JP6194138B2 - 窒化物半導体紫外線発光素子 - Google Patents
窒化物半導体紫外線発光素子 Download PDFInfo
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Description
最初に、本発明の実施形態に係る発光素子の構造の一例について、図面を参照して説明する。図1は、本発明の実施形態に係る発光素子の構造の一例を模式的に示した要部断面図である。なお、図1では、説明の理解を容易にするために、要部を強調して発明内容を模式的に示しているため、各部の寸法比は必ずしも実際の素子と同じ寸法比とはなっていない。
[活性層の表面粗さ]
半導体発光素子の分野における通常の知識に従えば、光出力が良好な活性層22を得るためには、活性層22の結晶成長時において、発光の妨げとなる転位やクラックなどの欠陥の導入を抑制した成長、即ち、成長表面の平坦性を維持した二次元成長(一層ずつ丁寧に積層する成長)を行うべきである。特に、厚さが数nm程度という極めて薄い井戸層22aを、欠陥の導入を抑制しながら均一に成長させるためには、成長表面における粗さが、少なくとも井戸層22aの厚さよりも小さくなるように抑制するべきである。
次に、下地部10におけるAlN層12の表面の状態について、図面を参照して説明する。図11〜図16は、試料1〜5及び試料Aの下地部におけるAlN層の表面の状態を示すAFM像である。なお、試料Aは、試料1及び試料2の中間の条件で作製された試料である。
これまでの説明において例示した試料1〜5は、図9に示すピーク発光波長が265nm±3nmの範囲内に収まっていることから明らかなように、井戸層22aにおけるAlNのモル分率が同程度の大きさである。しかしながら、試料1〜5とはAlNモル分率が大きく異なる井戸層22aを有する発光素子1であっても、試料1〜5と同様にGaの偏析は生じ得る。
10 下地部
11 基板
12 AlN層
20 発光部
21 n型クラッド層
22 活性層
22a 井戸層
22b バリア層
22c 電子ブロック層
23 p型クラッド層
24 p型コンタクト層
30 p電極
40 n電極
Claims (10)
- (0001)面に対して傾斜することで多段状のテラスが形成された表面を有するサファイアから成る基板と、前記基板の表面上に形成されるAlN層と、を含む下地部と、
前記下地部の表面上に形成される、AlGaN系半導体層を有する活性層を含む発光部と、を備え、
少なくとも、前記下地部の前記AlN層、前記発光部における前記活性層及びその間の各層が、多段状のテラスが形成された表面を有するエピタキシャル成長層であり、
前記活性層が、AlXGa1−XN(0<X<1)で構成される井戸層を少なくとも1つ含む量子井戸構造を有し、
前記活性層の表面において、25μm四方の領域における平均粗さが、前記井戸層の厚さ以上かつ10nm以下になることを特徴とする窒化物半導体紫外線発光素子。 - 前記発光部に含まれる前記活性層の表面において、25μm四方の領域における平均粗さが、3nm以上になることを特徴とする請求項1に記載の窒化物半導体紫外線発光素子。
- 前記発光部に含まれる前記活性層の表面において、25μm四方の領域における平均粗さが、6nm以下になることを特徴とする請求項1または2に記載の窒化物半導体紫外線発光素子。
- 前記発光部に含まれる、前記活性層の直前に形成される層の表面において、25μm四方の領域における平均粗さが、前記井戸層の厚さ以上かつ10nm以下になることを特徴とする請求項1〜3のいずれか1項に記載の窒化物半導体紫外線発光素子。
- 前記活性層と前記発光部に含まれる前記活性層の直前に形成される層とのそれぞれの表面における25μm四方の領域における平均粗さの差分の絶対値を、前記活性層の表面における25μm四方の領域における平均粗さで除した割合が、10%以下であることを特徴とする請求項1〜4のいずれか1項に記載の窒化物半導体紫外線発光素子。
- 前記下地部に含まれる前記AlN層の表面において、上面視で、前記基板の傾斜方向におけるテラスの平均的な幅が、0.3μm以上かつ1μm以下であることを特徴とする請求項1〜5のいずれか1項に記載の窒化物半導体紫外線発光素子。
- 前記下地部に含まれる前記AlN層の表面において、テラスが形成する段差の平均的な高さが、8nm以上かつ14nm以下であることを特徴とする請求項1〜6のいずれか1項に記載の窒化物半導体紫外線発光素子。
- 前記発光部に含まれる前記活性層の表面において、25μm四方の領域における高さの度数分布が、高さが0から増大するにつれて、下に凸の曲線から上に凸の曲線に変曲しつつ単調増加して極大値をとった後、上に凸の曲線から下に凸の曲線に変曲しつつ単調減少する曲線状になることを特徴とする請求項1〜7のいずれか1項に記載の窒化物半導体紫外線発光素子。
