KR101379834B1 - 승강모듈 및 이를 사용한 승강장치 - Google Patents
승강모듈 및 이를 사용한 승강장치 Download PDFInfo
- Publication number
- KR101379834B1 KR101379834B1 KR1020120050369A KR20120050369A KR101379834B1 KR 101379834 B1 KR101379834 B1 KR 101379834B1 KR 1020120050369 A KR1020120050369 A KR 1020120050369A KR 20120050369 A KR20120050369 A KR 20120050369A KR 101379834 B1 KR101379834 B1 KR 101379834B1
- Authority
- KR
- South Korea
- Prior art keywords
- lifting
- unit
- elevating
- rotating
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
- Forklifts And Lifting Vehicles (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120050369A KR101379834B1 (ko) | 2012-05-11 | 2012-05-11 | 승강모듈 및 이를 사용한 승강장치 |
| TW102107484A TWI623474B (zh) | 2012-05-11 | 2013-03-04 | 升降模組及升降裝置 |
| JP2013099172A JP6261185B2 (ja) | 2012-05-11 | 2013-05-09 | 昇降モジュールおよび昇降モジュールを使用する昇降装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120050369A KR101379834B1 (ko) | 2012-05-11 | 2012-05-11 | 승강모듈 및 이를 사용한 승강장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20130126328A KR20130126328A (ko) | 2013-11-20 |
| KR101379834B1 true KR101379834B1 (ko) | 2014-04-01 |
Family
ID=49854448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120050369A Active KR101379834B1 (ko) | 2012-05-11 | 2012-05-11 | 승강모듈 및 이를 사용한 승강장치 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6261185B2 (enExample) |
| KR (1) | KR101379834B1 (enExample) |
| TW (1) | TWI623474B (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101474695B1 (ko) | 2014-09-18 | 2014-12-18 | (주)삼정오토메이션 | Dd모터를 이용한 z축 스테이지 |
| KR20230100804A (ko) | 2021-12-28 | 2023-07-06 | 주식회사 한성시스코 | Z축스테이지 및 z축스테이지를 포함하는 스테이지장치 |
| KR20240105986A (ko) | 2022-12-29 | 2024-07-08 | 주식회사 한성시스코 | 척 회전부가 구비된 스테이지장치 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000002236U (ko) * | 1998-06-19 | 2000-02-07 | 김영환 | 직선 운동식 모터 |
| JP2004122285A (ja) * | 2002-10-02 | 2004-04-22 | Howa Mach Ltd | リニアモータ駆動式工作機械の主軸ヘッド落下防止装置 |
| KR100637590B1 (ko) * | 2005-07-08 | 2006-10-23 | 주식회사 탑 엔지니어링 | 평판표시장치 제조용 기판 스크라이빙장치 |
| KR100779029B1 (ko) * | 2006-12-15 | 2007-11-23 | 세크론 주식회사 | 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2876388B2 (ja) * | 1994-09-02 | 1999-03-31 | 東京エレクトロン株式会社 | 搬送装置 |
| JP2005051188A (ja) * | 2003-07-28 | 2005-02-24 | Yasuhito Itagaki | 搬送工程レイアウト方法並び複合機能ロボット及び完全密閉構造を成したクランプ方式アライナ装置。 |
| JP4836684B2 (ja) * | 2006-06-21 | 2011-12-14 | 株式会社日本マイクロニクス | 検査ステージ及び検査装置 |
| WO2011125260A1 (ja) * | 2010-04-07 | 2011-10-13 | 株式会社安川電機 | θZ駆動装置およびステージ装置 |
-
2012
- 2012-05-11 KR KR1020120050369A patent/KR101379834B1/ko active Active
-
2013
- 2013-03-04 TW TW102107484A patent/TWI623474B/zh active
- 2013-05-09 JP JP2013099172A patent/JP6261185B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000002236U (ko) * | 1998-06-19 | 2000-02-07 | 김영환 | 직선 운동식 모터 |
| JP2004122285A (ja) * | 2002-10-02 | 2004-04-22 | Howa Mach Ltd | リニアモータ駆動式工作機械の主軸ヘッド落下防止装置 |
| KR100637590B1 (ko) * | 2005-07-08 | 2006-10-23 | 주식회사 탑 엔지니어링 | 평판표시장치 제조용 기판 스크라이빙장치 |
| KR100779029B1 (ko) * | 2006-12-15 | 2007-11-23 | 세크론 주식회사 | 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101474695B1 (ko) | 2014-09-18 | 2014-12-18 | (주)삼정오토메이션 | Dd모터를 이용한 z축 스테이지 |
| KR20230100804A (ko) | 2021-12-28 | 2023-07-06 | 주식회사 한성시스코 | Z축스테이지 및 z축스테이지를 포함하는 스테이지장치 |
| KR20240105986A (ko) | 2022-12-29 | 2024-07-08 | 주식회사 한성시스코 | 척 회전부가 구비된 스테이지장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014003281A (ja) | 2014-01-09 |
| KR20130126328A (ko) | 2013-11-20 |
| TWI623474B (zh) | 2018-05-11 |
| JP6261185B2 (ja) | 2018-01-17 |
| TW201400388A (zh) | 2014-01-01 |
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