JP6240229B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP6240229B2
JP6240229B2 JP2016006803A JP2016006803A JP6240229B2 JP 6240229 B2 JP6240229 B2 JP 6240229B2 JP 2016006803 A JP2016006803 A JP 2016006803A JP 2016006803 A JP2016006803 A JP 2016006803A JP 6240229 B2 JP6240229 B2 JP 6240229B2
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JP
Japan
Prior art keywords
pair
pump
vacuum pump
gears
rotors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016006803A
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English (en)
Japanese (ja)
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JP2016156373A (ja
JP2016156373A5 (enExample
Inventor
善徳 小島
善徳 小島
吉田　真也
真也 吉田
篤志 塩川
篤志 塩川
関口　信一
信一 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to TW105104895A priority Critical patent/TWI649498B/zh
Priority to EP16157019.7A priority patent/EP3061973B1/en
Priority to KR1020160021698A priority patent/KR101791519B1/ko
Publication of JP2016156373A publication Critical patent/JP2016156373A/ja
Publication of JP2016156373A5 publication Critical patent/JP2016156373A5/ja
Application granted granted Critical
Publication of JP6240229B2 publication Critical patent/JP6240229B2/ja
Active legal-status Critical Current
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  • Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Gears, Cams (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)
JP2016006803A 2015-02-25 2016-01-18 真空ポンプ Active JP6240229B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW105104895A TWI649498B (zh) 2015-02-25 2016-02-19 真空泵
EP16157019.7A EP3061973B1 (en) 2015-02-25 2016-02-23 Vacuum pump
KR1020160021698A KR101791519B1 (ko) 2015-02-25 2016-02-24 진공 펌프

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015035641 2015-02-25
JP2015035641 2015-02-25

Publications (3)

Publication Number Publication Date
JP2016156373A JP2016156373A (ja) 2016-09-01
JP2016156373A5 JP2016156373A5 (enExample) 2017-06-08
JP6240229B2 true JP6240229B2 (ja) 2017-11-29

Family

ID=56825470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016006803A Active JP6240229B2 (ja) 2015-02-25 2016-01-18 真空ポンプ

Country Status (3)

Country Link
JP (1) JP6240229B2 (enExample)
KR (1) KR101791519B1 (enExample)
TW (1) TWI649498B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018210922A1 (de) * 2018-07-03 2020-01-09 Leybold Gmbh Zwei- oder Mehrwellen-Vakuumpumpe
CN111981104B (zh) * 2020-08-20 2023-01-24 台州长城机械制造有限公司 一种传动齿轮润滑机构
CN114135485B (zh) * 2022-01-10 2024-04-19 江苏航空职业技术学院 一种环状磁力驱动氢气循环泵

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004204855A (ja) * 1992-09-03 2004-07-22 Matsushita Electric Ind Co Ltd 真空排気装置
JP3216281B2 (ja) * 1992-12-14 2001-10-09 松下電器産業株式会社 歯車ポンプ
JPH0828471A (ja) * 1994-07-11 1996-01-30 Matsushita Electric Ind Co Ltd 容積型ポンプ
JP3315581B2 (ja) 1995-03-20 2002-08-19 株式会社荏原製作所 真空ポンプ
EP0733804B1 (en) * 1995-03-20 2002-12-18 Ebara Corporation Vacuum pump
EP1061260A1 (de) * 1999-05-18 2000-12-20 Sterling Fluid Systems (Germany) GmbH Verdrängermaschine für kompressible Medien
JP4014336B2 (ja) 1999-07-16 2007-11-28 株式会社荏原製作所 ２軸同期反転駆動モータ
EP1552150B1 (en) * 2002-10-04 2015-12-23 Ebara Corporation Screw pump and method of operating the same
JP4130956B2 (ja) * 2005-04-08 2008-08-13 ワタナベ株式会社 遊星運動式真空撹拌脱泡装置
JP5009634B2 (ja) * 2006-01-31 2012-08-22 株式会社荏原製作所 真空ポンプユニット
JP2009257161A (ja) * 2008-04-15 2009-11-05 Toyota Motor Corp タイミングギアを含む駆動力伝達機構
JP5133224B2 (ja) * 2008-11-26 2013-01-30 株式会社荏原製作所 真空ポンプユニット
DE102010045881A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
TWI649498B (zh) 2019-02-01
TW201641823A (zh) 2016-12-01
JP2016156373A (ja) 2016-09-01
KR101791519B1 (ko) 2017-10-30
KR20160103940A (ko) 2016-09-02

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