JP6247054B2 - 弾性波デバイス及びその製法 - Google Patents
弾性波デバイス及びその製法 Download PDFInfo
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- JP6247054B2 JP6247054B2 JP2013181443A JP2013181443A JP6247054B2 JP 6247054 B2 JP6247054 B2 JP 6247054B2 JP 2013181443 A JP2013181443 A JP 2013181443A JP 2013181443 A JP2013181443 A JP 2013181443A JP 6247054 B2 JP6247054 B2 JP 6247054B2
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- piezoelectric substrate
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2013181443A JP6247054B2 (ja) | 2013-09-02 | 2013-09-02 | 弾性波デバイス及びその製法 |
CN201420419957.5U CN204334515U (zh) | 2013-09-02 | 2014-07-28 | 弹性波装置用复合基板以及弹性波装置 |
Applications Claiming Priority (1)
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JP2013181443A JP6247054B2 (ja) | 2013-09-02 | 2013-09-02 | 弾性波デバイス及びその製法 |
Publications (2)
Publication Number | Publication Date |
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JP2015050653A JP2015050653A (ja) | 2015-03-16 |
JP6247054B2 true JP6247054B2 (ja) | 2017-12-13 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013181443A Active JP6247054B2 (ja) | 2013-09-02 | 2013-09-02 | 弾性波デバイス及びその製法 |
Country Status (2)
Country | Link |
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JP (1) | JP6247054B2 (zh) |
CN (1) | CN204334515U (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6252562B2 (ja) | 2015-07-31 | 2017-12-27 | トヨタ自動車株式会社 | ウインドシールドガラスの周辺構造 |
WO2017047605A1 (ja) * | 2015-09-15 | 2017-03-23 | 日本碍子株式会社 | 複合基板及び圧電基板の厚み傾向推定方法 |
JP6097896B1 (ja) * | 2015-09-15 | 2017-03-15 | 日本碍子株式会社 | 複合基板及び圧電基板の厚み傾向推定方法 |
JP6250856B1 (ja) * | 2016-07-20 | 2017-12-20 | 信越化学工業株式会社 | 表面弾性波デバイス用複合基板及びその製造方法とこの複合基板を用いた表面弾性波デバイス |
KR20240108517A (ko) * | 2022-01-17 | 2024-07-09 | 엔지케이 인슐레이터 엘티디 | 복합 기판의 제조 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201527U (zh) * | 1986-06-12 | 1987-12-22 | ||
JPS62297064A (ja) * | 1986-06-16 | 1987-12-24 | Rodeele Nitta Kk | 半導体等のウエ−ハ保持用積層体 |
JP2828983B2 (ja) * | 1988-02-18 | 1998-11-25 | 株式会社東芝 | 弾性表面波フィルタおよびその製造方法 |
JP3296134B2 (ja) * | 1994-04-07 | 2002-06-24 | 住友電気工業株式会社 | ダイヤモンドウエハ−とその製造方法 |
JP2003017983A (ja) * | 2001-06-28 | 2003-01-17 | Kyocera Corp | 弾性波装置用ウエハ及びそれを用いた弾性波装置 |
JP4170617B2 (ja) * | 2001-11-29 | 2008-10-22 | 信越化学工業株式会社 | 酸化物単結晶ウエーハ及びその製造方法並びに評価方法 |
JP2008205872A (ja) * | 2007-02-21 | 2008-09-04 | Matsushita Electric Ind Co Ltd | 弾性表面波デバイス |
JP2012015767A (ja) * | 2010-06-30 | 2012-01-19 | Murata Mfg Co Ltd | 弾性波デバイス |
CN102624352B (zh) * | 2010-10-06 | 2015-12-09 | 日本碍子株式会社 | 复合基板的制造方法以及复合基板 |
-
2013
- 2013-09-02 JP JP2013181443A patent/JP6247054B2/ja active Active
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2014
- 2014-07-28 CN CN201420419957.5U patent/CN204334515U/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN204334515U (zh) | 2015-05-13 |
JP2015050653A (ja) | 2015-03-16 |
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