JP6291988B2 - 炭化珪素半導体装置 - Google Patents
炭化珪素半導体装置 Download PDFInfo
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- JP6291988B2 JP6291988B2 JP2014083567A JP2014083567A JP6291988B2 JP 6291988 B2 JP6291988 B2 JP 6291988B2 JP 2014083567 A JP2014083567 A JP 2014083567A JP 2014083567 A JP2014083567 A JP 2014083567A JP 6291988 B2 JP6291988 B2 JP 6291988B2
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 183
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 183
- 239000004065 semiconductor Substances 0.000 title claims description 120
- 239000012535 impurity Substances 0.000 claims description 138
- 210000000746 body region Anatomy 0.000 claims description 122
- 238000013459 approach Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 127
- 230000015556 catabolic process Effects 0.000 description 45
- 230000002829 reductive effect Effects 0.000 description 21
- 239000000758 substrate Substances 0.000 description 19
- 230000002093 peripheral effect Effects 0.000 description 12
- 230000005684 electric field Effects 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000010354 integration Effects 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
- 230000002441 reversible effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000370 acceptor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
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- 230000006378 damage Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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Description
以下、図面を参照しつつ、本発明の実施の形態について説明する。以下の説明では、同一または対応する要素には同一の符号を付して、それらについての詳細な説明は繰り返さない。
(1)本発明の一態様に係る炭化珪素半導体装置(1,2,3,4)は、炭化珪素層(12)と、ボディ領域(13)と、ソース領域(14)と、ゲート絶縁膜(15a)と、ゲート電極(27)と、ソース電極(16)と、第1の不純物領域(21)と、第2の不純物領域(23)とを備える。炭化珪素層(12)は、第1の主面(12a)と、第1の主面(12a)の反対側に位置する第2の主面(12b)とを有し、かつ第1の導電型を有する。ボディ領域(13)は、炭化珪素層(12)の内部に配置されて、第1の導電型と異なる第2の導電型を有する。ソース領域(14)は、炭化珪素層(12)の第1の主面(12a)と接するようにボディ領域(13)の内部に配置されて、第1の導電型を有する。ゲート絶縁膜(15a)は、ボディ領域(13)のうち、少なくとも、ソース領域(14)と炭化珪素層(12)との間の部分に挟まれた部分(CH)の表面を覆うように配置される。ゲート電極(27)は、ゲート絶縁膜(15a)に接する。ソース電極(16)は、ボディ領域(13)およびソース領域(14)に電気的に接続されるように配置される。第1の不純物領域(21)は、炭化珪素層(12)の内部、かつ、炭化珪素層(12)の第1の主面(12a)に沿う方向(X)においてボディ領域(13)に対してゲート電極(27)と反対側の位置に、ボディ領域(13)から離されるように配置され、かつ第2の導電型を有する。第2の不純物領域(23)は、ボディ領域(13)と第1の不純物領域(21)とを繋ぐように、炭化珪素層(12)の内部に配置され、かつ第2の導電型を有する。第2の不純物領域(23)の不純物濃度は、炭化珪素層(12)の不純物濃度以上、かつ、ボディ領域(13)の不純物濃度の下限以下である。
(8)好ましくは、第1の導電型は、n型であり、第2の導電型は、p型である。
[本発明の実施形態の詳細]
<実施の形態1>
図1は、本発明の実施の形態1に係る炭化珪素半導体装置1の概略的な平面図である。図1を参照して、本発明の実施の形態1に係る炭化珪素半導体装置1は、素子領域CLと、終端領域TMとを有する。素子領域CLは、複数のMOSFET(Metal Oxide Semiconductor Field Effect Transistor)セル(図2参照)を含む。終端領域TMは、素子領域CLの外側に設けられて、素子領域CLを囲む。なお、素子領域CLおよび終端領域TMの配置を理解しやすいように示すために、図1では、ドリフト層12(図2参照)の第1の主面12aが示されている。
アバランシェ耐量は、アバランシェブレークダウンの発生時に、半導体装置が破壊から耐えることのできるエネルギーの大きさを表す。アバランシェ耐量の単位(mJ/cm2)は、半導体装置の活性面積あたりの破壊エネルギーを表す。
