TWI649498B - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
TWI649498B
TWI649498B TW105104895A TW105104895A TWI649498B TW I649498 B TWI649498 B TW I649498B TW 105104895 A TW105104895 A TW 105104895A TW 105104895 A TW105104895 A TW 105104895A TW I649498 B TWI649498 B TW I649498B
Authority
TW
Taiwan
Prior art keywords
pair
pump
rotors
vacuum pump
gears
Prior art date
Application number
TW105104895A
Other languages
English (en)
Chinese (zh)
Other versions
TW201641823A (zh
Inventor
小島善德
吉田真也
塩川篤志
関口信一
Original Assignee
日商荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商荏原製作所股份有限公司 filed Critical 日商荏原製作所股份有限公司
Publication of TW201641823A publication Critical patent/TW201641823A/zh
Application granted granted Critical
Publication of TWI649498B publication Critical patent/TWI649498B/zh

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  • Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Gears, Cams (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)
TW105104895A 2015-02-25 2016-02-19 真空泵 TWI649498B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2015-035641 2015-02-25
JP2015035641 2015-02-25
JP2016006803A JP6240229B2 (ja) 2015-02-25 2016-01-18 真空ポンプ
JP2016-006803 2016-01-18

Publications (2)

Publication Number Publication Date
TW201641823A TW201641823A (zh) 2016-12-01
TWI649498B true TWI649498B (zh) 2019-02-01

Family

ID=56825470

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105104895A TWI649498B (zh) 2015-02-25 2016-02-19 真空泵

Country Status (3)

Country Link
JP (1) JP6240229B2 (enExample)
KR (1) KR101791519B1 (enExample)
TW (1) TWI649498B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018210922A1 (de) * 2018-07-03 2020-01-09 Leybold Gmbh Zwei- oder Mehrwellen-Vakuumpumpe
CN111981104B (zh) * 2020-08-20 2023-01-24 台州长城机械制造有限公司 一种传动齿轮润滑机构
CN114135485B (zh) * 2022-01-10 2024-04-19 江苏航空职业技术学院 一种环状磁力驱动氢气循环泵

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0828471A (ja) * 1994-07-11 1996-01-30 Matsushita Electric Ind Co Ltd 容積型ポンプ
JP2004204855A (ja) * 1992-09-03 2004-07-22 Matsushita Electric Ind Co Ltd 真空排気装置
JP2010127157A (ja) * 2008-11-26 2010-06-10 Ebara Corp ドライ真空ポンプユニット

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3216281B2 (ja) * 1992-12-14 2001-10-09 松下電器産業株式会社 歯車ポンプ
JP3315581B2 (ja) 1995-03-20 2002-08-19 株式会社荏原製作所 真空ポンプ
EP0733804B1 (en) * 1995-03-20 2002-12-18 Ebara Corporation Vacuum pump
EP1061260A1 (de) * 1999-05-18 2000-12-20 Sterling Fluid Systems (Germany) GmbH Verdrängermaschine für kompressible Medien
JP4014336B2 (ja) 1999-07-16 2007-11-28 株式会社荏原製作所 ２軸同期反転駆動モータ
EP1552150B1 (en) * 2002-10-04 2015-12-23 Ebara Corporation Screw pump and method of operating the same
JP4130956B2 (ja) * 2005-04-08 2008-08-13 ワタナベ株式会社 遊星運動式真空撹拌脱泡装置
JP5009634B2 (ja) * 2006-01-31 2012-08-22 株式会社荏原製作所 真空ポンプユニット
JP2009257161A (ja) * 2008-04-15 2009-11-05 Toyota Motor Corp タイミングギアを含む駆動力伝達機構
DE102010045881A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004204855A (ja) * 1992-09-03 2004-07-22 Matsushita Electric Ind Co Ltd 真空排気装置
JPH0828471A (ja) * 1994-07-11 1996-01-30 Matsushita Electric Ind Co Ltd 容積型ポンプ
JP2010127157A (ja) * 2008-11-26 2010-06-10 Ebara Corp ドライ真空ポンプユニット

Also Published As

Publication number Publication date
TW201641823A (zh) 2016-12-01
JP2016156373A (ja) 2016-09-01
JP6240229B2 (ja) 2017-11-29
KR101791519B1 (ko) 2017-10-30
KR20160103940A (ko) 2016-09-02

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