JP6208371B2 - 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム - Google Patents

陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム Download PDF

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JP6208371B2
JP6208371B2 JP2016544063A JP2016544063A JP6208371B2 JP 6208371 B2 JP6208371 B2 JP 6208371B2 JP 2016544063 A JP2016544063 A JP 2016544063A JP 2016544063 A JP2016544063 A JP 2016544063A JP 6208371 B2 JP6208371 B2 JP 6208371B2
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Prior art keywords
cathode
focusing
focusing electrode
electrode
emission
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JP2017502469A (ja
JP2017502469A5 (enExample
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ディヌ−グールトレル、ローラ
ホガーボルスト、エリック・ペトルス
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マッパー・リソグラフィー・アイピー・ビー．ブイ．
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/28—Dispenser-type cathodes, e.g. L-cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/029—Schematic arrangements for beam forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2229/00—Details of cathode ray tubes or electron beam tubes
    • H01J2229/48—Electron guns
    • H01J2229/4803—Electrodes
    • H01J2229/481—Focusing electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2016544063A 2013-12-30 2014-12-22 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム Active JP6208371B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361921546P 2013-12-30 2013-12-30
US61/921,546 2013-12-30
PCT/EP2014/078995 WO2015101538A1 (en) 2013-12-30 2014-12-22 Cathode arrangement, electron gun, and lithography system comprising such electron gun

Related Child Applications (1)

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JP2017171156A Division JP6462805B2 (ja) 2013-12-30 2017-09-06 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム

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JP2017502469A JP2017502469A (ja) 2017-01-19
JP2017502469A5 JP2017502469A5 (enExample) 2017-04-06
JP6208371B2 true JP6208371B2 (ja) 2017-10-04

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JP2016544063A Active JP6208371B2 (ja) 2013-12-30 2014-12-22 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2016544160A Active JP6590811B2 (ja) 2013-12-30 2014-12-22 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2017171156A Active JP6462805B2 (ja) 2013-12-30 2017-09-06 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2019168023A Active JP6929910B2 (ja) 2013-12-30 2019-09-17 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム

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JP2017171156A Active JP6462805B2 (ja) 2013-12-30 2017-09-06 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2019168023A Active JP6929910B2 (ja) 2013-12-30 2019-09-17 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム

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Country Link
US (3) US9455112B2 (enExample)
EP (2) EP3090438B1 (enExample)
JP (4) JP6208371B2 (enExample)
KR (2) KR102359077B1 (enExample)
CN (3) CN105874555B (enExample)
NL (2) NL2014030B1 (enExample)
RU (1) RU2689391C2 (enExample)
TW (2) TWI608511B (enExample)
WO (2) WO2015101538A1 (enExample)

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TW201528312A (zh) 2015-07-16
KR20160104712A (ko) 2016-09-05
JP2017502469A (ja) 2017-01-19
JP6590811B2 (ja) 2019-10-16
JP6462805B2 (ja) 2019-01-30
WO2015101537A1 (en) 2015-07-09
RU2689391C2 (ru) 2019-05-28
TWI608511B (zh) 2017-12-11
WO2015101538A1 (en) 2015-07-09
US20160314935A1 (en) 2016-10-27
JP6929910B2 (ja) 2021-09-01
US9455112B2 (en) 2016-09-27
CN105874554B (zh) 2018-05-08
US9466453B2 (en) 2016-10-11
CN108666188A (zh) 2018-10-16
RU2016131081A3 (enExample) 2018-06-20
US20150187533A1 (en) 2015-07-02
JP2018032861A (ja) 2018-03-01
CN105874554A (zh) 2016-08-17
CN105874555A (zh) 2016-08-17
EP3090438A1 (en) 2016-11-09
NL2014029A (en) 2015-07-01
CN105874555B (zh) 2018-06-15
RU2016131081A (ru) 2018-02-06
KR20160104711A (ko) 2016-09-05
KR102359077B1 (ko) 2022-02-07
CN108666188B (zh) 2020-06-12
TW201532096A (zh) 2015-08-16
EP3090439A1 (en) 2016-11-09
KR102427119B1 (ko) 2022-07-29
EP3090439B1 (en) 2020-06-24
WO2015101538A4 (en) 2015-08-27
EP3090438B1 (en) 2020-03-25
US20150187541A1 (en) 2015-07-02
WO2015101537A4 (en) 2015-08-27
NL2014030B1 (en) 2016-01-08
US10622188B2 (en) 2020-04-14
NL2014029B1 (en) 2016-01-08
NL2014030A (en) 2015-07-01
JP2017501553A (ja) 2017-01-12
TWI661457B (zh) 2019-06-01
JP2020009777A (ja) 2020-01-16

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