05 振動子、発振器、電子機器、および移動体

Publications (3)

Publication Number Publication Date
JP2015090988A JP2015090988A (ja) 2015-05-11
JP2015090988A5 JP2015090988A5 (enExample) 2016-10-27
JP6295611B2 true JP6295611B2 (ja) 2018-03-20

Family

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Country Link
US (1) US9344056B2 (enExample)
JP (1) JP6295611B2 (enExample)
CN (1) CN104617909B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015039162A (ja) * 2013-07-19 2015-02-26 日本電波工業株式会社 表面実装型水晶デバイス
CN107210724B (zh) * 2015-03-27 2020-11-10 京瓷株式会社 石英振子以及石英振动器件
US10241500B2 (en) * 2015-08-10 2019-03-26 Buerkert Werke Gmbh Film transducer and actuator strip for a film transducer
JP2018201138A (ja) * 2017-05-29 2018-12-20 セイコーエプソン株式会社 電子部品、および電子機器
CN107863947A (zh) * 2017-12-26 2018-03-30 东晶锐康晶体（成都）有限公司 一种smd石英谐振器基座
JP2019121944A (ja) * 2018-01-09 2019-07-22 セイコーエプソン株式会社 振動デバイス、回路装置、振動デバイスの製造方法、電子機器及び移動体
JP7247694B2 (ja) * 2019-03-25 2023-03-29 セイコーエプソン株式会社 振動デバイス、発振器、振動モジュール、電子機器および移動体
JP7881899B2 (ja) * 2021-11-18 2026-06-30 セイコーエプソン株式会社 振動デバイス
WO2024047745A1 (ja) * 2022-08-30 2024-03-07 京セラ株式会社 振動デバイス

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US4091303A (en) * 1975-08-21 1978-05-23 Chiba Tadataka Piezoelectric quartz vibrator with heating electrode means
US4374377A (en) * 1979-12-12 1983-02-15 Sumitomo Electric Industries, Ltd. Piezoelectric audio transducer
US4431937A (en) * 1981-10-26 1984-02-14 Sfe Technologies Piezoelectric crystal assembly including protective mounting and covering means
JPS60103931U (ja) * 1983-12-21 1985-07-16 キンセキ株式会社 圧電振動子の容器
US4625138A (en) * 1984-10-24 1986-11-25 The United States Of America As Represented By The Secretary Of The Army Piezoelectric microwave resonator using lateral excitation
US4748367A (en) * 1985-05-28 1988-05-31 Frequency Electronics, Inc. Contact heater for piezoelectric effect resonator crystal
JP3277501B2 (ja) 1992-07-03 2002-04-22 東洋通信機株式会社 圧電共振子の構造及びその製造方法
JPH06296111A (ja) * 1993-04-08 1994-10-21 Nikko Electron Kk 水晶発振器
JPH0681135U (ja) 1993-04-28 1994-11-15 キンセキ株式会社 圧電振動子
US6016025A (en) * 1997-05-15 2000-01-18 M-Tron Industries, Inc. Selected overtone resonator with channels
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JP2001102891A (ja) * 1999-09-30 2001-04-13 Kyocera Corp 圧電デバイス
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JP5494859B2 (ja) 2013-03-29 2014-05-21 セイコーエプソン株式会社 振動子

Also Published As

Publication number Publication date
US20150123742A1 (en) 2015-05-07
CN104617909B (zh) 2019-01-15
US9344056B2 (en) 2016-05-17
JP2015090988A (ja) 2015-05-11
CN104617909A (zh) 2015-05-13

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