JP6247054B2 - 弾性波デバイス及びその製法 - Google Patents

弾性波デバイス及びその製法 Download PDF

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JP6247054B2
JP6247054B2 JP2013181443A JP2013181443A JP6247054B2 JP 6247054 B2 JP6247054 B2 JP 6247054B2 JP 2013181443 A JP2013181443 A JP 2013181443A JP 2013181443 A JP2013181443 A JP 2013181443A JP 6247054 B2 JP6247054 B2 JP 6247054B2
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substrate
piezoelectric substrate
acoustic wave
wave device
waviness
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JP2015050653A (ja
Inventor
章 浜島
章 浜島
知義 多井
知義 多井
裕二 堀
裕二 堀
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NGK Insulators Ltd
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NGK Insulators Ltd
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Priority to JP2013181443A priority Critical patent/JP6247054B2/ja
Priority to CN201420419957.5U priority patent/CN204334515U/zh
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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2013181443A 2013-09-02 2013-09-02 弾性波デバイス及びその製法 Active JP6247054B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013181443A JP6247054B2 (ja) 2013-09-02 2013-09-02 弾性波デバイス及びその製法
CN201420419957.5U CN204334515U (zh) 2013-09-02 2014-07-28 弹性波装置用复合基板以及弹性波装置

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JP2013181443A JP6247054B2 (ja) 2013-09-02 2013-09-02 弾性波デバイス及びその製法

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JP2015050653A JP2015050653A (ja) 2015-03-16
JP6247054B2 true JP6247054B2 (ja) 2017-12-13

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CN (1) CN204334515U (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6252562B2 (ja) 2015-07-31 2017-12-27 トヨタ自動車株式会社 ウインドシールドガラスの周辺構造
WO2017047605A1 (ja) * 2015-09-15 2017-03-23 日本碍子株式会社 複合基板及び圧電基板の厚み傾向推定方法
JP6097896B1 (ja) * 2015-09-15 2017-03-15 日本碍子株式会社 複合基板及び圧電基板の厚み傾向推定方法
JP6250856B1 (ja) * 2016-07-20 2017-12-20 信越化学工業株式会社 表面弾性波デバイス用複合基板及びその製造方法とこの複合基板を用いた表面弾性波デバイス
KR20240108517A (ko) * 2022-01-17 2024-07-09 엔지케이 인슐레이터 엘티디 복합 기판의 제조 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201527U (zh) * 1986-06-12 1987-12-22
JPS62297064A (ja) * 1986-06-16 1987-12-24 Rodeele Nitta Kk 半導体等のウエ−ハ保持用積層体
JP2828983B2 (ja) * 1988-02-18 1998-11-25 株式会社東芝 弾性表面波フィルタおよびその製造方法
JP3296134B2 (ja) * 1994-04-07 2002-06-24 住友電気工業株式会社 ダイヤモンドウエハ−とその製造方法
JP2003017983A (ja) * 2001-06-28 2003-01-17 Kyocera Corp 弾性波装置用ウエハ及びそれを用いた弾性波装置
JP4170617B2 (ja) * 2001-11-29 2008-10-22 信越化学工業株式会社 酸化物単結晶ウエーハ及びその製造方法並びに評価方法
JP2008205872A (ja) * 2007-02-21 2008-09-04 Matsushita Electric Ind Co Ltd 弾性表面波デバイス
JP2012015767A (ja) * 2010-06-30 2012-01-19 Murata Mfg Co Ltd 弾性波デバイス
CN102624352B (zh) * 2010-10-06 2015-12-09 日本碍子株式会社 复合基板的制造方法以及复合基板

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CN204334515U (zh) 2015-05-13
JP2015050653A (ja) 2015-03-16

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