JP6194298B2 - 温度検出装置 - Google Patents

温度検出装置 Download PDF

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Publication number
JP6194298B2
JP6194298B2 JP2014183016A JP2014183016A JP6194298B2 JP 6194298 B2 JP6194298 B2 JP 6194298B2 JP 2014183016 A JP2014183016 A JP 2014183016A JP 2014183016 A JP2014183016 A JP 2014183016A JP 6194298 B2 JP6194298 B2 JP 6194298B2
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thermocouple
protective tube
holder
support
tube
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Japanese (ja)
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JP2016057142A5 (enExample
JP2016057142A (ja
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政文 黒岩
政文 黒岩
努 栗原
努 栗原
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Fenwal Controls of Japan Ltd
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Fenwal Controls of Japan Ltd
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JP2014183016A 2014-09-09 2014-09-09 温度検出装置 Active JP6194298B2 (ja)

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JP2014183016A JP6194298B2 (ja) 2014-09-09 2014-09-09 温度検出装置

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JP2014183016A JP6194298B2 (ja) 2014-09-09 2014-09-09 温度検出装置

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JP2016057142A JP2016057142A (ja) 2016-04-21
JP2016057142A5 JP2016057142A5 (enExample) 2017-06-15
JP6194298B2 true JP6194298B2 (ja) 2017-09-06

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JP2014183016A Active JP6194298B2 (ja) 2014-09-09 2014-09-09 温度検出装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110954230A (zh) * 2019-11-27 2020-04-03 东华大学 一种柔性热电偶温度传感器及其制备方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6712556B2 (ja) * 2017-03-08 2020-06-24 株式会社神戸製鋼所 高温高圧炉用の温度計測器
US10502641B2 (en) * 2017-05-18 2019-12-10 Sensata Technologies, Inc. Floating conductor housing
CN209247188U (zh) * 2018-07-04 2019-08-13 Wika亚历山大·威甘德欧洲股份两合公司 热电偶结构和用于在容器中固定热电偶的结构
KR102608535B1 (ko) * 2019-01-07 2023-11-30 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 반도체 장치의 제조 방법 및 히터 유닛

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04131735U (ja) * 1991-05-24 1992-12-04 神鋼電機株式会社 測温センサ
JP3370416B2 (ja) * 1994-01-20 2003-01-27 東京エレクトロン株式会社 温度計
JP3687240B2 (ja) * 1996-12-11 2005-08-24 山里産業株式会社 熱電対の導線被覆構造
JP2006234734A (ja) * 2005-02-28 2006-09-07 Fenwall Controls Of Japan Ltd 温度センサ配置部材およびこれを備えた温度計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110954230A (zh) * 2019-11-27 2020-04-03 东华大学 一种柔性热电偶温度传感器及其制备方法

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JP2016057142A (ja) 2016-04-21

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