CN104583763B - 传感器元件及其制备和使用方法 - Google Patents

传感器元件及其制备和使用方法 Download PDF

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Publication number
CN104583763B
CN104583763B CN201380033684.9A CN201380033684A CN104583763B CN 104583763 B CN104583763 B CN 104583763B CN 201380033684 A CN201380033684 A CN 201380033684A CN 104583763 B CN104583763 B CN 104583763B
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China
Prior art keywords
conductive electrode
conductive
sensor element
carbon
porous dielectric
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Expired - Fee Related
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CN201380033684.9A
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English (en)
Chinese (zh)
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CN104583763A (zh
Inventor
S·H·格里斯卡
K·A·莱温斯基
M·C·帕拉佐托
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0047—Organic compounds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN201380033684.9A 2012-06-25 2013-06-03 传感器元件及其制备和使用方法 Expired - Fee Related CN104583763B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261663688P 2012-06-25 2012-06-25
US61/663,688 2012-06-25
PCT/US2013/043861 WO2014003979A1 (en) 2012-06-25 2013-06-03 Sensor element, method of making, and method of using the same

Publications (2)

Publication Number Publication Date
CN104583763A CN104583763A (zh) 2015-04-29
CN104583763B true CN104583763B (zh) 2017-03-08

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CN201380033684.9A Expired - Fee Related CN104583763B (zh) 2012-06-25 2013-06-03 传感器元件及其制备和使用方法

Country Status (6)

Country Link
US (1) US10267758B2 (enExample)
EP (1) EP2864770B1 (enExample)
JP (1) JP6289454B2 (enExample)
KR (1) KR102131314B1 (enExample)
CN (1) CN104583763B (enExample)
WO (1) WO2014003979A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
JP6498220B2 (ja) * 2014-06-13 2019-04-10 スリーエム イノベイティブ プロパティズ カンパニー アミン吸着剤としてのスルホン酸含有ポリマー材料
KR20170033865A (ko) * 2014-07-22 2017-03-27 브레우어 사이언스 인코포레이션 박막형 저항방식 센서
US20180024023A1 (en) * 2015-01-29 2018-01-25 Aram Corporation Liquid sensor
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
EP3211408B1 (en) * 2016-02-29 2019-04-10 Honeywell International Inc. Relative humidity sensor and method
US10801985B2 (en) * 2016-06-03 2020-10-13 Texas Instruments Incorporated Sensing capacitor with a permeable electrode
TWI601954B (zh) * 2016-09-09 2017-10-11 長庚大學 電容式感濕元件及其使用方法
GB2568196B (en) * 2016-09-09 2022-04-20 Hokuriku Elect Ind Capacitive gas sensor
JP2019168289A (ja) * 2018-03-22 2019-10-03 株式会社東芝 ガスセンシング方法、ガスセンサ、及びガスセンシングシステム
GB2583739B (en) 2019-05-07 2022-05-18 Sensorhut Ltd Detection of analytes in gases using porous sorbents
KR102583269B1 (ko) * 2020-05-07 2023-10-04 한국전자통신연구원 습도 센서 및 그를 포함하는 버튼 장치
US11828718B2 (en) 2020-05-07 2023-11-28 Electronics And Telecommunications Research Institute Humidity sensor and button device including the same
US12480556B2 (en) * 2021-04-15 2025-11-25 Korea Advanced Institute Of Science And Technology Composite material capable of measuring bending deformation, spring including the same, and manufacturing method thereof
CN116857785A (zh) * 2023-06-30 2023-10-10 珠海格力节能环保制冷技术研究中心有限公司 一种家用电器、空气净化的控制方法及空气净化控制装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4489603A (en) * 1981-09-09 1984-12-25 Nippon Soken, Inc. Moisture sensitive element
WO2010075333A2 (en) * 2008-12-23 2010-07-01 3M Innovative Properties Company Organic chemical sensor with microporous organosilicate material
WO2012050686A1 (en) * 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180280A (ja) * 1975-01-06 1976-07-13 Hitachi Ltd Roeikenshutsuki
JPS60200152A (ja) * 1984-03-24 1985-10-09 Nisshinbo Ind Inc 感湿素子
US4662220A (en) 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
JPS63290950A (ja) 1987-05-25 1988-11-28 Kyohei Mizushima 水分センサ−
US5536486A (en) 1989-03-15 1996-07-16 Petoca Ltd. Carbon fibers and non-woven fabrics
US5036704A (en) 1990-03-23 1991-08-06 Gas Research Institute Moisture sensor
JPH0421852U (enExample) * 1990-06-12 1992-02-24
EP1195828B1 (en) 2000-01-27 2017-03-08 Mitsubishi Rayon Co., Ltd. Porous carbon electrode material, method for manufacturing the same, and carbon fiber paper
JP2003232765A (ja) * 2002-02-08 2003-08-22 Nippon Soken Inc 湿度センサ用感湿素子
CN100336972C (zh) 2002-04-17 2007-09-12 三菱丽阳株式会社 碳纤维纸及使用该材料的燃料电池用多孔碳电极基材
US7348088B2 (en) 2002-12-19 2008-03-25 3M Innovative Properties Company Polymer electrolyte membrane
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
WO2005124907A1 (ja) * 2004-06-21 2005-12-29 Mitsubishi Rayon Co., Ltd. 多孔質電極基材およびその製造方法
JP4054837B2 (ja) 2005-01-14 2008-03-05 松下電器産業株式会社 燃料電池用スタック及び燃料電池
US7608334B2 (en) 2005-03-29 2009-10-27 3M Innovative Properties Company Oxidatively stable microlayers of gas diffusion layers
KR101320730B1 (ko) 2005-09-29 2013-10-21 도레이 카부시키가이샤 다공질 탄소 시트
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
WO2009045733A2 (en) 2007-10-05 2009-04-09 3M Innovative Properties Company Organic chemical sensor comprising microporous polymer, and method of use
KR101476487B1 (ko) 2007-10-05 2014-12-24 쓰리엠 이노베이티브 프로퍼티즈 컴파니 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법
CN101953012B (zh) 2007-12-27 2014-05-07 3M创新有限公司 具有组合添加剂的耐久性燃料电池膜电极组件
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
EP2583090B1 (en) 2010-06-15 2016-04-06 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
EP2622334B1 (en) 2010-09-30 2016-05-25 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
US20140025326A1 (en) 2011-04-13 2014-01-23 3M Innovative Properties Company Electronic device including calibration information and method of using the same
JP5908069B2 (ja) 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4489603A (en) * 1981-09-09 1984-12-25 Nippon Soken, Inc. Moisture sensitive element
WO2010075333A2 (en) * 2008-12-23 2010-07-01 3M Innovative Properties Company Organic chemical sensor with microporous organosilicate material
CN102405409A (zh) * 2008-12-23 2012-04-04 3M创新有限公司 具有微孔有机硅材料的有机化学传感器
WO2012050686A1 (en) * 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same

Also Published As

Publication number Publication date
WO2014003979A1 (en) 2014-01-03
KR20150023785A (ko) 2015-03-05
JP2015525362A (ja) 2015-09-03
EP2864770B1 (en) 2017-09-27
US20150168330A1 (en) 2015-06-18
EP2864770A1 (en) 2015-04-29
CN104583763A (zh) 2015-04-29
US10267758B2 (en) 2019-04-23
JP6289454B2 (ja) 2018-03-07
KR102131314B1 (ko) 2020-07-07

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Granted publication date: 20170308