JP6289454B2 - センサー素子、その製造方法、及びその使用方法 - Google Patents

センサー素子、その製造方法、及びその使用方法 Download PDF

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Publication number
JP6289454B2
JP6289454B2 JP2015520214A JP2015520214A JP6289454B2 JP 6289454 B2 JP6289454 B2 JP 6289454B2 JP 2015520214 A JP2015520214 A JP 2015520214A JP 2015520214 A JP2015520214 A JP 2015520214A JP 6289454 B2 JP6289454 B2 JP 6289454B2
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conductive electrode
porous dielectric
detection layer
porous
sensor element
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Japanese (ja)
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JP2015525362A (ja
JP2015525362A5 (enExample
Inventor
ステファン エイチ． グリスカ，
ステファン エイチ． グリスカ，
クシシュトフ エー． レビンスキー，
クシシュトフ エー． レビンスキー，
マイケル シー． パラゾット，
マイケル シー． パラゾット，
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0047—Organic compounds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2015520214A 2012-06-25 2013-06-03 センサー素子、その製造方法、及びその使用方法 Expired - Fee Related JP6289454B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261663688P 2012-06-25 2012-06-25
US61/663,688 2012-06-25
PCT/US2013/043861 WO2014003979A1 (en) 2012-06-25 2013-06-03 Sensor element, method of making, and method of using the same

Publications (3)

Publication Number Publication Date
JP2015525362A JP2015525362A (ja) 2015-09-03
JP2015525362A5 JP2015525362A5 (enExample) 2016-06-16
JP6289454B2 true JP6289454B2 (ja) 2018-03-07

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JP2015520214A Expired - Fee Related JP6289454B2 (ja) 2012-06-25 2013-06-03 センサー素子、その製造方法、及びその使用方法

Country Status (6)

Country Link
US (1) US10267758B2 (enExample)
EP (1) EP2864770B1 (enExample)
JP (1) JP6289454B2 (enExample)
KR (1) KR102131314B1 (enExample)
CN (1) CN104583763B (enExample)
WO (1) WO2014003979A1 (enExample)

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KR20170033865A (ko) * 2014-07-22 2017-03-27 브레우어 사이언스 인코포레이션 박막형 저항방식 센서
US20180024023A1 (en) * 2015-01-29 2018-01-25 Aram Corporation Liquid sensor
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
EP3211408B1 (en) * 2016-02-29 2019-04-10 Honeywell International Inc. Relative humidity sensor and method
US10801985B2 (en) * 2016-06-03 2020-10-13 Texas Instruments Incorporated Sensing capacitor with a permeable electrode
TWI601954B (zh) * 2016-09-09 2017-10-11 長庚大學 電容式感濕元件及其使用方法
GB2568196B (en) * 2016-09-09 2022-04-20 Hokuriku Elect Ind Capacitive gas sensor
JP2019168289A (ja) * 2018-03-22 2019-10-03 株式会社東芝 ガスセンシング方法、ガスセンサ、及びガスセンシングシステム
GB2583739B (en) 2019-05-07 2022-05-18 Sensorhut Ltd Detection of analytes in gases using porous sorbents
KR102583269B1 (ko) * 2020-05-07 2023-10-04 한국전자통신연구원 습도 센서 및 그를 포함하는 버튼 장치
US11828718B2 (en) 2020-05-07 2023-11-28 Electronics And Telecommunications Research Institute Humidity sensor and button device including the same
US12480556B2 (en) * 2021-04-15 2025-11-25 Korea Advanced Institute Of Science And Technology Composite material capable of measuring bending deformation, spring including the same, and manufacturing method thereof
CN116857785A (zh) * 2023-06-30 2023-10-10 珠海格力节能环保制冷技术研究中心有限公司 一种家用电器、空气净化的控制方法及空气净化控制装置

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JPS60200152A (ja) * 1984-03-24 1985-10-09 Nisshinbo Ind Inc 感湿素子
US4662220A (en) 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
JPS63290950A (ja) 1987-05-25 1988-11-28 Kyohei Mizushima 水分センサ−
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KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
US20140025326A1 (en) 2011-04-13 2014-01-23 3M Innovative Properties Company Electronic device including calibration information and method of using the same
JP5908069B2 (ja) 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium

Also Published As

Publication number Publication date
WO2014003979A1 (en) 2014-01-03
KR20150023785A (ko) 2015-03-05
JP2015525362A (ja) 2015-09-03
EP2864770B1 (en) 2017-09-27
US20150168330A1 (en) 2015-06-18
CN104583763B (zh) 2017-03-08
EP2864770A1 (en) 2015-04-29
CN104583763A (zh) 2015-04-29
US10267758B2 (en) 2019-04-23
KR102131314B1 (ko) 2020-07-07

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