JP6290686B2 - チャンバ装置及び処理システム - Google Patents

チャンバ装置及び処理システム Download PDF

Info

Publication number
JP6290686B2
JP6290686B2 JP2014073561A JP2014073561A JP6290686B2 JP 6290686 B2 JP6290686 B2 JP 6290686B2 JP 2014073561 A JP2014073561 A JP 2014073561A JP 2014073561 A JP2014073561 A JP 2014073561A JP 6290686 B2 JP6290686 B2 JP 6290686B2
Authority
JP
Japan
Prior art keywords
door
chamber
opening
chamber body
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014073561A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015198100A5 (OSRAM
JP2015198100A (ja
Inventor
準一 開田
準一 開田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Priority to JP2014073561A priority Critical patent/JP6290686B2/ja
Publication of JP2015198100A publication Critical patent/JP2015198100A/ja
Publication of JP2015198100A5 publication Critical patent/JP2015198100A5/ja
Application granted granted Critical
Publication of JP6290686B2 publication Critical patent/JP6290686B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2014073561A 2014-03-31 2014-03-31 チャンバ装置及び処理システム Active JP6290686B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014073561A JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014073561A JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Publications (3)

Publication Number Publication Date
JP2015198100A JP2015198100A (ja) 2015-11-09
JP2015198100A5 JP2015198100A5 (OSRAM) 2017-04-06
JP6290686B2 true JP6290686B2 (ja) 2018-03-07

Family

ID=54547648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014073561A Active JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Country Status (1)

Country Link
JP (1) JP6290686B2 (OSRAM)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483021U (OSRAM) * 1977-11-24 1979-06-12
JPS5560761A (en) * 1978-10-31 1980-05-08 Murata Mach Ltd Double shutter
JP2001008757A (ja) * 1999-07-01 2001-01-16 Nanbu Plastics Co Ltd 引出し案内機構並びに引出し及び懸架用レール
JP4699705B2 (ja) * 2004-03-09 2011-06-15 日本アキュライド株式会社 スライドレールの収納時保持装置
JP2011024630A (ja) * 2009-07-21 2011-02-10 Okamura Corp デスク装置
US8261928B2 (en) * 2010-06-02 2012-09-11 Eaton Corporation Swing bolt splash shield

Also Published As

Publication number Publication date
JP2015198100A (ja) 2015-11-09

Similar Documents

Publication Publication Date Title
JP5244097B2 (ja) 基板用の輸送ポッド及びインターフェースを備えた装置
US9599233B2 (en) Gate valve
JP5450363B2 (ja) ウェーハを保持するための容器
JP5736686B2 (ja) ロードポート
US9685359B2 (en) Load port device
TWI391591B (zh) 閘閥
US20110214778A1 (en) Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method
JP4588778B2 (ja) 基板処理装置
JP6375186B2 (ja) 基板収納容器、ロードポート装置および基板処理装置
WO2001006560A1 (fr) Dispositif d'ouverture/fermeture pour un couvercle d'ouverture/fermeture de boite de stockage d'objet non traite et systeme de traitement d'objet non traite
US9269599B2 (en) Substrate relay apparatus, substrate relay method, and substrate processing apparatus
JP6290686B2 (ja) チャンバ装置及び処理システム
KR100850815B1 (ko) 처리 장치
KR102614457B1 (ko) 고압 기판 처리 장치
KR101687734B1 (ko) 챔버 장치 및 처리 시스템
JP2015050417A (ja) ロードポート装置及び基板処理装置
US10043689B2 (en) Chamber apparatus and processing system
TWI600853B (zh) Chamber device and processing system
JP4338205B2 (ja) ポッドクランプユニット、ポッドクランプユニットを有するロードポート、ポッド及びロードポートを有するミニエンバイロンメントシステム
JP4848916B2 (ja) クランプ機構
CN113454007A (zh) 盖开闭装置
JP2005076845A (ja) ゲートバルブ
KR101619243B1 (ko) 다방향 웨이퍼 이송 시스템
JP2018107206A (ja) 搬送容器接続装置、ロードポート装置、搬送容器保管ストッカー及び搬送容器接続方法
KR101082605B1 (ko) 웨이퍼 이송용 로봇암

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170301

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170301

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20171120

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20171222

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180119

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180129

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180208

R150 Certificate of patent or registration of utility model

Ref document number: 6290686

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250