- ピーク発光波長が、230nm以上かつ340nm以下であることを特徴とする請求項1〜8のいずれか1項に記載の窒化物半導体紫外線発光素子。
- (0001)面に対して傾斜することで多段状のテラスが形成された表面を有するサファイアから成る基板と、前記基板の表面上に形成されるAlN層と、を含む下地部を形成する工程と、
前記下地部の表面上に形成される、AlGaN系半導体層を有する活性層を含む発光部を形成する工程と、を備え、
Al X Ga 1−X N(0<X<1)で構成される井戸層を少なくとも1つ含む量子井戸構造を有する前記活性層の表面における、25μm四方の領域における平均粗さが、前記井戸層の厚さ以上かつ10nm以下になる条件で、少なくとも、前記下地部の前記AlN層、前記発光部における前記活性層及びその間の各層を、多段状のテラスの側面が成長することで二次元成長するステップフロー成長によって形成することを特徴とする窒化物半導体紫外線発光素子の製造方法。
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JP2017224841A (ja) * | 2017-08-09 | 2017-12-21 | 創光科学株式会社 | 窒化物半導体紫外線発光素子 |
WO2019102557A1 (ja) * | 2017-11-22 | 2019-05-31 | 創光科学株式会社 | 窒化物半導体発光素子 |
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JP6867180B2 (ja) * | 2017-02-01 | 2021-04-28 | 日機装株式会社 | 半導体発光素子の製造方法 |
WO2018150651A1 (ja) * | 2017-02-15 | 2018-08-23 | 創光科学株式会社 | 窒化物半導体紫外線発光素子の製造方法及び窒化物半導体紫外線発光素子 |
DE102017113383B4 (de) * | 2017-06-19 | 2023-03-09 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterchip und Verfahren zur Herstellung eines Halbleiterchips |
JP6998146B2 (ja) * | 2017-08-03 | 2022-01-18 | 旭化成株式会社 | 紫外線発光素子及び紫外線照射モジュール |
CN111712930B (zh) * | 2018-02-14 | 2023-09-12 | 日机装株式会社 | 氮化物半导体紫外线发光元件 |
JP6698925B1 (ja) | 2019-08-06 | 2020-05-27 | 日機装株式会社 | 窒化物半導体発光素子 |
JP7141425B2 (ja) * | 2020-04-28 | 2022-09-22 | 日機装株式会社 | 窒化物半導体発光素子 |
WO2021260849A1 (ja) * | 2020-06-24 | 2021-12-30 | 創光科学株式会社 | 窒化物半導体紫外線発光素子 |
WO2021260850A1 (ja) * | 2020-06-24 | 2021-12-30 | 創光科学株式会社 | 窒化物半導体紫外線発光素子及びその製造方法 |
US20230299232A1 (en) * | 2020-07-07 | 2023-09-21 | Soko Kagaku Co., Ltd. | Nitride Semiconductor Ultraviolet Light-Emitting Element and Manufacturing Method Thereof |
CN113054063B (zh) * | 2021-02-04 | 2023-03-14 | 中国科学院宁波材料技术与工程研究所 | 紫外发光二极管、紫外led外延层结构及其制备方法 |
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KR101995152B1 (ko) | 2019-07-02 |
KR20180011242A (ko) | 2018-01-31 |
EP3293774A1 (en) | 2018-03-14 |
US10297715B2 (en) | 2019-05-21 |
EP3293774A4 (en) | 2018-08-08 |
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RU2676178C1 (ru) | 2018-12-26 |
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