JP6209886B2 - 振動片、振動子、発振器、電子機器および移動体 - Google Patents

振動片、振動子、発振器、電子機器および移動体 Download PDF

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Publication number
JP6209886B2
JP6209886B2 JP2013149982A JP2013149982A JP6209886B2 JP 6209886 B2 JP6209886 B2 JP 6209886B2 JP 2013149982 A JP2013149982 A JP 2013149982A JP 2013149982 A JP2013149982 A JP 2013149982A JP 6209886 B2 JP6209886 B2 JP 6209886B2
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base
resonator element
arm
element according
width
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Japanese (ja)
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JP2015023423A (ja
JP2015023423A5 (https=
Inventor
明法 山田
明法 山田
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013149982A priority Critical patent/JP6209886B2/ja
Priority to CN201410338689.9A priority patent/CN104300934B/zh
Priority to US14/335,217 priority patent/US9178470B2/en
Publication of JP2015023423A publication Critical patent/JP2015023423A/ja
Publication of JP2015023423A5 publication Critical patent/JP2015023423A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2013149982A 2013-07-18 2013-07-18 振動片、振動子、発振器、電子機器および移動体 Active JP6209886B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013149982A JP6209886B2 (ja) 2013-07-18 2013-07-18 振動片、振動子、発振器、電子機器および移動体
CN201410338689.9A CN104300934B (zh) 2013-07-18 2014-07-16 振动片、振子、振荡器、电子设备以及移动体
US14/335,217 US9178470B2 (en) 2013-07-18 2014-07-18 Resonator element, resonator, oscillator, electronic device, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013149982A JP6209886B2 (ja) 2013-07-18 2013-07-18 振動片、振動子、発振器、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2015023423A JP2015023423A (ja) 2015-02-02
JP2015023423A5 JP2015023423A5 (https=) 2016-05-19
JP6209886B2 true JP6209886B2 (ja) 2017-10-11

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JP2013149982A Active JP6209886B2 (ja) 2013-07-18 2013-07-18 振動片、振動子、発振器、電子機器および移動体

Country Status (3)

Country Link
US (1) US9178470B2 (https=)
JP (1) JP6209886B2 (https=)
CN (1) CN104300934B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634742B (zh) * 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
WO2015075899A1 (ja) * 2013-11-22 2015-05-28 パナソニックＩｐマネジメント株式会社 角速度センサ素子および角速度センサ
JP6519995B2 (ja) * 2014-06-30 2019-05-29 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体
JP2016146595A (ja) * 2015-02-09 2016-08-12 セイコーエプソン株式会社 振動片の製造方法、ウェハー、振動片、振動子、発振器、リアルタイムクロック、電子機器、および移動体
JP7026444B2 (ja) * 2017-03-06 2022-02-28 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
JP7054177B2 (ja) * 2018-02-07 2022-04-13 リバーエレテック株式会社 水晶デバイス及びその製造方法
WO2020067484A1 (ja) * 2018-09-28 2020-04-02 株式会社村田製作所 共振子及び共振装置
JP7553412B2 (ja) * 2021-07-30 2024-09-18 日本電波工業株式会社 水晶振動子

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Publication number Priority date Publication date Assignee Title
EP0503807B1 (en) * 1991-03-12 1996-09-25 New Sd, Inc. Single ended tuning fork inertial sensor and method
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
JP4288914B2 (ja) * 2002-08-21 2009-07-01 パナソニック株式会社 共振デバイスの製造方法
JP4033100B2 (ja) * 2003-09-29 2008-01-16 セイコーエプソン株式会社 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4658625B2 (ja) * 2005-01-25 2011-03-23 日本電波工業株式会社 角速度センサ及びその製造方法
JP2007201936A (ja) 2006-01-27 2007-08-09 Epson Toyocom Corp 圧電振動片と圧電デバイス
JP4525623B2 (ja) * 2006-03-23 2010-08-18 エプソントヨコム株式会社 圧電振動片の製造方法
JP2008048275A (ja) * 2006-08-18 2008-02-28 Epson Toyocom Corp 圧電振動片および圧電デバイス
US7863803B2 (en) * 2007-05-30 2011-01-04 Epson Toyocom Corporation Tuning fork resonator element and tuning fork resonator
JP4407845B2 (ja) * 2007-06-19 2010-02-03 エプソントヨコム株式会社 圧電振動子及びその製造方法並びに圧電振動子用の蓋
JP5175128B2 (ja) * 2008-04-04 2013-04-03 日本電波工業株式会社 音叉型圧電振動片および圧電デバイス
JP5584500B2 (ja) * 2009-05-01 2014-09-03 日本電波工業株式会社 圧電フレーム及び圧電デバイス
CN102025342B (zh) * 2009-09-18 2014-12-17 精工爱普生株式会社 振动片、振子、振荡器、以及电子仪器
JP5482250B2 (ja) * 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス
JP5732728B2 (ja) * 2010-02-25 2015-06-10 セイコーエプソン株式会社 振動片、振動子及び発振器
JP5782707B2 (ja) 2010-12-01 2015-09-24 セイコーエプソン株式会社 電子機器
US8283988B2 (en) * 2010-02-25 2012-10-09 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5504999B2 (ja) 2010-03-17 2014-05-28 セイコーエプソン株式会社 振動片、振動子、発振器
JP2012129904A (ja) 2010-12-17 2012-07-05 Seiko Epson Corp 電子機器
US8692632B2 (en) 2010-03-17 2014-04-08 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5589517B2 (ja) 2010-04-08 2014-09-17 セイコーエプソン株式会社 振動片、振動子及び発振器
JP2011239132A (ja) 2010-05-10 2011-11-24 Seiko Epson Corp 振動片、振動子及び発振器
JP5533213B2 (ja) 2010-05-10 2014-06-25 セイコーエプソン株式会社 振動片、振動子及び発振器
EP2395661A1 (fr) * 2010-06-10 2011-12-14 The Swatch Group Research and Development Ltd. Résonateur thermocompensé aux premier et second ordres
JP5838695B2 (ja) * 2011-09-29 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5793387B2 (ja) 2011-09-30 2015-10-14 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP5823802B2 (ja) 2011-09-30 2015-11-25 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
JP5872314B2 (ja) 2012-02-13 2016-03-01 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP5910287B2 (ja) 2012-04-25 2016-04-27 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器
JP6119134B2 (ja) * 2012-07-19 2017-04-26 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器

Also Published As

Publication number Publication date
US20150022276A1 (en) 2015-01-22
CN104300934B (zh) 2018-12-04
US9178470B2 (en) 2015-11-03
CN104300934A (zh) 2015-01-21
JP2015023423A (ja) 2015-02-02

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