KR101379834B1 - 승강모듈 및 이를 사용한 승강장치 - Google Patents

승강모듈 및 이를 사용한 승강장치 Download PDF

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Publication number
KR101379834B1
KR101379834B1 KR1020120050369A KR20120050369A KR101379834B1 KR 101379834 B1 KR101379834 B1 KR 101379834B1 KR 1020120050369 A KR1020120050369 A KR 1020120050369A KR 20120050369 A KR20120050369 A KR 20120050369A KR 101379834 B1 KR101379834 B1 KR 101379834B1
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South Korea
Prior art keywords
lifting
unit
elevating
rotating
module
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KR1020120050369A
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English (en)
Korean (ko)
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KR20130126328A (ko
Inventor
고석민
장종일
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순환엔지니어링 주식회사
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Priority to KR1020120050369A priority Critical patent/KR101379834B1/ko
Priority to TW102107484A priority patent/TWI623474B/zh
Priority to JP2013099172A priority patent/JP6261185B2/ja
Publication of KR20130126328A publication Critical patent/KR20130126328A/ko
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Forklifts And Lifting Vehicles (AREA)
KR1020120050369A 2012-05-11 2012-05-11 승강모듈 및 이를 사용한 승강장치 Active KR101379834B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020120050369A KR101379834B1 (ko) 2012-05-11 2012-05-11 승강모듈 및 이를 사용한 승강장치
TW102107484A TWI623474B (zh) 2012-05-11 2013-03-04 升降模組及升降裝置
JP2013099172A JP6261185B2 (ja) 2012-05-11 2013-05-09 昇降モジュールおよび昇降モジュールを使用する昇降装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120050369A KR101379834B1 (ko) 2012-05-11 2012-05-11 승강모듈 및 이를 사용한 승강장치

Publications (2)

Publication Number Publication Date
KR20130126328A KR20130126328A (ko) 2013-11-20
KR101379834B1 true KR101379834B1 (ko) 2014-04-01

Family

ID=49854448

Family Applications (1)

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KR1020120050369A Active KR101379834B1 (ko) 2012-05-11 2012-05-11 승강모듈 및 이를 사용한 승강장치

Country Status (3)

Country Link
JP (1) JP6261185B2 (enExample)
KR (1) KR101379834B1 (enExample)
TW (1) TWI623474B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474695B1 (ko) 2014-09-18 2014-12-18 (주)삼정오토메이션 Dd모터를 이용한 z축 스테이지
KR20230100804A (ko) 2021-12-28 2023-07-06 주식회사 한성시스코 Z축스테이지 및 z축스테이지를 포함하는 스테이지장치
KR20240105986A (ko) 2022-12-29 2024-07-08 주식회사 한성시스코 척 회전부가 구비된 스테이지장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000002236U (ko) * 1998-06-19 2000-02-07 김영환 직선 운동식 모터
JP2004122285A (ja) * 2002-10-02 2004-04-22 Howa Mach Ltd リニアモータ駆動式工作機械の主軸ヘッド落下防止装置
KR100637590B1 (ko) * 2005-07-08 2006-10-23 주식회사 탑 엔지니어링 평판표시장치 제조용 기판 스크라이빙장치
KR100779029B1 (ko) * 2006-12-15 2007-11-23 세크론 주식회사 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2876388B2 (ja) * 1994-09-02 1999-03-31 東京エレクトロン株式会社 搬送装置
JP2005051188A (ja) * 2003-07-28 2005-02-24 Yasuhito Itagaki 搬送工程レイアウト方法並び複合機能ロボット及び完全密閉構造を成したクランプ方式アライナ装置。
JP4836684B2 (ja) * 2006-06-21 2011-12-14 株式会社日本マイクロニクス 検査ステージ及び検査装置
WO2011125260A1 (ja) * 2010-04-07 2011-10-13 株式会社安川電機 θZ駆動装置およびステージ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000002236U (ko) * 1998-06-19 2000-02-07 김영환 직선 운동식 모터
JP2004122285A (ja) * 2002-10-02 2004-04-22 Howa Mach Ltd リニアモータ駆動式工作機械の主軸ヘッド落下防止装置
KR100637590B1 (ko) * 2005-07-08 2006-10-23 주식회사 탑 엔지니어링 평판표시장치 제조용 기판 스크라이빙장치
KR100779029B1 (ko) * 2006-12-15 2007-11-23 세크론 주식회사 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474695B1 (ko) 2014-09-18 2014-12-18 (주)삼정오토메이션 Dd모터를 이용한 z축 스테이지
KR20230100804A (ko) 2021-12-28 2023-07-06 주식회사 한성시스코 Z축스테이지 및 z축스테이지를 포함하는 스테이지장치
KR20240105986A (ko) 2022-12-29 2024-07-08 주식회사 한성시스코 척 회전부가 구비된 스테이지장치

Also Published As

Publication number Publication date
JP2014003281A (ja) 2014-01-09
KR20130126328A (ko) 2013-11-20
TWI623474B (zh) 2018-05-11
JP6261185B2 (ja) 2018-01-17
TW201400388A (zh) 2014-01-01

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