JP6257803B2 - 光起電力装置の製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 55
- 238000000034 method Methods 0.000 title claims description 43
- 239000005368 silicate glass Substances 0.000 claims description 127
- 239000000758 substrate Substances 0.000 claims description 110
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 102
- 229910052710 silicon Inorganic materials 0.000 claims description 102
- 239000010703 silicon Substances 0.000 claims description 102
- 239000012535 impurity Substances 0.000 claims description 65
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 18
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 description 104
- 239000010408 film Substances 0.000 description 50
- 230000000052 comparative effect Effects 0.000 description 27
- 238000002161 passivation Methods 0.000 description 26
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 23
- 229910052698 phosphorus Inorganic materials 0.000 description 23
- 239000011574 phosphorus Substances 0.000 description 23
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 20
- 229910052796 boron Inorganic materials 0.000 description 20
- 238000010438 heat treatment Methods 0.000 description 20
- 230000007547 defect Effects 0.000 description 13
- 239000005360 phosphosilicate glass Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 238000000137 annealing Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 229910052681 coesite Inorganic materials 0.000 description 5
- 229910052906 cristobalite Inorganic materials 0.000 description 5
- 230000002950 deficient Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 229910052682 stishovite Inorganic materials 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 229910052905 tridymite Inorganic materials 0.000 description 5
- 239000012670 alkaline solution Substances 0.000 description 4
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 4
- 230000005587 bubbling Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 229910019213 POCl3 Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000007429 general method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Photovoltaic Devices (AREA)
Description
まず、本発明の実施の形態1による光起電力装置の構成について説明する。なお、本実施の形態1において、光起電力装置は太陽電池セルであるものとして説明する。
図2のステップS102(図4に対応)において、シリコン基板1の第1の主面上にシリケートガラス8,9を形成するときに、シリコン基板1の第2の主面上にシリケートガラス8,9が回り込んで形成される。本発明の実施の形態2では、シリコン基板1の第2の主面上に形成されたシリケートガラス8,9を除去することを特徴とする。その他の製造方法については、実施の形態1と同様であるため、ここでは説明を省略する。
実施の形態1,2では、第1の拡散層2を形成した後にシリケートガラス10を形成する場合について説明した。本発明の実施の形態3では、第1の拡散層2を形成する前にシリケートガラス10を形成することを特徴とする。その他の製造方法については、実施の形態2と同様であるため、ここでは説明を省略する。
本発明の実施の形態4では、シリケートガラス10,11を塗布によって部分的に形成することを特徴とする。その他の製造方法については、実施の形態1と同様であるため、ここでは説明を省略する。
まず、本発明の実施の形態5による光起電力装置の構成について説明する。なお、本実施の形態5において、光起電力装置は太陽電池セルであるものとして説明する。
Claims (11)
- (a)シリコン基板(1,16)の第1の主面にピラミッド状のテクスチャーを形成する工程と、
(b)前記第1の主面上に第1の導電型の不純物を含む第1のシリケートガラス(8,23)を形成する工程と、
(c)前記第1のシリケートガラス(8,23)上に導電型不純物を含まない第2のシリケートガラス(9,24)を形成する工程と、
(d)前記第1のシリケートガラス(8,23)に含まれる前記第1の導電型の不純物を前記シリコン基板(1,16)の前記第1の主面に拡散させる工程と、
(e)前記第2のシリケートガラス(9,24)上に前記第1の導電型の不純物を含む第3のシリケートガラス(10,25)を形成する工程と、
(f)前記工程(e)の後、前記シリコン基板(1,16)の前記第1の主面とは反対側の第2の主面に第2の導電型の不純物を拡散させる工程と、
を備える、光起電力装置の製造方法。 - 前記シリコン基板の導電型がn型である場合において、前記第1の導電型はp型であり、前記第2の導電型はn型であることを特徴とする、請求項1に記載の光起電力装置の製造方法。
- 前記シリコン基板の導電型がp型である場合において、前記第1の導電型はn型であり、前記第2の導電型はp型であることを特徴とする、請求項1に記載の光起電力装置の製造方法。
- 前記工程(f)の前において、
(g)前記第3のシリケートガラス(10,25)上に、導電性を付与する不純物を含まない第4のシリケートガラス(11,26)を形成する工程をさらに備えることを特徴とする、請求項1に記載の光起電力装置の製造方法。 - 前記工程(b)において、
