JP2016156373A5 - - Google Patents

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Publication number
JP2016156373A5
JP2016156373A5 JP2016006803A JP2016006803A JP2016156373A5 JP 2016156373 A5 JP2016156373 A5 JP 2016156373A5 JP 2016006803 A JP2016006803 A JP 2016006803A JP 2016006803 A JP2016006803 A JP 2016006803A JP 2016156373 A5 JP2016156373 A5 JP 2016156373A5
Authority
JP
Japan
Prior art keywords
pair
vacuum pump
gears
rotors
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016006803A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016156373A (ja
JP6240229B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to TW105104895A priority Critical patent/TWI649498B/zh
Priority to EP16157019.7A priority patent/EP3061973B1/en
Priority to KR1020160021698A priority patent/KR101791519B1/ko
Publication of JP2016156373A publication Critical patent/JP2016156373A/ja
Publication of JP2016156373A5 publication Critical patent/JP2016156373A5/ja
Application granted granted Critical
Publication of JP6240229B2 publication Critical patent/JP6240229B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016006803A 2015-02-25 2016-01-18 真空ポンプ Active JP6240229B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW105104895A TWI649498B (zh) 2015-02-25 2016-02-19 真空泵
EP16157019.7A EP3061973B1 (en) 2015-02-25 2016-02-23 Vacuum pump
KR1020160021698A KR101791519B1 (ko) 2015-02-25 2016-02-24 진공 펌프

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015035641 2015-02-25
JP2015035641 2015-02-25

Publications (3)

Publication Number Publication Date
JP2016156373A JP2016156373A (ja) 2016-09-01
JP2016156373A5 true JP2016156373A5 (enExample) 2017-06-08
JP6240229B2 JP6240229B2 (ja) 2017-11-29

Family

ID=56825470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016006803A Active JP6240229B2 (ja) 2015-02-25 2016-01-18 真空ポンプ

Country Status (3)

Country Link
JP (1) JP6240229B2 (enExample)
KR (1) KR101791519B1 (enExample)
TW (1) TWI649498B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018210922A1 (de) * 2018-07-03 2020-01-09 Leybold Gmbh Zwei- oder Mehrwellen-Vakuumpumpe
CN111981104B (zh) * 2020-08-20 2023-01-24 台州长城机械制造有限公司 一种传动齿轮润滑机构
CN114135485B (zh) * 2022-01-10 2024-04-19 江苏航空职业技术学院 一种环状磁力驱动氢气循环泵

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004204855A (ja) * 1992-09-03 2004-07-22 Matsushita Electric Ind Co Ltd 真空排気装置
JP3216281B2 (ja) * 1992-12-14 2001-10-09 松下電器産業株式会社 歯車ポンプ
JPH0828471A (ja) * 1994-07-11 1996-01-30 Matsushita Electric Ind Co Ltd 容積型ポンプ
JP3315581B2 (ja) 1995-03-20 2002-08-19 株式会社荏原製作所 真空ポンプ
EP0733804B1 (en) * 1995-03-20 2002-12-18 Ebara Corporation Vacuum pump
EP1061260A1 (de) * 1999-05-18 2000-12-20 Sterling Fluid Systems (Germany) GmbH Verdrängermaschine für kompressible Medien
JP4014336B2 (ja) 1999-07-16 2007-11-28 株式会社荏原製作所 ２軸同期反転駆動モータ
EP1552150B1 (en) * 2002-10-04 2015-12-23 Ebara Corporation Screw pump and method of operating the same
JP4130956B2 (ja) * 2005-04-08 2008-08-13 ワタナベ株式会社 遊星運動式真空撹拌脱泡装置
JP5009634B2 (ja) * 2006-01-31 2012-08-22 株式会社荏原製作所 真空ポンプユニット
JP2009257161A (ja) * 2008-04-15 2009-11-05 Toyota Motor Corp タイミングギアを含む駆動力伝達機構
JP5133224B2 (ja) * 2008-11-26 2013-01-30 株式会社荏原製作所 真空ポンプユニット
DE102010045881A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

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