JP6214080B2 - 空隙を有する半導体パッケージ構造体および形成方法 - Google Patents

空隙を有する半導体パッケージ構造体および形成方法 Download PDF

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Publication number
JP6214080B2
JP6214080B2 JP2013128001A JP2013128001A JP6214080B2 JP 6214080 B2 JP6214080 B2 JP 6214080B2 JP 2013128001 A JP2013128001 A JP 2013128001A JP 2013128001 A JP2013128001 A JP 2013128001A JP 6214080 B2 JP6214080 B2 JP 6214080B2
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Japan
Prior art keywords
package substrate
semiconductor die
top surface
package
package structure
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JP2013128001A
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English (en)
Japanese (ja)
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JP2014011456A (ja
JP2014011456A5 (https=
Inventor
エス．ユーリン トレント
エス．ユーリン トレント
ジェイ．カーペンター バートン
ジェイ．カーペンター バートン
ピー．ウィルカーソン ブレット
ピー．ウィルカーソン ブレット
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NXP USA Inc
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NXP USA Inc
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Publication of JP2014011456A5 publication Critical patent/JP2014011456A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • H10W74/117—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07302—Connecting or disconnecting of die-attach connectors using an auxiliary member
    • H10W72/07304—Connecting or disconnecting of die-attach connectors using an auxiliary member the auxiliary member being temporary, e.g. a sacrificial coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07502—Connecting or disconnecting of bond wires using an auxiliary member
    • H10W72/07504—Connecting or disconnecting of bond wires using an auxiliary member the auxiliary member being temporary, e.g. a sacrificial coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/127—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed characterised by arrangements for sealing or adhesion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/142—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations exposing the passive side of the semiconductor body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP2013128001A 2012-06-29 2013-06-18 空隙を有する半導体パッケージ構造体および形成方法 Active JP6214080B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/537,388 2012-06-29
US13/537,388 US8704370B2 (en) 2012-06-29 2012-06-29 Semiconductor package structure having an air gap and method for forming

Publications (3)

Publication Number Publication Date
JP2014011456A JP2014011456A (ja) 2014-01-20
JP2014011456A5 JP2014011456A5 (https=) 2016-08-04
JP6214080B2 true JP6214080B2 (ja) 2017-10-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013128001A Active JP6214080B2 (ja) 2012-06-29 2013-06-18 空隙を有する半導体パッケージ構造体および形成方法

Country Status (3)

Country Link
US (1) US8704370B2 (https=)
JP (1) JP6214080B2 (https=)
CN (1) CN103531548B (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10068817B2 (en) * 2016-03-18 2018-09-04 Macom Technology Solutions Holdings, Inc. Semiconductor package
US11211305B2 (en) 2016-04-01 2021-12-28 Texas Instruments Incorporated Apparatus and method to support thermal management of semiconductor-based components
US10861796B2 (en) 2016-05-10 2020-12-08 Texas Instruments Incorporated Floating die package
US10179730B2 (en) 2016-12-08 2019-01-15 Texas Instruments Incorporated Electronic sensors with sensor die in package structure cavity
US9761543B1 (en) 2016-12-20 2017-09-12 Texas Instruments Incorporated Integrated circuits with thermal isolation and temperature regulation
US10074639B2 (en) 2016-12-30 2018-09-11 Texas Instruments Incorporated Isolator integrated circuits with package structure cavity and fabrication methods
US10411150B2 (en) 2016-12-30 2019-09-10 Texas Instruments Incorporated Optical isolation systems and circuits and photon detectors with extended lateral P-N junctions
US9865537B1 (en) * 2016-12-30 2018-01-09 Texas Instruments Incorporated Methods and apparatus for integrated circuit failsafe fuse package with arc arrest
US9929110B1 (en) 2016-12-30 2018-03-27 Texas Instruments Incorporated Integrated circuit wave device and method
US10121847B2 (en) 2017-03-17 2018-11-06 Texas Instruments Incorporated Galvanic isolation device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5474958A (en) 1993-05-04 1995-12-12 Motorola, Inc. Method for making semiconductor device having no die supporting surface
JP3918303B2 (ja) * 1998-05-29 2007-05-23 ソニー株式会社 半導体パッケージ
JP3654116B2 (ja) * 2000-03-10 2005-06-02 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
TWI256092B (en) * 2004-12-02 2006-06-01 Siliconware Precision Industries Co Ltd Semiconductor package and fabrication method thereof
JP4667076B2 (ja) * 2005-03-04 2011-04-06 ソニーケミカル＆インフォメーションデバイス株式会社 機能素子実装モジュールの実装方法
KR100753528B1 (ko) * 2006-01-04 2007-08-30 삼성전자주식회사 웨이퍼 레벨 패키지 및 이의 제조 방법
US7651891B1 (en) 2007-08-09 2010-01-26 National Semiconductor Corporation Integrated circuit package with stress reduction
JP5067107B2 (ja) * 2007-10-12 2012-11-07 富士通株式会社 回路基板および半導体装置
JP2010040890A (ja) * 2008-08-07 2010-02-18 Yokogawa Electric Corp フリップチップｂｇａ基板
JP5590814B2 (ja) * 2009-03-30 2014-09-17 ピーエスフォー ルクスコ エスエイアールエル 半導体装置及びその製造方法
JP2010245337A (ja) * 2009-04-07 2010-10-28 Elpida Memory Inc 半導体装置及びその製造方法
JP2011014615A (ja) * 2009-06-30 2011-01-20 Denso Corp センサ装置およびその製造方法
DE102010001711A1 (de) * 2010-02-09 2011-08-11 Robert Bosch GmbH, 70469 Halbleiter-Bauelement und entsprechendes Herstellungsverfahren

Also Published As

Publication number Publication date
JP2014011456A (ja) 2014-01-20
CN103531548A (zh) 2014-01-22
US8704370B2 (en) 2014-04-22
US20140001632A1 (en) 2014-01-02
CN103531548B (zh) 2019-03-29

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