JP6271852B2 - 電子線応用装置の鏡筒部へ真空ポンプを接続する真空ポンプ用接続装置、及び該接続装置の設置方法 - Google Patents

電子線応用装置の鏡筒部へ真空ポンプを接続する真空ポンプ用接続装置、及び該接続装置の設置方法 Download PDF

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Publication number
JP6271852B2
JP6271852B2 JP2013072410A JP2013072410A JP6271852B2 JP 6271852 B2 JP6271852 B2 JP 6271852B2 JP 2013072410 A JP2013072410 A JP 2013072410A JP 2013072410 A JP2013072410 A JP 2013072410A JP 6271852 B2 JP6271852 B2 JP 6271852B2
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Prior art keywords
vacuum pump
vibration
lens barrel
exhaust connection
electron beam
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JP2013072410A
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Japanese (ja)
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JP2014196693A5 (https=
JP2014196693A (ja
Inventor
松太郎 宮本
松太郎 宮本
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Ebara Corp
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Ebara Corp
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Priority to JP2013072410A priority Critical patent/JP6271852B2/ja
Priority to US14/228,404 priority patent/US9970459B2/en
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Publication of JP2014196693A5 publication Critical patent/JP2014196693A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/605—Mounting; Assembling; Disassembling specially adapted for liquid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2013072410A 2013-03-29 2013-03-29 電子線応用装置の鏡筒部へ真空ポンプを接続する真空ポンプ用接続装置、及び該接続装置の設置方法 Active JP6271852B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013072410A JP6271852B2 (ja) 2013-03-29 2013-03-29 電子線応用装置の鏡筒部へ真空ポンプを接続する真空ポンプ用接続装置、及び該接続装置の設置方法
US14/228,404 US9970459B2 (en) 2013-03-29 2014-03-28 Vacuum pump connecting apparatus and method for installing vacuum pump connecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013072410A JP6271852B2 (ja) 2013-03-29 2013-03-29 電子線応用装置の鏡筒部へ真空ポンプを接続する真空ポンプ用接続装置、及び該接続装置の設置方法

Publications (3)

Publication Number Publication Date
JP2014196693A JP2014196693A (ja) 2014-10-16
JP2014196693A5 JP2014196693A5 (https=) 2016-05-26
JP6271852B2 true JP6271852B2 (ja) 2018-01-31

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JP2013072410A Active JP6271852B2 (ja) 2013-03-29 2013-03-29 電子線応用装置の鏡筒部へ真空ポンプを接続する真空ポンプ用接続装置、及び該接続装置の設置方法

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US (1) US9970459B2 (https=)
JP (1) JP6271852B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6484601B2 (ja) * 2016-11-24 2019-03-13 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 処理装置及び半導体装置の製造方法
JP7057167B2 (ja) 2018-03-08 2022-04-19 株式会社荏原製作所 真空用接続機構、電子光学装置
JP7228612B2 (ja) * 2020-03-27 2023-02-24 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム
CN114562621A (zh) * 2022-03-03 2022-05-31 上海精测半导体技术有限公司 一种离子泵隔振装置及其使用方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4524261A (en) * 1983-09-19 1985-06-18 Varian Associates, Inc. Localized vacuum processing apparatus
JPH0431675A (ja) * 1990-05-25 1992-02-03 Hitachi Ltd 真空用接続部材
JPH04147548A (ja) * 1990-10-09 1992-05-21 Nikon Corp 荷電粒子線装置
JPH08329874A (ja) 1995-05-31 1996-12-13 Hitachi Ltd 走査電子顕微鏡
US6323494B1 (en) * 1999-04-09 2001-11-27 Nikon Corporation Vertical direction force transducer
AU5653699A (en) * 1999-09-20 2001-04-24 Nikon Corporation Parallel link mechanism, exposure system and method of manufacturing the same, and method of manufacturing devices
JP2002303294A (ja) 2001-04-06 2002-10-18 Boc Edwards Technologies Ltd 真空ポンプ
JP4335495B2 (ja) 2002-03-27 2009-09-30 株式会社日立ハイテクノロジーズ 定圧チャンバ、それを用いた照射装置及び回路パターンの検査装置
JP4458322B2 (ja) * 2003-01-14 2010-04-28 キヤノン株式会社 露光装置およびデバイス製造方法
GB2406704B (en) * 2003-09-30 2007-02-07 Ims Nanofabrication Gmbh Particle-optic electrostatic lens
JP2007165232A (ja) * 2005-12-16 2007-06-28 Hitachi High-Technologies Corp 荷電粒子線装置
JP2008232029A (ja) 2007-03-20 2008-10-02 Edwards Kk ポンプ装置
US20110186748A1 (en) * 2008-08-15 2011-08-04 John Ruffell Systems And Methods For Scanning A Beam Of Charged Particles
JP5632992B2 (ja) 2010-11-22 2014-12-03 日本電子株式会社 ターボ分子ポンプの接続装置
US8794610B2 (en) * 2011-09-20 2014-08-05 Mitutoyo Corporation Two-dimension precision transfer equipment, three-dimension precision transfer equipment, and coordinate measuring machine
JP6129292B2 (ja) * 2013-02-15 2017-05-17 三菱重工コンプレッサ株式会社 蒸気タービンシステム

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JP2014196693A (ja) 2014-10-16
US9970459B2 (en) 2018-05-15
US20140291980A1 (en) 2014-10-02

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