前記第1のシリケートガラス(8,23)は、CVDによって形成されることを特徴とする、請求項1に記載の光起電力装置の製造方法。 - 前記工程(c)の後、
(h)前記シリコン基板(1,16)の前記第2の主面上に形成された前記第1のシリケートガラス(8,23)および前記第2のシリケートガラス(9,24)を除去する工程をさらに備えることを特徴とする、請求項1に記載の光起電力装置の製造方法。 - 前記工程(h)において、
前記除去は、フッ化水素酸を用いて行われることを特徴とする、請求項6に記載の光起電力装置の製造方法。 - 前記工程(e)において、前記第3のシリケートガラス(10,25)は、スパッタリングによって形成されることを特徴とする、請求項1に記載の光起電力装置の製造方法。
- 前記工程(g)において、前記第4のシリケートガラス(11,26)は、スパッタリングによって形成されることを特徴とする、請求項4に記載の光起電力装置の製造方法。
- 前記工程(e)において、前記第3のシリケートガラス(10,25)は、前記シリコン基板(1,16)の端部に形成されることを特徴とする、請求項1に記載の光起電力装置の製造方法。
- 前記工程(g)において、前記第4のシリケートガラス(11,26)は、前記シリコン基板(1,16)の端部に形成されることを特徴とする、請求項4に記載の光起電力装置の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014254762 | 2014-12-17 | ||
JP2014254762 | 2014-12-17 | ||
PCT/JP2015/063432 WO2016098368A1 (ja) | 2014-12-17 | 2015-05-11 | 光起電力装置の製造方法 |
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JPWO2016098368A1 JPWO2016098368A1 (ja) | 2017-04-27 |
JP6257803B2 true JP6257803B2 (ja) | 2018-01-10 |
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JP2016564695A Expired - Fee Related JP6257803B2 (ja) | 2014-12-17 | 2015-05-11 | 光起電力装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20170330990A1 (ja) |
JP (1) | JP6257803B2 (ja) |
CN (1) | CN107155378B (ja) |
TW (1) | TWI578560B (ja) |
WO (1) | WO2016098368A1 (ja) |
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CN110391317B (zh) * | 2019-07-29 | 2021-03-09 | 通威太阳能(成都)有限公司 | 一种单晶硅片的绒面制备方法 |
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US7838400B2 (en) * | 2008-07-17 | 2010-11-23 | Applied Materials, Inc. | Rapid thermal oxide passivated solar cell with improved junction |
DE102008056456A1 (de) * | 2008-11-07 | 2010-06-17 | Centrotherm Photovoltaics Technology Gmbh | Verfahren zur Herstellung einer Solarzelle mit einer zweistufigen Dotierung |
US20130089944A1 (en) * | 2010-06-11 | 2013-04-11 | Amtech Systems, Inc. | Solar cell silicon wafer process |
CN102364698A (zh) * | 2011-06-30 | 2012-02-29 | 常州天合光能有限公司 | 扩散氧化层二次利用的太阳能电池制备方法 |
US20130213469A1 (en) * | 2011-08-05 | 2013-08-22 | Solexel, Inc. | High efficiency solar cell structures and manufacturing methods |
JP2013187462A (ja) * | 2012-03-09 | 2013-09-19 | Sharp Corp | 光電変換素子および光電変換素子の製造方法 |
US9412895B2 (en) * | 2012-04-04 | 2016-08-09 | Samsung Sdi Co., Ltd. | Method of manufacturing photoelectric device |
CN102655178B (zh) * | 2012-04-28 | 2015-08-26 | 法国圣戈班玻璃公司 | 盖板及其制造方法、太阳能玻璃、光伏器件 |
US9685581B2 (en) * | 2013-04-24 | 2017-06-20 | Mitsubishi Electric Corporation | Manufacturing method of solar cell |
CN104037245B (zh) * | 2014-07-01 | 2017-11-10 | 中国科学院宁波材料技术与工程研究所 | 具有带负电荷抗反射层的太阳电池及其制法 |
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2015
- 2015-05-11 WO PCT/JP2015/063432 patent/WO2016098368A1/ja active Application Filing
- 2015-05-11 CN CN201580066670.6A patent/CN107155378B/zh not_active Expired - Fee Related
- 2015-05-11 US US15/522,458 patent/US20170330990A1/en not_active Abandoned
- 2015-05-11 JP JP2016564695A patent/JP6257803B2/ja not_active Expired - Fee Related
- 2015-07-02 TW TW104121455A patent/TWI578560B/zh not_active IP Right Cessation
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Publication number | Publication date |
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US20170330990A1 (en) | 2017-11-16 |
CN107155378B (zh) | 2019-05-10 |
TWI578560B (zh) | 2017-04-11 |
JPWO2016098368A1 (ja) | 2017-04-27 |
CN107155378A (zh) | 2017-09-12 |
WO2016098368A1 (ja) | 2016-06-23 |
TW201624753A (zh) | 2016-07-01 |
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