JP6261185B2 - 昇降モジュールおよび昇降モジュールを使用する昇降装置 - Google Patents

昇降モジュールおよび昇降モジュールを使用する昇降装置 Download PDF

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Publication number
JP6261185B2
JP6261185B2 JP2013099172A JP2013099172A JP6261185B2 JP 6261185 B2 JP6261185 B2 JP 6261185B2 JP 2013099172 A JP2013099172 A JP 2013099172A JP 2013099172 A JP2013099172 A JP 2013099172A JP 6261185 B2 JP6261185 B2 JP 6261185B2
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JP
Japan
Prior art keywords
lifting
rotating
elevating
lifting device
fixed
Prior art date
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JP2013099172A
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English (en)
Japanese (ja)
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JP2014003281A (ja
JP2014003281A5 (enExample
Inventor
コ・スクミン
チャン・ジョンイル
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スンハン・エンジニアリング・コーポレイション
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Publication of JP2014003281A publication Critical patent/JP2014003281A/ja
Publication of JP2014003281A5 publication Critical patent/JP2014003281A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Forklifts And Lifting Vehicles (AREA)
JP2013099172A 2012-05-11 2013-05-09 昇降モジュールおよび昇降モジュールを使用する昇降装置 Active JP6261185B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0050369 2012-05-11
KR1020120050369A KR101379834B1 (ko) 2012-05-11 2012-05-11 승강모듈 및 이를 사용한 승강장치

Publications (3)

Publication Number Publication Date
JP2014003281A JP2014003281A (ja) 2014-01-09
JP2014003281A5 JP2014003281A5 (enExample) 2016-06-02
JP6261185B2 true JP6261185B2 (ja) 2018-01-17

Family

ID=49854448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013099172A Active JP6261185B2 (ja) 2012-05-11 2013-05-09 昇降モジュールおよび昇降モジュールを使用する昇降装置

Country Status (3)

Country Link
JP (1) JP6261185B2 (enExample)
KR (1) KR101379834B1 (enExample)
TW (1) TWI623474B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474695B1 (ko) 2014-09-18 2014-12-18 (주)삼정오토메이션 Ｄｄ모터를 이용한 ｚ축 스테이지
KR102567650B1 (ko) 2021-12-28 2023-08-18 주식회사 한성시스코 Z축스테이지 및 z축스테이지를 포함하는 스테이지장치
KR102756973B1 (ko) 2022-12-29 2025-01-21 주식회사 한성시스코 척 회전부가 구비된 스테이지장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2876388B2 (ja) * 1994-09-02 1999-03-31 東京エレクトロン株式会社 搬送装置
KR20000002236U (ko) * 1998-06-19 2000-02-07 김영환 직선 운동식 모터
JP4032911B2 (ja) * 2002-10-02 2008-01-16 豊和工業株式会社 リニアモータ駆動式工作機械の主軸ヘッド落下防止装置
JP2005051188A (ja) * 2003-07-28 2005-02-24 Yasuhito Itagaki 搬送工程レイアウト方法並び複合機能ロボット及び完全密閉構造を成したクランプ方式アライナ装置。
KR100637590B1 (ko) * 2005-07-08 2006-10-23 주식회사 탑 엔지니어링 평판표시장치 제조용 기판 스크라이빙장치
JP4836684B2 (ja) * 2006-06-21 2011-12-14 株式会社日本マイクロニクス 検査ステージ及び検査装置
KR100779029B1 (ko) * 2006-12-15 2007-11-23 세크론 주식회사 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법
WO2011125260A1 (ja) * 2010-04-07 2011-10-13 株式会社安川電機 θＺ駆動装置およびステージ装置

Also Published As

Publication number Publication date
JP2014003281A (ja) 2014-01-09
KR20130126328A (ko) 2013-11-20
TWI623474B (zh) 2018-05-11
KR101379834B1 (ko) 2014-04-01
TW201400388A (zh) 2014-01-01

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