TWI623474B - 升降模組及升降裝置 - Google Patents

升降模組及升降裝置 Download PDF

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Publication number
TWI623474B
TWI623474B TW102107484A TW102107484A TWI623474B TW I623474 B TWI623474 B TW I623474B TW 102107484 A TW102107484 A TW 102107484A TW 102107484 A TW102107484 A TW 102107484A TW I623474 B TWI623474 B TW I623474B
Authority
TW
Taiwan
Prior art keywords
lifting
lifting device
rotating
module
patent application
Prior art date
Application number
TW102107484A
Other languages
English (en)
Chinese (zh)
Other versions
TW201400388A (zh
Inventor
高錫敏
張鍾一
Original Assignee
循環工程股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 循環工程股份有限公司 filed Critical 循環工程股份有限公司
Publication of TW201400388A publication Critical patent/TW201400388A/zh
Application granted granted Critical
Publication of TWI623474B publication Critical patent/TWI623474B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Forklifts And Lifting Vehicles (AREA)
TW102107484A 2012-05-11 2013-03-04 升降模組及升降裝置 TWI623474B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120050369A KR101379834B1 (ko) 2012-05-11 2012-05-11 승강모듈 및 이를 사용한 승강장치
??10-2012-0050369 2012-05-11

Publications (2)

Publication Number Publication Date
TW201400388A TW201400388A (zh) 2014-01-01
TWI623474B true TWI623474B (zh) 2018-05-11

Family

ID=49854448

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102107484A TWI623474B (zh) 2012-05-11 2013-03-04 升降模組及升降裝置

Country Status (3)

Country Link
JP (1) JP6261185B2 (enExample)
KR (1) KR101379834B1 (enExample)
TW (1) TWI623474B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474695B1 (ko) 2014-09-18 2014-12-18 (주)삼정오토메이션 Ｄｄ모터를 이용한 ｚ축 스테이지
KR102567650B1 (ko) 2021-12-28 2023-08-18 주식회사 한성시스코 Z축스테이지 및 z축스테이지를 포함하는 스테이지장치
KR102756973B1 (ko) 2022-12-29 2025-01-21 주식회사 한성시스코 척 회전부가 구비된 스테이지장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0873193A (ja) * 1994-09-02 1996-03-19 Tokyo Electron Ltd 搬送装置
JP2005051188A (ja) * 2003-07-28 2005-02-24 Yasuhito Itagaki 搬送工程レイアウト方法並び複合機能ロボット及び完全密閉構造を成したクランプ方式アライナ装置。
JP2008004695A (ja) * 2006-06-21 2008-01-10 Micronics Japan Co Ltd 検査ステージ及び検査装置
TW201145425A (en) * 2010-04-07 2011-12-16 Yaskawa Denki Seisakusho Kk θ Z drive apparatus and stage apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000002236U (ko) * 1998-06-19 2000-02-07 김영환 직선 운동식 모터
JP4032911B2 (ja) * 2002-10-02 2008-01-16 豊和工業株式会社 リニアモータ駆動式工作機械の主軸ヘッド落下防止装置
KR100637590B1 (ko) * 2005-07-08 2006-10-23 주식회사 탑 엔지니어링 평판표시장치 제조용 기판 스크라이빙장치
KR100779029B1 (ko) * 2006-12-15 2007-11-23 세크론 주식회사 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0873193A (ja) * 1994-09-02 1996-03-19 Tokyo Electron Ltd 搬送装置
JP2005051188A (ja) * 2003-07-28 2005-02-24 Yasuhito Itagaki 搬送工程レイアウト方法並び複合機能ロボット及び完全密閉構造を成したクランプ方式アライナ装置。
JP2008004695A (ja) * 2006-06-21 2008-01-10 Micronics Japan Co Ltd 検査ステージ及び検査装置
TW201145425A (en) * 2010-04-07 2011-12-16 Yaskawa Denki Seisakusho Kk θ Z drive apparatus and stage apparatus

Also Published As

Publication number Publication date
JP2014003281A (ja) 2014-01-09
KR20130126328A (ko) 2013-11-20
KR101379834B1 (ko) 2014-04-01
JP6261185B2 (ja) 2018-01-17
TW201400388A (zh) 2014-01-01

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