JP6255992B2 - 分光測定システム、分光モジュール、及び、位置ズレ検出方法 - Google Patents

分光測定システム、分光モジュール、及び、位置ズレ検出方法 Download PDF

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Publication number
JP6255992B2
JP6255992B2 JP2013270763A JP2013270763A JP6255992B2 JP 6255992 B2 JP6255992 B2 JP 6255992B2 JP 2013270763 A JP2013270763 A JP 2013270763A JP 2013270763 A JP2013270763 A JP 2013270763A JP 6255992 B2 JP6255992 B2 JP 6255992B2
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unit
spectroscopic
imaging device
measurement system
spectroscopic measurement
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Japanese (ja)
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JP2015125085A5 (enExample
JP2015125085A (ja
Inventor
佐野　朗
朗 佐野
隆 長手
隆 長手
和▲徳▼ 櫻井
和▲徳▼ 櫻井
望 廣久保
望 廣久保
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2013270763A priority Critical patent/JP6255992B2/ja
Priority to US14/580,848 priority patent/US9797774B2/en
Priority to CN201410815568.9A priority patent/CN104748846B/zh
Publication of JP2015125085A publication Critical patent/JP2015125085A/ja
Publication of JP2015125085A5 publication Critical patent/JP2015125085A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0235—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for replacing an element by another, for replacing a filter or a grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0272—Handheld
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2013270763A 2013-12-27 2013-12-27 分光測定システム、分光モジュール、及び、位置ズレ検出方法 Active JP6255992B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013270763A JP6255992B2 (ja) 2013-12-27 2013-12-27 分光測定システム、分光モジュール、及び、位置ズレ検出方法
US14/580,848 US9797774B2 (en) 2013-12-27 2014-12-23 Spectrometry system, spectroscopic module, and positional deviation detection method
CN201410815568.9A CN104748846B (zh) 2013-12-27 2014-12-24 分光测量系统、分光模块以及位置偏离检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013270763A JP6255992B2 (ja) 2013-12-27 2013-12-27 分光測定システム、分光モジュール、及び、位置ズレ検出方法

Publications (3)

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JP2015125085A JP2015125085A (ja) 2015-07-06
JP2015125085A5 JP2015125085A5 (enExample) 2017-01-26
JP6255992B2 true JP6255992B2 (ja) 2018-01-10

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US (1) US9797774B2 (enExample)
JP (1) JP6255992B2 (enExample)
CN (1) CN104748846B (enExample)

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Also Published As

Publication number Publication date
CN104748846B (zh) 2018-01-05
CN104748846A (zh) 2015-07-01
US20150185081A1 (en) 2015-07-02
JP2015125085A (ja) 2015-07-06
US9797774B2 (en) 2017-10-24

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