dV/dt耐量は、素子が耐えることのできる、電圧の時間変化を表す。本発明の実施の形態1に係る炭化珪素半導体装置1、および図4に示された炭化珪素半導体装置1Aのいずれも、dV/dt耐量は、30kV/usec以上であった。これらの結果から、本発明の実施の形態1によれば、dV/dt耐量を低下させることなくアバランシェ耐量を向上できることがわかる。
p型領域23の長さLが大きいほど、p型領域23の抵抗値が高くなる。p型領域23の抵抗値を高くすることによってアバランシェ耐量を向上させることが可能になる。上記のとおり、p型領域23は、ドリフト層12の厚みDepiの1/3以上であることが好ましい。
サンプル1:ボディ領域13の不純物濃度:2×1017/cm-3
p型領域23の不純物濃度:9×1016/cm-3
JTE領域21の不純物濃度:1×1017/cm-3
ドリフト層12の厚みDepi:15μm
p型領域23の長さL:5μm (L≧Depi×1/3)
サンプル2:
ボディ領域13の不純物濃度:2×1017/cm-3
p型領域23の不純物濃度:9×1016/cm-3
JTE領域21の不純物濃度:1×1017/cm-3
ドリフト層12の厚みDepi:15μm
p型領域23の長さL:2μm (L<Depi×1/3)
2.サンプルの評価方法
仕様以上の逆方向バイアス電圧(一例として1800V)を炭化珪素半導体装置に印加して、炭化珪素半導体装置の内部にアバランシェブレークダウンを生じさせた。その後にゲート−ソース間のリーク電流を測定した。
サンプル1では、リーク不良が抑えられていたのに対して、サンプル2ではリーク電流が増大した。サンプル1,2の評価から、L≧Depi×1/3であることにより、ゲート−ソース間のリークを抑える効果が得られることが確認された。
本発明の第2の実施の形態に係る炭化珪素半導体装置2の概略平面図は、図1によって示された平面図と同様である。すなわち、素子領域CLおよび終端領域TMの配置に関して、第2の実施の形態に係る炭化珪素半導体装置2は、第1の実施の形態に係る炭化珪素半導体装置1と共通の構成を有する。
図7は、本発明の実施の形態3に係る炭化珪素半導体装置3の概略的な平面図である。図8は、図7のVIII−VIIIに沿った、本発明の第3の実施の形態に係る炭化珪素半導体装置3の概略断面図である。図7および図8を参照して、炭化珪素半導体装置3は、終端領域TMの構成の点において、実施の形態2に係る炭化珪素半導体装置2(図6参照)と異なる。詳細には、ドリフト層12の第1の主面12aは、平坦面(第1の面)121と、側壁面(第2の面)122と、底面(第3の面)123とを有する。
10 炭化珪素層
10a,11a,12a 第1の主面
10b,11b,12b 第2の主面
11 炭化珪素基板
12 ドリフト層
13 ボディ領域
14 ソース領域
15a ゲート絶縁膜
15b 絶縁膜
16 ソース電極
18 コンタクト領域
20 ドレイン電極
21 JTE領域
21a 端部
22 ガードリング領域
23 p型領域
27 ゲート電極
50 裏面保護電極
65 ソースパッド電極
70 層間絶縁膜
121 平坦面
122 側壁面
123 底面
BT 底部
CH チャネル領域
CL 素子領域
Depi 厚み
Ir 逆方向電流
L 長さ
Claims (8)
- 第1の主面と、前記第1の主面の反対側に位置する第2の主面とを有し、かつ第1の導電型を有する炭化珪素層と、
前記炭化珪素層の内部に配置されて、前記第1の導電型と異なる第2の導電型を有するボディ領域と、
前記炭化珪素層の前記第1の主面と接するように前記ボディ領域の内部に配置されて、前記第1の導電型を有するソース領域と、
前記ボディ領域のうち、少なくとも、前記ソース領域と前記炭化珪素層との間の部分に挟まれた部分の表面を覆うように配置されたゲート絶縁膜と、
前記ゲート絶縁膜に接するゲート電極と、
前記ボディ領域および前記ソース領域に電気的に接続されるように配置されたソース電極と、
前記炭化珪素層の内部、かつ、前記炭化珪素層の前記第1の主面に沿う方向において前記ボディ領域に対して前記ゲート電極と反対側の位置に、前記ボディ領域から離されるように配置され、かつ前記第2の導電型を有する第1の不純物領域と、
前記ボディ領域と前記第1の不純物領域とを繋ぐように、前記炭化珪素層の内部に配置され、かつ前記第2の導電型を有する第2の不純物領域とを備え、
前記第2の不純物領域の不純物濃度は、前記炭化珪素層の不純物濃度以上、かつ、前記ボディ領域の不純物濃度未満であり、
前記第1の不純物領域の不純物濃度は、前記ボディ領域の不純物濃度未満であり、かつ、前記第2の不純物領域の不純物濃度よりも大きい、炭化珪素半導体装置。 - 前記第2の不純物領域の不純物濃度は、前記ボディ領域の不純物濃度の下限未満である、請求項1に記載の炭化珪素半導体装置。
- 前記第2の不純物領域の不純物濃度は、1×1014cm-3以上かつ5×1017cm-3未満である、請求項1または請求項2に記載の炭化珪素半導体装置。
- 前記第2の不純物領域の不純物濃度は、1×1016cm-3以上かつ5×1017cm-3未満である、請求項3に記載の炭化珪素半導体装置。
- 前記ボディ領域から前記第1の不純物領域までの、前記炭化珪素層の前記第1の主面に沿った前記第2の不純物領域の長さは、前記炭化珪素層の厚みの1/3以上である、請求項1〜請求項4のいずれか1項に記載の炭化珪素半導体装置。
- 前記炭化珪素層の前記第1の主面には、トレンチが設けられ、
前記トレンチは、前記ソース領域および前記ボディ領域を貫通して前記炭化珪素層に至る側部を有し、
前記ゲート絶縁膜は、前記トレンチの前記側部に接し、
前記ゲート電極は、前記トレンチの内部において前記ゲート絶縁膜に接する、請求項1〜請求項5のいずれか1項に記載の炭化珪素半導体装置。 - 前記炭化珪素層の前記第1の主面は、
前記ソース領域が接する第1の面と、
前記第1の面に接続され、前記炭化珪素層の前記第2の主面に近づくように前記第1の面に対して傾斜した第2の面と、
前記第2の面に接続されて、前記第1の不純物領域が接する第3の面とを含む、請求項1〜請求項6のいずれか1項に記載の炭化珪素半導体装置。 - 前記第1の導電型は、n型であり、
前記第2の導電型は、p型である、請求項1〜請求項7のいずれか1項に記載の炭化珪素半導体装置。
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