JP4134000B2 - 電子銃 - Google Patents
電子銃 Download PDFInfo
- Publication number
- JP4134000B2 JP4134000B2 JP2004314232A JP2004314232A JP4134000B2 JP 4134000 B2 JP4134000 B2 JP 4134000B2 JP 2004314232 A JP2004314232 A JP 2004314232A JP 2004314232 A JP2004314232 A JP 2004314232A JP 4134000 B2 JP4134000 B2 JP 4134000B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode pellet
- retainer
- electron
- electron gun
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000008188 pellet Substances 0.000 claims description 95
- 238000010894 electron beam technology Methods 0.000 claims description 23
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000005684 electric field Effects 0.000 description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910000691 Re alloy Inorganic materials 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- YUSUJSHEOICGOO-UHFFFAOYSA-N molybdenum rhenium Chemical compound [Mo].[Mo].[Re].[Re].[Re] YUSUJSHEOICGOO-UHFFFAOYSA-N 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 239000011575 calcium Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/06—Electron or ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/06—Electron or ion guns
- H01J23/065—Electron or ion guns producing a solid cylindrical beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2225/00—Transit-time tubes, e.g. Klystrons, travelling-wave tubes, magnetrons
- H01J2225/02—Tubes with electron stream modulated in velocity or density in a modulator zone and thereafter giving up energy in an inducing zone, the zones being associated with one or more resonators
- H01J2225/10—Klystrons, i.e. tubes having two or more resonators, without reflection of the electron stream, and in which the stream is modulated mainly by velocity in the zone of the input resonator
- H01J2225/14—Klystrons, i.e. tubes having two or more resonators, without reflection of the electron stream, and in which the stream is modulated mainly by velocity in the zone of the input resonator with tube-like electron stream coaxial with the axis of the resonators
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microwave Tubes (AREA)
Description
電子を放出させるための熱エネルギーを前記カソードペレットに与えるヒータが内蔵されたヒータキャップと、
電子ビームの最外殻に対する表面の平均角度がピアス角に一致する形状に形成された、前記電子ビームを集束するためのウェネルト電極と、
サイドエミッションが発生しないように前記カソードペレットの電子放出面の周縁を覆うようにして前記カソードペレットを前記ヒータキャップに係止し、該カソードペレットを前記ヒータキャップ上に設置固定するリテーナと、
を有する構成とする。
12、32 ヒータ
13、33 ヒータキャップ
14、34 ウェネルト電極
15、35 リテーナ
16 電子銃筺体
17 金属支持体
21 電子銃
22 高周波回路
23 コレクタ
24 アノード電極
50 電子ビーム
Claims (5)
- 電子を放出する円板状のカソードペレットと、
電子を放出させるための熱エネルギーを前記カソードペレットに与えるヒータが内蔵されたヒータキャップと、
電子ビームの最外殻に対する表面の平均角度がピアス角に一致する形状に形成された、前記電子ビームを集束するためのウェネルト電極と、
サイドエミッションが発生しないように前記カソードペレットの電子放出面の周縁を覆うようにして前記カソードペレットを前記ヒータキャップに係止し、該カソードペレットを前記ヒータキャップ上に設置固定するリテーナと、
を有する電子銃。 - 前記リテーナは、
前記カソードペレットの周縁を前記ヒータキャップに押圧するように、前記カソードペレットと当接する端部が折り返し形状に成形された請求項1記載の電子銃。 - 前記リテーナは、
前記カソードペレットの周縁を前記ヒータキャップに押圧するように、前記カソードペレットと当接する端部が円弧状に成形された請求項1記載の電子銃。 - 前記リテーナの厚さが、
0.2mm以下、または前記カソードペレットの直径の10%以下の少なくともいずれか一方を満たす請求項1乃至3のいずれか1項記載の電子銃。 - 前記カソードペレットの電子放出面の周縁を覆う部位の内径は、
前記カソードペレットの直径の90%である請求項1乃至4のいずれか1項記載の電子銃。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004314232A JP4134000B2 (ja) | 2004-10-28 | 2004-10-28 | 電子銃 |
US11/251,786 US20060091776A1 (en) | 2004-10-28 | 2005-10-18 | Electron gun |
KR1020050098945A KR100751840B1 (ko) | 2004-10-28 | 2005-10-20 | 전자총 |
FR0553240A FR2877489B1 (fr) | 2004-10-28 | 2005-10-25 | Canon a electrons |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004314232A JP4134000B2 (ja) | 2004-10-28 | 2004-10-28 | 電子銃 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006127899A JP2006127899A (ja) | 2006-05-18 |
JP4134000B2 true JP4134000B2 (ja) | 2008-08-13 |
Family
ID=36177567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004314232A Expired - Lifetime JP4134000B2 (ja) | 2004-10-28 | 2004-10-28 | 電子銃 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060091776A1 (ja) |
JP (1) | JP4134000B2 (ja) |
KR (1) | KR100751840B1 (ja) |
FR (1) | FR2877489B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2789848C1 (ru) * | 2022-05-30 | 2023-02-14 | Василий Юрьевич Григорьев | Катодный узел электронной пушки |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103236388A (zh) * | 2013-04-16 | 2013-08-07 | 成都国光电气股份有限公司 | 一种行波管阴极加钼套结构及制作方法 |
KR102359077B1 (ko) * | 2013-12-30 | 2022-02-07 | 에이에스엠엘 네델란즈 비.브이. | 캐소드 어레인지먼트, 전자총, 및 그런 전자총을 포함하는 리소그래피 시스템 |
JP5835822B1 (ja) | 2014-06-30 | 2015-12-24 | Necネットワーク・センサ株式会社 | 高周波回路システム |
KR101641049B1 (ko) | 2014-11-06 | 2016-07-20 | 국방과학연구소 | 부품 교체 가능한 전자 총 |
US9697988B2 (en) | 2015-10-14 | 2017-07-04 | Advanced Ion Beam Technology, Inc. | Ion implantation system and process |
JP7092470B2 (ja) * | 2017-07-24 | 2022-06-28 | Necネットワーク・センサ株式会社 | 電子銃 |
DE102018123100A1 (de) | 2018-09-20 | 2020-03-26 | Thales Deutschland GmbH Electron Devices | Elektronenkanone |
RU2756845C1 (ru) * | 2020-12-28 | 2021-10-06 | Акционерное Общество "Наука И Инновации" | Катодно-подогревательный узел для электронно-лучевой пушки |
RU2766565C1 (ru) * | 2021-05-25 | 2022-03-15 | Акционерное Общество "Наука И Инновации" | Катодный узел с профилированным тепловым зазором для мощной электронно-лучевой пушки |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3107036B2 (ja) * | 1998-03-20 | 2000-11-06 | 日本電気株式会社 | 冷陰極搭載電子管用電子銃 |
US6492647B1 (en) * | 1999-05-07 | 2002-12-10 | Agere Systems, Inc. | Electron guns for lithography tools |
JP3293605B2 (ja) * | 1999-09-29 | 2002-06-17 | 日本電気株式会社 | 集束電極付電界放出型冷陰極搭載電子銃 |
JP3497147B2 (ja) * | 2001-09-19 | 2004-02-16 | 株式会社エー・イー・ティー・ジャパン | 超小形マイクロ波電子源 |
JP3996442B2 (ja) * | 2002-05-27 | 2007-10-24 | Necマイクロ波管株式会社 | 電子銃 |
-
2004
- 2004-10-28 JP JP2004314232A patent/JP4134000B2/ja not_active Expired - Lifetime
-
2005
- 2005-10-18 US US11/251,786 patent/US20060091776A1/en not_active Abandoned
- 2005-10-20 KR KR1020050098945A patent/KR100751840B1/ko active IP Right Grant
- 2005-10-25 FR FR0553240A patent/FR2877489B1/fr active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2789848C1 (ru) * | 2022-05-30 | 2023-02-14 | Василий Юрьевич Григорьев | Катодный узел электронной пушки |
Also Published As
Publication number | Publication date |
---|---|
KR20060054128A (ko) | 2006-05-22 |
FR2877489A1 (fr) | 2006-05-05 |
KR100751840B1 (ko) | 2007-08-24 |
FR2877489B1 (fr) | 2015-07-03 |
JP2006127899A (ja) | 2006-05-18 |
US20060091776A1 (en) | 2006-05-04 |
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